Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu
{"title":"玻璃吹制微壳谐振器结构不对称性的模拟预测","authors":"Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu","doi":"10.1109/INERTIAL48129.2020.9090074","DOIUrl":null,"url":null,"abstract":"This paper reports modeling process and a simulated prediction of structural asymmetry for glass blown micro shell resonators. Alignment deviation between center of blowtorch and forming mold is considered as the main undesirable condition. Geometric error including height variation along the circumference is analyzed based on three-dimensional model of fused silica substrate and forming mold. Simulation results indicate that the geometric error increases linearly as the increase of the alignment deviation and uniform temperature field is necessary. The results provide reference for fabrication of highly symmetric resonators.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Simulated Prediction of Structural Asymmetry for Glass Blown Micro Shell Resonators\",\"authors\":\"Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu\",\"doi\":\"10.1109/INERTIAL48129.2020.9090074\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports modeling process and a simulated prediction of structural asymmetry for glass blown micro shell resonators. Alignment deviation between center of blowtorch and forming mold is considered as the main undesirable condition. Geometric error including height variation along the circumference is analyzed based on three-dimensional model of fused silica substrate and forming mold. Simulation results indicate that the geometric error increases linearly as the increase of the alignment deviation and uniform temperature field is necessary. The results provide reference for fabrication of highly symmetric resonators.\",\"PeriodicalId\":244190,\"journal\":{\"name\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"64 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL48129.2020.9090074\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL48129.2020.9090074","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Simulated Prediction of Structural Asymmetry for Glass Blown Micro Shell Resonators
This paper reports modeling process and a simulated prediction of structural asymmetry for glass blown micro shell resonators. Alignment deviation between center of blowtorch and forming mold is considered as the main undesirable condition. Geometric error including height variation along the circumference is analyzed based on three-dimensional model of fused silica substrate and forming mold. Simulation results indicate that the geometric error increases linearly as the increase of the alignment deviation and uniform temperature field is necessary. The results provide reference for fabrication of highly symmetric resonators.