Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)最新文献_第4页

A novel fabrication process for high-aspect-ratio and co-axial multi-layer nickel microstructures 一种新型的高纵横比同轴多层镍微结构制备工艺

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838583

Ching‐Bin Lin, Mau-Kuo Wei, Chun-Hung Liu, Chung-Hsing Yen, Zhenguo Su, Yin-Teng Tai, Zhi-Hong Chen

引用次数: 2

Surface micromachined bridge configurations for accurate angle measurements 表面微机械桥配置精确的角度测量

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838501

J.R. Kaienburg, M. Huonker, R. Schellin

引用次数: 4

An improved TMAH Si-etching solution without attacking exposed aluminum 一种改进的TMAH硅腐蚀溶液，不腐蚀暴露的铝

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838579

G. Yan, P. Chan, I. Hsing, R.K. Sharma, J. Sin

引用次数: 126

3D nano wire-frame for handling and observing a single DNA fiber 用于处理和观察单个DNA纤维的3D纳米线框

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838582

T. Ooi, K. Matsumoto, M. Nakao, M. Otsubo, S. Shirakata, S. Tanaka, Y. Hatamura

引用次数: 7

A 1 mG lateral CMOS-MEMS accelerometer 一个1mg横向CMOS-MEMS加速度计

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838568

H. Luo, G. Fedder, L. R. Carley

引用次数: 58

N-well based CMOS calorimetric chemical sensors 基于n阱的CMOS量热化学传感器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838497

N. Kerness, A. Koll, A. Schaufelbuhl, C. Hagleitner, A. Hierlemann, O. Brand, H. Baltes

引用次数: 18

Thin flexible end-effector using pneumatic balloon actuator 薄型柔性末端执行器采用气动球囊执行器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838549

F. Kawai, P. Cusin, S. Konishi

引用次数: 135

A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect 一种利用间隙敏感静电刚度变化效应的真空封装差分谐振加速度计

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838542

Byeungleul Lee, C. Oh, Soo Lee, Y. Oh, K. Chun

{"title":"A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect","authors":"Byeungleul Lee, C. Oh, Soo Lee, Y. Oh, K. Chun","doi":"10.1109/MEMSYS.2000.838542","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838542","url":null,"abstract":"This paper proposes an INS (Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer (DRXL) by using the epitaxially grown thick polysilicon process. This proposed DRXL device produces a differential digital output upon an applied acceleration, and the principle is a gap-dependent electrical stiffness variation of the electrostatic resonator with torsion beam structures. Using this new operating concept, we designed, fabricated and tested the proposed device. The final device was fabricated by using the wafer level vacuum packaging process. The hermetic sealing cap structure was made of Pyrex 7740 glass with Ti layer as gettering material, and this cap wafer was anodically bonded with the polysilicon wafer at vacuum ambience. The measured Q-factor of the vacuum packaged DRXL was about 1/spl times/10/sup 3/ and the estimated inner pressure was about 200[mTorr]. We also achieved 73[Hz] output frequency change per unit G(9.8 m/s/sup c/) input with 12,716[Hz] nominal resonant frequency.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127849758","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 48

Stretched-film micromirrors for improved optical flatness 用于改善光学平整度的拉伸膜微镜

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838604

J. Nee, R. Conant, Matthew R. Hart, Richard S. Muller, Kam Y. Lau

引用次数: 38

Ultrasonic micromixer for microfluidic systems 用于微流体系统的超声波微混合器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838494

Zhen Yang, H. Goto, M. Matsumoto, R. Maeda

{"title":"Ultrasonic micromixer for microfluidic systems","authors":"Zhen Yang, H. Goto, M. Matsumoto, R. Maeda","doi":"10.1109/MEMSYS.2000.838494","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838494","url":null,"abstract":"This paper describes the design, fabrication and evaluation of an active micromixer. Mixing occurs directly from ultrasonic vibration. The intended use of the device was for integrated micro chemical synthesis systems or for micro total analysis systems. The pattern of inlets, outlet and mixing chamber were formed in glass. The whole flow path was encapsulated by anodic bonding of a Si wafer to the glass. A diaphragm (6 mm/spl times/6 mm/spl times/0.15 mm) was etched on the Si side for oscillation. The ultrasonic vibration originated from a bulk piezoelectric PZT ceramic (5 mm/spl times/4 mm/spl times/0.15 mm), which was excited by a 60 kHz square wave at 50 V (peak-to-peak). Liquids were mixed in a chamber (6 mm/spl times/6 mm/spl times/0.06 mm) with the Si oscillating diaphragm driven by the PZT. A solution of uranine and water were used to evaluate the mixing effectiveness. The entire process was recorded using a fluorescent microscope equipped with digital camera. The laminar flows of uranine solution (5 /spl mu/l/min) and water (5 /spl mu/l/min) were mixed effectively when the PZT was excited.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129140175","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 433