In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity

Abstract

In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.