用于自由空间光通信的分段可变形微镜

Y. Peter, E. Carr, O. Solgaard
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引用次数: 14

摘要

本文描述了一种基于MEMS结构与电极芯片键合的自适应光学反射镜的制造工艺。这种方法允许扩展到用于自由空间通信的大型镜像阵列。我们通过在200 V驱动电压下制作位移为1 /spl μ m的像素化4 × 4微镜阵列来演示这一过程。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Segmented deformable micro-mirror for free-space optical communication
In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.
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