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IEEE/LEOS International Conference on Optical MEMs最新文献

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Medical and biomedical application of MEMS and optical MEMS MEMS和光学MEMS的医疗和生物医学应用
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031500
H. Miyajima
{"title":"Medical and biomedical application of MEMS and optical MEMS","authors":"H. Miyajima","doi":"10.1109/OMEMS.2002.1031500","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031500","url":null,"abstract":"MEMS for medical/biomedical application have become of great interest. Olympus is active mainly in two areas, endoscope and its peripherals, and genomic application. In this paper, some of our relevant MEMS R&D activities are presented.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123622105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes 多静电电极扭转微镜的闭环模糊控制
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031455
J. Chiou, Y.C. Lin, S. Wu
{"title":"Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes","authors":"J. Chiou, Y.C. Lin, S. Wu","doi":"10.1109/OMEMS.2002.1031455","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031455","url":null,"abstract":"The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125747802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
2D optical scanner with magnetostrictive actuation for industrial applications 用于工业应用的磁致伸缩驱动二维光学扫描仪
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031489
A. Debray, H. Fujita, A. Ludwig, E. Quandt, H. Muro, T. Oki, A. Asaoka
{"title":"2D optical scanner with magnetostrictive actuation for industrial applications","authors":"A. Debray, H. Fujita, A. Ludwig, E. Quandt, H. Muro, T. Oki, A. Asaoka","doi":"10.1109/OMEMS.2002.1031489","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031489","url":null,"abstract":"MEMS technology has been widely used to realize optical scanners. However, the actuation principle has been so far limited to conventional principles and the size of the mirror limited below 1 mm/sup 2/. If magnetostriction is used for the actuation and the size of the mirror is tens of mm/sup 2/, this will allow for industrial applications. The work stresses the new scanner design for obtaining large deflection angles and higher structural strength.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127112568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Numerical analysis of micro hybrid Multi-Level Zone Plates using electromagnetic and scalar methods 用电磁法和标量法对微混合多级带板进行数值分析
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031448
Y. Komai, K. Oka, W. Klaus, K. Kodate
{"title":"Numerical analysis of micro hybrid Multi-Level Zone Plates using electromagnetic and scalar methods","authors":"Y. Komai, K. Oka, W. Klaus, K. Kodate","doi":"10.1109/OMEMS.2002.1031448","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031448","url":null,"abstract":"In this work we report on the results of a rigorous numerical analysis taking into account the whole Multi-Level Zone Plate (MLZP) structure. The analysis is carried out with one-dimensional structures using both electromagnetic and scalar methods as well as TE and TM illumination.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123737973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electromagnetic variable optical attenuator 电磁可变光衰减器
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031437
C. Ji, Y. Yee, Junghoon Choi, J. Bu
{"title":"Electromagnetic variable optical attenuator","authors":"C. Ji, Y. Yee, Junghoon Choi, J. Bu","doi":"10.1109/OMEMS.2002.1031437","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031437","url":null,"abstract":"Electromagnetically actuated micromirror is a promising candidate for optical switching applications. In this research, we have designed, fabricated and tested a microelectromechanical systems (MEMS) variable optical attenuator (VOA) composed of an electromagnetic micromirror and integrated fibers. The effects of fiber arrangement and the deployment of lensed fibers on the attenuator performance are analyzed based on experimental results.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116744999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 25
Precisely tunable Fabry-Perot filter for optical communications 用于光通信的精确可调谐法布里-珀罗滤波器
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031498
N. Kanbara, K. Suzuki, T. Watanabe, H. Iwaoka
{"title":"Precisely tunable Fabry-Perot filter for optical communications","authors":"N. Kanbara, K. Suzuki, T. Watanabe, H. Iwaoka","doi":"10.1109/OMEMS.2002.1031498","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031498","url":null,"abstract":"Proposed a micromachined precisely tunable Fabry-Perot filter fabricated using the anodic bonding method. The filter consists of an SOI wafer and glass substrate, and has multilayer dielectric mirrors. The wafer and substrate are bonded together with a small gap between them using the anodic bonding method. Wavelength tuning is achieved electrostatically by applying voltage to the SOI wafer and electrodes on glass substrate. We have demonstrated a prototype tunable Fabry-Perot filter that obtained a full width half that of the maximum width (FWHM), free spectral range (FSR) of around 0.5 nm and 35 nm respectively, and a driving voltage of 29.1 V at 30 nm.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124940683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Characteristics of 16/spl times/16 micro optical switch 16/spl次/16微光开关特性
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031467
Hyung Choi, Yongseop Yoon, Jin Hwan Kim, Y. S. Kim, Sang-Chae Kim, Sung Chul Kim, Kideok Bae
{"title":"Characteristics of 16/spl times/16 micro optical switch","authors":"Hyung Choi, Yongseop Yoon, Jin Hwan Kim, Y. S. Kim, Sang-Chae Kim, Sung Chul Kim, Kideok Bae","doi":"10.1109/OMEMS.2002.1031467","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031467","url":null,"abstract":"We measured the characteristics of free space type 16/spl times/16 micro optical switches. Two types of micro mirrors to switch the laser beam were used. One is electrostatic actuation type and the other is mixing (electromagnetic+electrostatic) type. We could lessen the insertion loss by arranging the lenses in zigzag style which shorten the optical path. We compared the insertion losses of the optical switches with that of in-line type bench which has loss from the optical bench part only. The loss from the bench part was about 2 dB while the total insertion loss was about 5 dB and 12 dB for each mirror type. From this result, the main reason of the insertion loss was known to be from the mirror part. The switching time was about 15 msec. and the crosstalk was less than 50 dB for both types of switches.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134408988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Diffractive MEMS: the polychromator and related devices 衍射微机电系统:多色器及相关器件
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031416
S. Senturia
{"title":"Diffractive MEMS: the polychromator and related devices","authors":"S. Senturia","doi":"10.1109/OMEMS.2002.1031416","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031416","url":null,"abstract":"MEMS and optics are a natural match. There are several reasons: MEMS devices have dimensions and achievable actuation distances comparable to the wavelength of light; smooth surfaced dielectrics, semiconductors, and metals can be used in various combinations; and, photons don't weigh anything, so relatively feeble MEMS actuators can easily manipulate them. Moveable and tiltable mirrors and pop-up structures have held center stage in optical MEMS for several years, with uses in displays, micro-optical benches, scanners, and a variety of optical telecom switching applications. Less noticed, but perhaps equally important in the long run, is a family of diffractive MEMS structures that represent paradigm shifts in display technology, infrared spectroscopy, and optical telecom. The polychromator, uses a set of parallel mirror elements, each one of which is individually actuatable with an analog signal, achieving continuous rather than binary control of the mirror element position As a result, an aperiodic diffraction grating is realized with a fully programmable optical transfer function. When illuminated with white light, the spectral content at a fixed viewing angle can be controlled by adjustment of the various mirror element positions.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134093567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Rigorous evaluation of a Talbot waveguide coupler 塔尔博特波导耦合器的严格评估
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031461
W. Klaus, M. Fujino, K. Kodate
{"title":"Rigorous evaluation of a Talbot waveguide coupler","authors":"W. Klaus, M. Fujino, K. Kodate","doi":"10.1109/OMEMS.2002.1031461","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031461","url":null,"abstract":"The Talbot array Illuminator (TAIL) is well known as a diffractive element that efficiently transforms a monochromatic optical wave into an array of bright spots. To date, TAIL's have been thoroughly studied both analytically and experimentally mainly within the frame of scalar diffraction theory and paraxial approximation. However, only little investigation has been done so far on what happens to the illumination characteristics when the TAIL's feature size becomes of the order of the wavelength and whether illumination of less than one TAIL period can be in any way useful. In the following, we try to answer those questions by taking a look at the performance of a TAIL when acting as a coupling element to an optical waveguide. For simplicity we confine here our evaluation to optical structures that vary only in two dimensions, e.g., a slab waveguide, and TE illumination.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117113303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Segmented deformable micro-mirror for free-space optical communication 用于自由空间光通信的分段可变形微镜
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031509
Y. Peter, E. Carr, O. Solgaard
{"title":"Segmented deformable micro-mirror for free-space optical communication","authors":"Y. Peter, E. Carr, O. Solgaard","doi":"10.1109/OMEMS.2002.1031509","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031509","url":null,"abstract":"In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"131 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115898402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
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