Surface micromachined bridge configurations for accurate angle measurements

Abstract

This paper reports on new sensing elements and the corresponding read-out circuit of a novel silicon surface micromachined angle sensor. Different bridge configurations-half and full bridges-comprising up to four variable capacitors were designed and characterized. The combination of such array-like arrangements and further improved sensing elements lead to a significant increase of performance. In this paper modeling, the evaluation circuit, and experimental results of different bridge configurations are presented.