阶梯结构高q因子模式匹配硅陀螺仪

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI:10.1109/INERTIAL48129.2020.9090067

Katsuaki Goto, S. Harada, Yoshiyuki Hata, Keitaro Ito, H. Wado, J. Cho, K. Najafi

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引用次数: 5

摘要

研制了一种由梯形结构组成的高q因子、模式匹配的硅MEMS陀螺仪。能够抑制能量耗散的梯形结构使得驱动和感测模式的q因子达到12万，作为硅音叉陀螺仪具有很大的价值。此外，模式匹配的高q因子梯形陀螺仪的角度随机游走(ARW)为0.020°/√h，偏置不稳定性(BI)为0.20°/h。这些测量结果表明，梯形结构使该硅陀螺仪能够实现自动驾驶系统所需的高性能。

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High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure

A high Q-factor and mode-matched silicon MEMS gyroscope composed of a ladder structure has been developed. The ladder structure that is capable of suppressing energy dissipation has allowed the Q-factors of drive and sense modes to reach 120,000, which is a great value as a Si-tuning fork gyroscope. Moreover, the mode-matched high Q-factor ladder gyroscope shows an angle random walk (ARW) of 0.020 deg/√h and a bias instability (BI) of 0.20 deg/h. These measured results demonstrate that the ladder structure has enabled this silicon gyroscope to achieve high performance that is required for autonomous driving systems.

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2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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