静态涡轮流量计与微机械硅扭矩传感器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906515

N. Svedin, E. Stemme, Göran Stemme

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引用次数: 42

摘要

介绍了一种新型的流量传感器，其中静态涡轮将体积流量转换为扭矩。与传统的涡轮仪表相比，车轮不旋转，因此它对轴承摩擦和磨损不敏感，一个旋转的车轮经历。对不同叶片长度和叶片角度下传感器的性能进行了评价，并建立了叶片长度和叶片角度对传感器性能影响的预测模型。车轮的优化可以通过最大化灵敏度/压力损失比来实现。本分析中最有效的车轮叶片长度为2.7 mm，叶片角度为30/spl°/，使用新型硅扭矩传感器设计测量时，灵敏度为4.0 /spl mu/V/V/(1/min)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A static turbine flow meter with a micromachined silicon torque sensor

A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. In contrast to conventional turbine meters, the wheel does not rotate and consequently it is not sensitive to bearing friction and wear that a rotating wheel experiences. The sensor performance has been evaluated for different blade lengths and blade angles and a model is given to predict the influence of these parameters. Optimization of the wheel can be done in terms of maximizing the sensitivity/pressure-loss ratio. The most efficient wheel in this analysis has a blade length of 2.7 mm and a blade angle of 30/spl deg/ giving a sensitivity of 4.0 /spl mu/V/V/(1/min) when measured using a new silicon torque sensor design.

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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