Cross-axis Sensitivity Calibration of MEMS Gravimeters on a Dividing Head

Abstract

Relative gravimeters based on microelectromechanical system (MEMS) have attracted a lot of interest due to its prospects for lower cost and easy batch production and miniaturization. In this paper, the output model equation adopted for conventional gravimeters is revisited to describe the performance of novel MEMS gravimeters. We propose a model equation suitable for the MEMS gravimeter applied on the stationary base, and accordingly calibrate the MEMS gravimeter developed in our group by a discrete multipoint rotating test on a dividing head. A special configuration is empolyed, where the sensitive input axis of the gravimeter is perpendicular to the mounting surface. Subsequently, the requirements for levelling and horizontal acceleration noise of application environments are determined. The proposed model equation and mounting configuration are demonstrated suitable for calibrating MEMS gravimeters.