高Q准单片光机械惯性传感器

J. Carter, S. Köhlenbeck, P. Birckigt, R. Eberhardt, G. Heinzel, O. Gerberding
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引用次数: 3

摘要

为了实现引力波探测器运行所必需的优异的隔震性,需要非常灵敏的惯性传感器来测量和抵消地面的运动。本文介绍了一种基于光机械设计的轻型、紧凑、真空兼容惯性传感器。它的目标是在用于隔震控制的频率区域(从0.1到100 Hz)内实现与当前引力波探测器中使用的传感器相当的噪声性能。介绍了器件的准单片设计,以及器件质量因子28000的初始测量值和支撑它的设计理念。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A High Q, Quasi-Monolithic Optomechanical Inertial Sensor
In order to achieve the excellent seismic isolation necessary for the operation of gravitational wave detectors, very sensitive inertial sensors are required to measure and counteract the motion of the ground. This paper presents work on a lightweight, compact, and vacuum compatible inertial sensor based on an optomechanical design. It aims to achieve comparable noise performance to the sensors used in current gravitational wave detectors across the frequency region used for seismic isolation control, from 0.1 to 100 Hz. The quasi monolithic design of the device, along with initial measurements of the device quality factor of 28000 and the design philosophy underpinning it, are presented.
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