{"title":"用于自由空间光通信的分段可变形微镜","authors":"Y. Peter, E. Carr, O. Solgaard","doi":"10.1109/OMEMS.2002.1031509","DOIUrl":null,"url":null,"abstract":"In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"131 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Segmented deformable micro-mirror for free-space optical communication\",\"authors\":\"Y. Peter, E. Carr, O. Solgaard\",\"doi\":\"10.1109/OMEMS.2002.1031509\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.\",\"PeriodicalId\":285115,\"journal\":{\"name\":\"IEEE/LEOS International Conference on Optical MEMs\",\"volume\":\"131 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-11-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/LEOS International Conference on Optical MEMs\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2002.1031509\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/LEOS International Conference on Optical MEMs","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2002.1031509","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Segmented deformable micro-mirror for free-space optical communication
In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.