A micro ER valve fabricated by micromachining

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906580

K. Yoshida, M. Kikuchi, Jung-Ho Park, S. Yokota

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引用次数: 6

Abstract

As an advanced control component for practical micromachines using fluid power in millimeter size, the authors have proposed a micro ER valve using homogeneous ER fluids and verified the validity through basic experiments using several micro ER valves fabricated by conventional machining. In this paper, to control micro grippers mounted on micromachines, further miniaturized ER valves are realized by using micromachining. Firstly, to investigate an ER effect in micro size, several 2-port micro ER valves with different electrode gap lengths are fabricated and investigated. It is ascertained that the viscosity change rate is 4.5 constant with miniaturization. Secondly, a 3-port micro ER valve is fabricated and basic characteristics are experimentally investigated. It is ascertained that the controllable pressure change rate is 60% of supply pressure and the rise time is 0.2 s. Finally, the validity of the micro ER valve is confirmed by applying to position control of a bellows microactuator.

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微机械加工制备的微型电磁阀

作为一种先进的毫米级流体动力微机械控制元件，作者提出了一种采用均质内质流体的微内质阀，并通过几个常规加工的微内质阀的基础实验验证了其有效性。为了控制安装在微机械上的微夹持器，本文采用微加工技术实现了电磁阀的进一步小型化。首先，为了研究微尺度下的电流变换器效应，制作并研究了几个具有不同电极间隙长度的2端口微型电流变换器阀。随着微型化，确定了粘度变化率为4.5常数。其次，制作了一种3孔微型电磁阀，并对其基本特性进行了实验研究。确定了可控压力变化率为供给压力的60%，上升时间为0.2 s。最后，通过应用于波纹管微执行器的位置控制，验证了微型电磁阀的有效性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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