2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Sensing of Gravity with Micro-Nano Particles using Counter-Propagating Dual-Beam Optical Trap 利用反传播双光束光阱的微纳粒子重力传感
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090079
Zhijie Chen, Guangzong Xiao, Xudong Yu, Zhenfang Fan, H. Luo
{"title":"Sensing of Gravity with Micro-Nano Particles using Counter-Propagating Dual-Beam Optical Trap","authors":"Zhijie Chen, Guangzong Xiao, Xudong Yu, Zhenfang Fan, H. Luo","doi":"10.1109/INERTIAL48129.2020.9090079","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090079","url":null,"abstract":"The radius and refractive index of particles is almost unconstrained in counter-propagating dual-beam optical trap. We demonstrate a micro-nano mechanical sensor for weak gravity based on the characteristics of dual-beam in vacuum. The sensor improves the response range aN~pN and accuracy of gravity for particles. Furthermore, our work may be useful for characterizing other short-range physics such as Casimir forces.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120935527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design Comparison and Survivability of Epitaxially Encapsulated MEMS Disc Resonating Gyroscopes at High Shock (>27,000g) 外延封装MEMS圆盘谐振陀螺仪在高冲击(> 27000 g)下的设计比较与生存性能
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090024
C. P. Cameron, T. Imamura, Chinmay Devmalya, G. Vukasin, A. Alter, T. Kenny
{"title":"Design Comparison and Survivability of Epitaxially Encapsulated MEMS Disc Resonating Gyroscopes at High Shock (>27,000g)","authors":"C. P. Cameron, T. Imamura, Chinmay Devmalya, G. Vukasin, A. Alter, T. Kenny","doi":"10.1109/INERTIAL48129.2020.9090024","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090024","url":null,"abstract":"In this work, we compared the survivability of epitaxially encapsulated (EPI) MEMS disc resonating gyroscopes (DRGs) with ten different designs up to shocks near 50,000g. Though most DRGs survived, there are clear differences in the performance of devices post shock. Devices are clustered into their respective shock groups, but some devices maintain their superior performance even in the face of extreme shock. This work expands on the previous work of understanding shock resistance in gyroscopes and which devices may maintain performance under various conditions.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121438833","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator 采用动态平衡双质量谐振器集成滚/俯仰速率的MEMS陀螺仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090078
Shihe Wang, Muhammad Salman Al Farisi, T. Tsukamoto, Shuji Tanaka
{"title":"Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator","authors":"Shihe Wang, Muhammad Salman Al Farisi, T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL48129.2020.9090078","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090078","url":null,"abstract":"An in-plane and out-of-plane 2-axis resonator is required for a roll/pitch rate integrating gyroscope (RIG), which is much more challenging in design and fabrication compared with an in-plane 2-axis resonator used in a yaw RIG. In this study, we propose a dynamically balanced out-of-plane resonator to increase the out-of-plane quality factor (Q-factor). A balanced dual-mass structure is designed to reduce the torque applied to the supporting substrate, and thus increase the Q-factor of the out-of-plane mode. Design optimization for frequency matching, reducing mechanical deformation and increasing Q-factor through finite element method (FEM) simulation has been demonstrated. Manufacturing method of the device employing Au-Au thermo-compression bonding has been developed. The fabricated resonator oscillated at around 4380 Hz after remove by using an externally stacked piezoelectric actuator and laser Doppler vibrometer (LDV).","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121931753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Coherent Phonon Manipulation in a Disk Resonator Gyroscope with Internal Resonance 具有内共振的盘腔陀螺仪中的相干声子操纵
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090063
Kuo Lu, Xin Zhou, Qingsong Li, Xuezhong Wu, D. Xiao
{"title":"Coherent Phonon Manipulation in a Disk Resonator Gyroscope with Internal Resonance","authors":"Kuo Lu, Xin Zhou, Qingsong Li, Xuezhong Wu, D. Xiao","doi":"10.1109/INERTIAL48129.2020.9090063","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090063","url":null,"abstract":"The internal resonance and the Stokes pump are both typical representatives of the phonon manipulation in resonators, achieving modes’ dynamic coupling and energy transfer. The internal resonance can effectively improve resonators’ frequency stability, while the Stokes pump utilizes modal coupling to realize the amplification of the low-order mode’s sensitivity, making them become research hotspots recently. However, conventional phonon cavity manipulation studies focus on typical linear or nonlinear modes’ coupling. There are few reports on the Stokes pump experiment using a nonlinear mode where internal resonance occurs as the cavity mode. Compared with previously reported mode coupling experiments, this paper illustrates a novel coherent phonon manipulation method to combine advantages of the internal resonance and the Stokes pump. This paper reports the observation of coherent phonon manipulation in a disk gyroscope with internal resonance. We demonstrate that, by applying pump excitation on a resonator’s internal resonance mode which acts as a cavity mode, resulting in the occurrence of a self-sustaining oscillation on its low-order manipulated mode, it is possible to improve the gyroscope’s mechanical band width more than 2 times.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130789423","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Cross-axis Sensitivity Calibration of MEMS Gravimeters on a Dividing Head 分度头上MEMS重力仪的跨轴灵敏度标定
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090076
Mengqi Zhang, Jinquan Liu, Shihao Tang, L. Tu
{"title":"Cross-axis Sensitivity Calibration of MEMS Gravimeters on a Dividing Head","authors":"Mengqi Zhang, Jinquan Liu, Shihao Tang, L. Tu","doi":"10.1109/INERTIAL48129.2020.9090076","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090076","url":null,"abstract":"Relative gravimeters based on microelectromechanical system (MEMS) have attracted a lot of interest due to its prospects for lower cost and easy batch production and miniaturization. In this paper, the output model equation adopted for conventional gravimeters is revisited to describe the performance of novel MEMS gravimeters. We propose a model equation suitable for the MEMS gravimeter applied on the stationary base, and accordingly calibrate the MEMS gravimeter developed in our group by a discrete multipoint rotating test on a dividing head. A special configuration is empolyed, where the sensitive input axis of the gravimeter is perpendicular to the mounting surface. Subsequently, the requirements for levelling and horizontal acceleration noise of application environments are determined. The proposed model equation and mounting configuration are demonstrated suitable for calibrating MEMS gravimeters.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125059539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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