发布求助
文献互助 智能选刊 最新文献

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

筛选
英文 中文
High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure 阶梯结构高q因子模式匹配硅陀螺仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090067
Katsuaki Goto, S. Harada, Yoshiyuki Hata, Keitaro Ito, H. Wado, J. Cho, K. Najafi
{"title":"High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure","authors":"Katsuaki Goto, S. Harada, Yoshiyuki Hata, Keitaro Ito, H. Wado, J. Cho, K. Najafi","doi":"10.1109/INERTIAL48129.2020.9090067","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090067","url":null,"abstract":"A high Q-factor and mode-matched silicon MEMS gyroscope composed of a ladder structure has been developed. The ladder structure that is capable of suppressing energy dissipation has allowed the Q-factors of drive and sense modes to reach 120,000, which is a great value as a Si-tuning fork gyroscope. Moreover, the mode-matched high Q-factor ladder gyroscope shows an angle random walk (ARW) of 0.020 deg/√h and a bias instability (BI) of 0.20 deg/h. These measured results demonstrate that the ladder structure has enabled this silicon gyroscope to achieve high performance that is required for autonomous driving systems.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128306064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
System Design of a Cold Atom Gyroscope based on Interfering Matter-wave Solitons 基于干涉物质波孤子的冷原子陀螺仪系统设计
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090099
Y. Patil, H. Cheung, S. Bhave, M. Vengalattore
{"title":"System Design of a Cold Atom Gyroscope based on Interfering Matter-wave Solitons","authors":"Y. Patil, H. Cheung, S. Bhave, M. Vengalattore","doi":"10.1109/INERTIAL48129.2020.9090099","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090099","url":null,"abstract":"We propose a novel implementation of a trapped- atom Sagnac gyroscope based on the interference between matter- wave solitons confined around an optical microring resonator. Our integrated nanophotonic approach to trapped atom interferometry combines the long-term stability and quantum-limited sensitivity of ultracold matter-wave interferometers with the robustness, scalability and low power operation of nanophotonic architectures. The use of optical microresonators for atomic confinement ensures disorder-free symmetric waveguides for the confined atoms, a high degree of vibration insensitivity owing to the reciprocal structure of the waveguide, and enhanced bias and scale-factor stability via concurrent feedback stabilization of the microresonator. We have performed detailed quantum simulations based on demonstrated experimental parameters to confirm stable dispersion-free propagation of matter-wave solitons around the microresonator and the appearance of high contrast interference fringes due to the accrued Sagnac phase shift. We estimate the shot-noise limited rotation sensitivity of this gyroscope to be 0.8 μrad/s/Hz1/2 for single-loop propagation of the solitons around a microring of radius 1 mm, with the possibility of substantial improvements via multiloop propagation of the solitons, fabrication of microring resonators of larger diameter, and the use of quantum-correlated states such as spin- squeezed quantum states. The proposed device illustrates the benefits of harnessing quantum many-body states such as matter- wave solitons for quantum-enhanced inertial sensing applications.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128805342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
INERTIAL 2020 Welcome and Opening Technical Program Chair Announcements 惯性2020欢迎和开幕技术项目主席公告
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/inertial48129.2020.9090075
B. Kuhlmann, F. Alves, Rosana A. Dias, Jorge Cabral, J. Gaspar, L. Rocha, Robert W. Reger
{"title":"INERTIAL 2020 Welcome and Opening Technical Program Chair Announcements","authors":"B. Kuhlmann, F. Alves, Rosana A. Dias, Jorge Cabral, J. Gaspar, L. Rocha, Robert W. Reger","doi":"10.1109/inertial48129.2020.9090075","DOIUrl":"https://doi.org/10.1109/inertial48129.2020.9090075","url":null,"abstract":"","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125356668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability of an 1000 G Range Vertically Integrated Silicon on Insulator (SOI) Impact Switch 1000g范围垂直集成绝缘体上硅(SOI)冲击开关的可靠性
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090023
N. Krakover, R. Maimon, T. Tepper-Faran, N. Yitzhak, S. Krylov
{"title":"Reliability of an 1000 G Range Vertically Integrated Silicon on Insulator (SOI) Impact Switch","authors":"N. Krakover, R. Maimon, T. Tepper-Faran, N. Yitzhak, S. Krylov","doi":"10.1109/INERTIAL48129.2020.9090023","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090023","url":null,"abstract":"We report on a reliability study of an inertial impact switch designed to be operated at up to 1000 g acceleration range and entirely fabricated from single-crystal silicon, except for the thin-film metallic contacts. The device is distinguished by its vertically integrated architecture, enabling wafer-level fabrication and making the device to be truly manufacturable. The microfabrication process involved evaporation of the metallic contacts, deep reactive ion etching (DRIE) of a silicon on insulator (SOI) substrate and of an additional bottom wafer, and direct wafer bonding. Drop test results, which are in accordance with the model predictions, demonstrate the functionality of the sensor. Reliability tests carried out by running tens of drops at the 1000 g acceleration level, demonstrated high repeatability of the switch performance metrics. The results of an extensive experimental study indicate that thin metallic layers deposited on Si can serve as reliable Ohmic contacts in high g impact switches.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130798362","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Thermal Accelerometer Performance Enhancements through AC Biasing Schemes 通过交流偏置方案增强热加速度计性能
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090061
K. E. Kaplan, M. Winterkorn, H. J. K. Kim, C. L. Everhart, F. Prinz, T. Kenny
{"title":"Thermal Accelerometer Performance Enhancements through AC Biasing Schemes","authors":"K. E. Kaplan, M. Winterkorn, H. J. K. Kim, C. L. Everhart, F. Prinz, T. Kenny","doi":"10.1109/INERTIAL48129.2020.9090061","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090061","url":null,"abstract":"MEMS Thermal accelerometers are typically driven and sensed entirely at DC, an approach that contributes to their relatively high drift and noise. This work presents several novel operation modes based on independent modulation of the heater and the detectors: DC heating and AC sensing, AC heating and DC sensing, and full AC. The improvement in noise density offered by modulating the detectors is measured, showing a 23% reduction as compared to pure DC operation. Both AC heating modes exhibited an order of magnitude less drift at 100 seconds than DC heating. These results demonstrate the substantial improvements modulated operating schemes can offer for both noise and ultra-low frequency stability in thermal accelerometers.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127798840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Million-order Effective Quality Factor MEMS Resonator by Mechanical Pumping 机械抽运一百万阶有效品质因数MEMS谐振器
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090052
Tongqiao Miao, Xiaoping Hu, Xin Zhou, Xuezhong Wu, Z. Hou, D. Xiao
{"title":"A Million-order Effective Quality Factor MEMS Resonator by Mechanical Pumping","authors":"Tongqiao Miao, Xiaoping Hu, Xin Zhou, Xuezhong Wu, Z. Hou, D. Xiao","doi":"10.1109/INERTIAL48129.2020.9090052","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090052","url":null,"abstract":"This paper reports a simple novel method of effective quality factor (Qeff) tuning by mechanical pumping. Through the red (anti-stokes) and blue (stokes) sideband activating, Qeff of the coupled MEMS resonator can be considerably adjusted. It is demonstrated that the decay time of the resonator can be greatly enhanced to 60.54 s (more than 100 times), which can be equivalent to a million-order (1.32 million) Qeff MEMS resonator. Additionally, the phenomenon of self-oscillation is observed at the blue sideband, which provides a new method of mode driving and mode locking without harmonic driving signal. Finally, the approach in this paper is also widely applicable to other MEMS/NEMS resonators, which may be useful for further researches on MEMS/NEMS sensors with high accuracy.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133349351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation 采用σ - δ调制的真空封装小尺寸MEMS加速度计
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090096
V. Lima, J. Cabral, B. Kuhlmann, J. Gaspar, L. Rocha
{"title":"Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation","authors":"V. Lima, J. Cabral, B. Kuhlmann, J. Gaspar, L. Rocha","doi":"10.1109/INERTIAL48129.2020.9090096","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090096","url":null,"abstract":"A vacuum encapsulated MEMS accelerometer using Sigma-Delta modulation is here presented. Three different modulation orders (second, third, and fourth) were implemented in a field-programable gate array (FPGA), enabling flexibility for tuning the loop parameters in real-time. Three devices were measured, and the results are in good agreement with simulations performed in Simulink. A noise figure of 123 µg/√Hz for a bandwidth of 400 Hz and a range of at least ±1 g was experimentally measured. A figure of merit considering device size and bandwidth is proposed, highlighting the relevance of the results for the current state of the art.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131215606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Analysis of Dynamic North Finding based on Multiple Low-Precision MIMUs 基于多低精度mimu的动态寻北分析
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090081
Haifeng Xing, Xueling Zhao, Bin Zhou, Zhiyong Chen, Meifeng Guo
{"title":"Analysis of Dynamic North Finding based on Multiple Low-Precision MIMUs","authors":"Haifeng Xing, Xueling Zhao, Bin Zhou, Zhiyong Chen, Meifeng Guo","doi":"10.1109/INERTIAL48129.2020.9090081","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090081","url":null,"abstract":"This paper reports the use of low-precision micro inertial measurement units (MIMUs) based on micro-electro-mechanical systems (MEMS) technology for high-precision dynamic north finding and deduces the relationship among the number and performance of gyros and north finding time. North finding with MEMS gyros has attracted wide attention. However, it is found that the performance of gyros used in north finding accuracy less than 1° is high at present. This work achieves high- precision north finding through multiple relatively inexpensive MIMUs (ADIS16475) with lower accuracy that the angle random walk (ARW) is about 0.12 to 0.15° /$sqrt h $ and the bias instability (BI) is about 2 to 6° / h. The relationship among the accuracy of north finding and the number and accuracy of gyros and time length of measured data is given, which can provide theoretical guidance for north seeking research. The accuracy of north finding is 0.57° when four low-precision MIMUs and the 30-min data to solve the azimuth, verifying the effectiveness of theoretical analysis.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126613882","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Low-Cost, High-Throughput Process Using HF Acid to Singulate Fused-Silica Shell Resonators with High-Q 低成本、高通量的HF酸制备高q熔合硅壳谐振器
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090084
Sajal Singh, J. Cho, K. Najafi
{"title":"Low-Cost, High-Throughput Process Using HF Acid to Singulate Fused-Silica Shell Resonators with High-Q","authors":"Sajal Singh, J. Cho, K. Najafi","doi":"10.1109/INERTIAL48129.2020.9090084","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090084","url":null,"abstract":"In this paper, we report a low-cost, fast, and high-throughput process for releasing molded fused-silica 3D micro-shell resonators from their original flat substrate. 49% Hydrofluoric Acid is used to selectively etch the flat part of the substrate to release the resonator shell. Nine resonators are released using this approach and the quality factor is measured and compared with 22 shells singulated using our standard lap/CMP method. In addition, the frequency mismatch of another four devices released using each method is compared. All the resonators exhibited high-Q (as high as 5.8M) and low frequency mismatch comparable to those processed using lap/CMP method.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114010212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure 牺牲金属支撑结构石英玻璃谐振腔制造技术
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090012
M. Khan, T. Tsukamoto, Shuji Tanaka
{"title":"Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure","authors":"M. Khan, T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL48129.2020.9090012","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090012","url":null,"abstract":"This paper reports an electromagnetically driven quartz glass micromachined ring resonator on a quartz glass substrate. The resonator was fabricated using Au-Au thermocompression bonding technique. Two types of Au structures were used: temporary supporting structures during fabrication process and permanent structure for anchoring. Time-controlled release process successfully removed the temporary Au support structures while the permanent anchor remained. The released quartz glass resonator, which has 55 μm thickness and 4 mm in diameter, was successfully oscillated by electromagnetic transduction at the resonant frequency of 26.8 KHz.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"154 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123824375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
首页 上一页 下一页 尾页
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：604180095
Book学术官方微信