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2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor 具有高容量调谐频率和品质因数的三重质量谐振器
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090053
Jianlin Chen, T. Tsukamoto, Shuji Tanaka
{"title":"Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor","authors":"Jianlin Chen, T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL48129.2020.9090053","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090053","url":null,"abstract":"This paper reports a novel triple mass resonator (TMR) consisting of two tuning fork type outer masses and an inner mass, which could increase capacity to tune the quality factor (Q-factor). Q-factor related to the anchor loss (QAnchor) could be controlled by electrostatic softening on springs connected to the inner mass, while the resonant frequency of anti-phase mode was almost constant. In contrast, when the DC bias was applied to the outer mass, the resonance frequency could be tuned same as conventional electrostatic softening. The experimental results showed the Q-factor decrease as large as 64.8% could be obtained by the DC bias of 15 V at the inner electrode, while the frequency change was as small as 278 ppm. On the other hand, when the bias was applied to the outer mass, frequency drop as high as 4429 ppm and Q-factor change as small as 9.8% could be obtained. By the proposed method, both Q-factor and resonance frequency could be controlled by the DC biases applied to the inner and outer masses, respectively.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115480186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Electrode Design of Single Crystal Lithium Niobate Piezoelectric Disk Gyroscope 单晶铌酸锂压电盘式陀螺仪的电极设计
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090095
Kazutaka Obitani, J. Qian, T. Tsuchiya, Kazutaka Araya, M. Yachi
{"title":"Electrode Design of Single Crystal Lithium Niobate Piezoelectric Disk Gyroscope","authors":"Kazutaka Obitani, J. Qian, T. Tsuchiya, Kazutaka Araya, M. Yachi","doi":"10.1109/INERTIAL48129.2020.9090095","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090095","url":null,"abstract":"This paper reports optimization of electrode arrangement of piezoelectric disk gyroscope using single crystal lithium niobate (LN). The disk was fabricated from a 155°-Y cut LN wafer in which the elastic compliance is uniform in any in-plane directions to realize mode-matching in two wineglass modes for gyroscope operation. To mitigate anisotropic piezoelectric properties of the LN wafer, the electrode patterns on both sides of disk were optimized. For 45°-mode operation, eight segmented electrodes were designed by considering the opposite polarity of the transverse piezoelectric constants d31 and d32, whereas the 0°-mode was oscillated with single electrode. Angular rate was successfully detected using LN disk resonator of the 25.8-mm-diameter and 330-μm thickness.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116581856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
In-Run Navigation Grade Quartz MEMS-Based IMU 运行中的导航级石英mems IMU
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090018
S. Zotov, A. Srivastava, Ken Kwon, Jeremy Frank, Erwin Parco, Martin Williams, S. Shtigluz, Kenneth Lyons, M. Frazee, D. Hoyh, A. Lu
{"title":"In-Run Navigation Grade Quartz MEMS-Based IMU","authors":"S. Zotov, A. Srivastava, Ken Kwon, Jeremy Frank, Erwin Parco, Martin Williams, S. Shtigluz, Kenneth Lyons, M. Frazee, D. Hoyh, A. Lu","doi":"10.1109/INERTIAL48129.2020.9090018","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090018","url":null,"abstract":"Emcore has demonstrated in-run navigation grade performance with a compact inertial measurement unit (IMU) based on Systron Donner Inertial technology. The IMU is based on three quartz MEMS Coriolis vibratory gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscope revealed angle random walk lower than 0.001 °/√hr (0.05 (°/hr)/√Hz) as well as bias instability of 0.005 °/hr at stable temperature and on the order of 0.01 °/hr at uncontrolled temperature. The accelerometer demonstrated a velocity random walk of 50 ug/√Hz, with bias instability of a few μg. This performance was achieved within the SDI500 form factor of 19 cubic inches.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130882641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Silicon micro gyroscope with 10°/h stability in wide temperature range 硅微陀螺仪，在宽温度范围内稳定10°/h
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090083
Q. Shi, A. Qiu, Yang Zhao, G. Xia
{"title":"Silicon micro gyroscope with 10°/h stability in wide temperature range","authors":"Q. Shi, A. Qiu, Yang Zhao, G. Xia","doi":"10.1109/INERTIAL48129.2020.9090083","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090083","url":null,"abstract":"In this paper we present the recent improvement of a silicon micro gyroscope with 10°/h stability in the temperature range from -40° to 60°. The gyroscope sensing element is fabricated in an 80μm-thick SOI process and sealed in a wafer level vacuum package. The gyroscope die and ASIC die are stacked in the ceramic package with low stresses package technology. Under room temperature, the gyroscope has achieved non-linearity 26.9ppm in full-range of ±400°/s, 1.2°/h bias stability (1σ), and 0.03°/√h angle random walk(ARW) and 0.2°/h instability. The bias stability is 10.2°/h(1σ) with 5 temperature cycles, the temperature range is from -40° to 60°.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129790123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Observation and Prediction for Frequency Split of Cylindrical Resonator Gyroscopes Subject to Varying Angular Velocity 变角速度下圆柱谐振陀螺仪频率分裂的观测与预测
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090019
Yiming Luo, Yao Pan, Zhinan Qiu, Zhenfang Fan, Guangzong Xiao, Xudong Yu, H. Luo, S. Asokanthan
{"title":"Observation and Prediction for Frequency Split of Cylindrical Resonator Gyroscopes Subject to Varying Angular Velocity","authors":"Yiming Luo, Yao Pan, Zhinan Qiu, Zhenfang Fan, Guangzong Xiao, Xudong Yu, H. Luo, S. Asokanthan","doi":"10.1109/INERTIAL48129.2020.9090019","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090019","url":null,"abstract":"This paper reports a method for predicting the frequency split of cylindrical resonator gyroscopes (CRGs) under varying input angular velocities. The prediction frequency split values are compared with the observation values from experiments. Both the simulation and experimental results illustrate that the frequency split values increase with increasing input angular velocity. This work may provide insight in the frequency split compensation circuitry design of CRG.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"683 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122103379","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A High Q, Quasi-Monolithic Optomechanical Inertial Sensor 高Q准单片光机械惯性传感器
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090085
J. Carter, S. Köhlenbeck, P. Birckigt, R. Eberhardt, G. Heinzel, O. Gerberding
{"title":"A High Q, Quasi-Monolithic Optomechanical Inertial Sensor","authors":"J. Carter, S. Köhlenbeck, P. Birckigt, R. Eberhardt, G. Heinzel, O. Gerberding","doi":"10.1109/INERTIAL48129.2020.9090085","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090085","url":null,"abstract":"In order to achieve the excellent seismic isolation necessary for the operation of gravitational wave detectors, very sensitive inertial sensors are required to measure and counteract the motion of the ground. This paper presents work on a lightweight, compact, and vacuum compatible inertial sensor based on an optomechanical design. It aims to achieve comparable noise performance to the sensors used in current gravitational wave detectors across the frequency region used for seismic isolation control, from 0.1 to 100 Hz. The quasi monolithic design of the device, along with initial measurements of the device quality factor of 28000 and the design philosophy underpinning it, are presented.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121625656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
[INERTIAL 2020 Front Matter] [惯性2020前沿物质]
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/inertial48129.2020.9090060
{"title":"[INERTIAL 2020 Front Matter]","authors":"","doi":"10.1109/inertial48129.2020.9090060","DOIUrl":"https://doi.org/10.1109/inertial48129.2020.9090060","url":null,"abstract":"","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127297119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Multi-Axis Atom Interferometer Gyroscope Based on a Grating Chip 基于光栅芯片的多轴原子干涉仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090092
Xiaojie Li, Zhixin Meng, Peiqiang Yan, Jianwei Zhang, Yanying Feng
{"title":"A Multi-Axis Atom Interferometer Gyroscope Based on a Grating Chip","authors":"Xiaojie Li, Zhixin Meng, Peiqiang Yan, Jianwei Zhang, Yanying Feng","doi":"10.1109/INERTIAL48129.2020.9090092","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090092","url":null,"abstract":"We propose a new design of a multi-axis atom interferometer (AI) gyroscope based on a grating chip, which allows a single input laser beam for atomic trapping and coherent manipulation. Multiple AIs are formed by the input laser beam along with the other four diffractive beams generated by the grating chip. The rotation induced phase shifts from different input axes lead to different spatial interference fringes due to the modulation of the atomic velocity. With the point source interferometry (PSI) and the spatially resolved detection, multi-axis rotations may be measured by imaging the final atomic cloud after the interferometer sequence and decoding the information of spatial fringes from different input axes. Monte-Carlo based simulation are used for evaluating the proposed scheme and its application as a multi-axis gyroscope.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124407847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simulated Prediction of Structural Asymmetry for Glass Blown Micro Shell Resonators 玻璃吹制微壳谐振器结构不对称性的模拟预测
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090074
Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu
{"title":"Simulated Prediction of Structural Asymmetry for Glass Blown Micro Shell Resonators","authors":"Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu","doi":"10.1109/INERTIAL48129.2020.9090074","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090074","url":null,"abstract":"This paper reports modeling process and a simulated prediction of structural asymmetry for glass blown micro shell resonators. Alignment deviation between center of blowtorch and forming mold is considered as the main undesirable condition. Geometric error including height variation along the circumference is analyzed based on three-dimensional model of fused silica substrate and forming mold. Simulation results indicate that the geometric error increases linearly as the increase of the alignment deviation and uniform temperature field is necessary. The results provide reference for fabrication of highly symmetric resonators.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133361118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Investigation of Gyroscopes Mechanical and Electronic Phase Drift with 2 μrad/√Hz Resolution and 12 μrad/K Accuracy 分辨率为2 μrad/√Hz，精度为12 μrad/K的陀螺仪机电相漂移研究
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090017
L. G. Pagani, L. Guerinoni, L. Falorni, P. Fedeli, G. Langfelder
{"title":"Investigation of Gyroscopes Mechanical and Electronic Phase Drift with 2 μrad/√Hz Resolution and 12 μrad/K Accuracy","authors":"L. G. Pagani, L. Guerinoni, L. Falorni, P. Fedeli, G. Langfelder","doi":"10.1109/INERTIAL48129.2020.9090017","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090017","url":null,"abstract":"The work demonstrates a setup for the accurate calibration of the relative phase drift between sense modulated output and drive demodulation reference in MEMS gyroscopes. The system enables to operate the sensor inside a climatic chamber, with all the electronics outside, reaching 2 µrad/√Hz short-term resolution in relative phase measurements. After a one-time calibration of parasitic electrical couplings, the setup enables to measure the phase drift in temperature with a sub-5-µrad long-term stability. On average, measurements over four samples, swept vs temperature in 18 different operating conditions, deviate from modeling by 12 µrad/K only.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114224763","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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