{"title":"用电磁法和标量法对微混合多级带板进行数值分析","authors":"Y. Komai, K. Oka, W. Klaus, K. Kodate","doi":"10.1109/OMEMS.2002.1031448","DOIUrl":null,"url":null,"abstract":"In this work we report on the results of a rigorous numerical analysis taking into account the whole Multi-Level Zone Plate (MLZP) structure. The analysis is carried out with one-dimensional structures using both electromagnetic and scalar methods as well as TE and TM illumination.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Numerical analysis of micro hybrid Multi-Level Zone Plates using electromagnetic and scalar methods\",\"authors\":\"Y. Komai, K. Oka, W. Klaus, K. Kodate\",\"doi\":\"10.1109/OMEMS.2002.1031448\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work we report on the results of a rigorous numerical analysis taking into account the whole Multi-Level Zone Plate (MLZP) structure. The analysis is carried out with one-dimensional structures using both electromagnetic and scalar methods as well as TE and TM illumination.\",\"PeriodicalId\":285115,\"journal\":{\"name\":\"IEEE/LEOS International Conference on Optical MEMs\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-11-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/LEOS International Conference on Optical MEMs\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2002.1031448\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/LEOS International Conference on Optical MEMs","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2002.1031448","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Numerical analysis of micro hybrid Multi-Level Zone Plates using electromagnetic and scalar methods
In this work we report on the results of a rigorous numerical analysis taking into account the whole Multi-Level Zone Plate (MLZP) structure. The analysis is carried out with one-dimensional structures using both electromagnetic and scalar methods as well as TE and TM illumination.