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2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Comparative Study of Single Quantization Architecture And Dual Quantization Architecture Electromechanical Sigma-Delta Modulators For MEMS Accelerometer MEMS加速度计单量化与双量化机电Sigma-Delta调制器的比较研究
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090097
Xingyin Xiong, Zongwei Li, Kedu Han
{"title":"Comparative Study of Single Quantization Architecture And Dual Quantization Architecture Electromechanical Sigma-Delta Modulators For MEMS Accelerometer","authors":"Xingyin Xiong, Zongwei Li, Kedu Han","doi":"10.1109/INERTIAL48129.2020.9090097","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090097","url":null,"abstract":"An electromechanical sigma-delta modulator (EMSDM) has been popular in high-precision MEMS inertial sensors, since it is a good choice to achieve high system performances and directly output digital signal. This paper presents a comparative study of a single loop electromechanical sigma-delta modulators with single quantization architecture (EMSDM-SQA) and electromechanical sigma-delta modulators with dual quantization architecture (EMSDM-DQA) for MEMS capacitive accelerometers. The results of analysis, simulations and testing confirm that when the ADC in EMSDM-DQA is properly chosen, the effect of the ADC quantization noise can be neglected. The noise floor of the EMSDM-DQA is 141 ng/√Hz, which is 41% lower than that of the EMSDM-DQA.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117174512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Novel Electromagnetic Suspended Rate Integrating Vibratory Gyroscope 一种新型电磁悬浮速率积分振动陀螺仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090071
Kai Zeng, Yulie Wu, D. Xiao, Xuezhong Wu
{"title":"A Novel Electromagnetic Suspended Rate Integrating Vibratory Gyroscope","authors":"Kai Zeng, Yulie Wu, D. Xiao, Xuezhong Wu","doi":"10.1109/INERTIAL48129.2020.9090071","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090071","url":null,"abstract":"A novel rate integrating vibratory gyroscope with Foucault pendulum structure is introduced. It uses magnetic suspension technology to suspend pendulum (resonator) to eliminate friction at anchor, so as to improve the damping uniformity to achieve stable swing. Firstly, the basic principle of the rate integrating gyroscope is analyzed. Then, the main structure of the magnetic suspension gyroscope is introduced, and the pendulum has a length of 112 mm and a period of 0.68 s with the Q factor of 2998. Additionally, the magnetic field distribution of the structure is simulated. Finally, the designed gyroscope prototype is tested, and the experimental results show that the novel gyroscope can measure the rotation angle directly, and the angular gain factor is about 1.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126193519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Measurement method of frequency splitting for high- Q hemispherical resonator based on standing wave swing effect* 基于驻波摆幅效应的高Q半球形谐振器分频测量方法*
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090058
Shaoliang Li, Yijie Rong, Wanliang Zhao, Hao Yang, Jie Duan, Sihan Zhao
{"title":"Measurement method of frequency splitting for high- Q hemispherical resonator based on standing wave swing effect*","authors":"Shaoliang Li, Yijie Rong, Wanliang Zhao, Hao Yang, Jie Duan, Sihan Zhao","doi":"10.1109/INERTIAL48129.2020.9090058","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090058","url":null,"abstract":"This paper reports an improved method of frequency splitting for hemispherical resonator based on the standing wave swing effect. Firstly, the standing wave swing effect and the measurement method are analyzed theoretically. Secondly, it is validated by simulations and experiment. At last, the experimental results are analyzed and discussed. The experimental results show that, the frequency splitting value can be easily obtained by measuring the period of the standing wave swing effect. Using this method, the resolution of frequency splitting value could reach to 0.0002Hz if the Q factor is 1.5 × 107. The method presented is suitable for the measurement of ultra-low frequency splitting for high-Q hemispherical resonator.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"283 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122960201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Frequency Split Improvement of Fused Silica Micro Shell Resonator Based on Suppression of Geometric Harmonic Error 基于几何谐波误差抑制的熔融硅微壳谐振腔分频改进
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090011
Bin Li, X. Xi, Kun Lu, Yan Shi, D. Xiao, Xuezhong Wu
{"title":"Frequency Split Improvement of Fused Silica Micro Shell Resonator Based on Suppression of Geometric Harmonic Error","authors":"Bin Li, X. Xi, Kun Lu, Yan Shi, D. Xiao, Xuezhong Wu","doi":"10.1109/INERTIAL48129.2020.9090011","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090011","url":null,"abstract":"This paper demonstrates the impact of harmonic error on the natural frequency of micro shell resonator (MSR). Parameterized 3D model is established to analyze the frequency split of resonator with deviation along the circumferential and height direction. Both the n=1 tilt mode and n=2 wineglass modes are considered. The simulation results show that frequency split significantly increases as the growth of the 2nd and 4th harmonic errors. A rotary platform is used to reduce the harmonic error of the resonator by improving symmetry of the shell structure. Finally, more than 10 samples are electrostatically characterized and well matched with the simulation results.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116723017","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2 一种自噪声为1 ng/Hz1/2的力平衡微机械加速度计
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090057
Dandan Liu, Wenjie Wu, Jinquan Liu, J. Fan, Shitao Yan, L. Tu
{"title":"A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2","authors":"Dandan Liu, Wenjie Wu, Jinquan Liu, J. Fan, Shitao Yan, L. Tu","doi":"10.1109/INERTIAL48129.2020.9090057","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090057","url":null,"abstract":"MEMS Accelerometers are one of the core inertial measurement components in inertial navigation systems. This paper reports a high-precision force balance accelerometer based on MEMS technology. Utilizing a springmass structure with a low resonant frequency of 8 Hz and a periodic capacitive displacement transducer, the accelerometer has an extremely low self-noise of 1 ng/Hz1/2, which is one of the most sensitive MEMS-based accelerometers reported to date.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128116150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A Monolithic Tri-axis MEMS Gyroscope Operating in Air 一种单片三轴MEMS陀螺仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090013
K. Tseng, Ming-Huang Li, Sheng-Shian Li
{"title":"A Monolithic Tri-axis MEMS Gyroscope Operating in Air","authors":"K. Tseng, Ming-Huang Li, Sheng-Shian Li","doi":"10.1109/INERTIAL48129.2020.9090013","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090013","url":null,"abstract":"In this work, a monolithic tri-axis MEMS gyroscope is realized through a TSMC SOI-MEMS platform and the device is characterized in ambient pressure. To fully make use of the limited chip area, the device is based on a single driving loop to couple the vibrating energy to three axes of sensing loops through Coriolis force. The resonator behavior is first characterized in vacuum, and then the rate measurements are evaluated through the use of spectrum analyzer and Lock-in Amplifier in air. Finally, angle random walks of 24.6 deg/rtsec, 25.4 deg/rt-sec, 9.52 deg/rt-sec, and bias instabilities of 8.78 dps, 11.32 dps, 4.92 dps are measured, respectively.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115439330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity 均匀灵敏度平面内双轴MEMS谐振加速度计
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090093
Shudong Wang, Weilong Zhu, Yajing Shen, Juan Ren, Xueyong Wei
{"title":"In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity","authors":"Shudong Wang, Weilong Zhu, Yajing Shen, Juan Ren, Xueyong Wei","doi":"10.1109/INERTIAL48129.2020.9090093","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090093","url":null,"abstract":"In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114797909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A Mode-localized Tilt Sensor with Resolution of 2.4e-5 Degrees within the Range of 50 Degrees 一种在50度范围内分辨率为2.4e-5度的模式局部化倾斜传感器
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090054
Bing Ruan, Y. Hao, Hao Kang, Q. Shen, Honglong Chang
{"title":"A Mode-localized Tilt Sensor with Resolution of 2.4e-5 Degrees within the Range of 50 Degrees","authors":"Bing Ruan, Y. Hao, Hao Kang, Q. Shen, Honglong Chang","doi":"10.1109/INERTIAL48129.2020.9090054","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090054","url":null,"abstract":"In this paper, we propose a mode-localized resonant tilt sensor based on 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs). The angle of rotation around the sensing axis causes gravity perturbation to the two outer resonators and influences the energy distribution of the WCRs system, finally resulting in a drastic change of the mode shape. The experimental results indicate that the sensitivity is improved by 326% compared with the 2-DoF mode-localized resonant tilt sensor. Under the closed-loop test, the resolution of the tilt sensor can achieve 2.4e-5 degrees within the range of 50 degrees.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121863185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Noise Suppression Solution for Ultra-High Precision Fiber Optic Gyroscope 超高精密光纤陀螺仪的噪声抑制方案
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090098
Bo-han Liu, Xiaoming Zhao, W. Zuo, Xin Chen, Hu Liang
{"title":"Noise Suppression Solution for Ultra-High Precision Fiber Optic Gyroscope","authors":"Bo-han Liu, Xiaoming Zhao, W. Zuo, Xin Chen, Hu Liang","doi":"10.1109/INERTIAL48129.2020.9090098","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090098","url":null,"abstract":"Ultra-High Precision Fiber Optic Gyroscope (UHPFOG), as a high precision angular rate sensor, can be used in space position, strategic missile guidance and submarine navigation. Large ships and submarines are becoming the main application direction of UHPFOG. UHPFOG surpasses ring laser gyroscope in noise and longterm bias stability. Compared with the electrostatic inertial navigation system (ESINS) which has a large number of complex mechanical and electrical components and platform structure, the ultra-high precision FOG inertial navigation system has been greatly improved due to its simple structure, low cost of generation and maintenance, and high reliability. The practical application shows that the noise (random walk) of UHPFOG has become a key factor limiting its application in higher precision fields. Especially in temperature control and rotary modulation systems, random walk directly affects the fluctuation amplitude of latitude of high precision inertial navigation system. With a Semiconductor Optical Amplifier (SOA) decreasing Relative Intensity Noise (RIN) method, random walk coefficient of our FOG is reduced to 40%.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124048973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Characteristic of intracavity optical tweezers in acceleration detection 腔内光镊加速度检测特性研究
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090070
Tengfang Kuang, Guangzong Xiao, Xudong Yu, Zhenfang Fan, H. Luo
{"title":"Characteristic of intracavity optical tweezers in acceleration detection","authors":"Tengfang Kuang, Guangzong Xiao, Xudong Yu, Zhenfang Fan, H. Luo","doi":"10.1109/INERTIAL48129.2020.9090070","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090070","url":null,"abstract":"The self-feedback characteristics of intracavity optical tweezers expands the application of optical tweezers. We present an acceleration detection method using this novel tool. The equation to reveal the relation between acceleration value and laser power is built. In our method, the acceleration value is read from detecting the intracavity laser power. We find that the slope coefficient is a constant for low acceleration value. The noise equivalent acceleration in air is lower than 1×10-3 g/Hz1/2. Our work will benefit the further inertial sensing application of optical tweezers.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125028402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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