A Million-order Effective Quality Factor MEMS Resonator by Mechanical Pumping

Abstract

This paper reports a simple novel method of effective quality factor (Qeff) tuning by mechanical pumping. Through the red (anti-stokes) and blue (stokes) sideband activating, Qeff of the coupled MEMS resonator can be considerably adjusted. It is demonstrated that the decay time of the resonator can be greatly enhanced to 60.54 s (more than 100 times), which can be equivalent to a million-order (1.32 million) Qeff MEMS resonator. Additionally, the phenomenon of self-oscillation is observed at the blue sideband, which provides a new method of mode driving and mode locking without harmonic driving signal. Finally, the approach in this paper is also widely applicable to other MEMS/NEMS resonators, which may be useful for further researches on MEMS/NEMS sensors with high accuracy.