2D optical scanner with magnetostrictive actuation for industrial applications

Abstract

MEMS technology has been widely used to realize optical scanners. However, the actuation principle has been so far limited to conventional principles and the size of the mirror limited below 1 mm/sup 2/. If magnetostriction is used for the actuation and the size of the mirror is tens of mm/sup 2/, this will allow for industrial applications. The work stresses the new scanner design for obtaining large deflection angles and higher structural strength.