A Mode-localized Tilt Sensor with Resolution of 2.4e-5 Degrees within the Range of 50 Degrees

Abstract

In this paper, we propose a mode-localized resonant tilt sensor based on 3 degree-of-freedom (DoF) weakly coupled resonators (WCRs). The angle of rotation around the sensing axis causes gravity perturbation to the two outer resonators and influences the energy distribution of the WCRs system, finally resulting in a drastic change of the mode shape. The experimental results indicate that the sensitivity is improved by 326% compared with the 2-DoF mode-localized resonant tilt sensor. Under the closed-loop test, the resolution of the tilt sensor can achieve 2.4e-5 degrees within the range of 50 degrees.