Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu
{"title":"Simulated Prediction of Structural Asymmetry for Glass Blown Micro Shell Resonators","authors":"Yimo Chen, X. Xi, Yan Shi, Kun Lu, D. Xiao, Xuezhong Wu","doi":"10.1109/INERTIAL48129.2020.9090074","DOIUrl":null,"url":null,"abstract":"This paper reports modeling process and a simulated prediction of structural asymmetry for glass blown micro shell resonators. Alignment deviation between center of blowtorch and forming mold is considered as the main undesirable condition. Geometric error including height variation along the circumference is analyzed based on three-dimensional model of fused silica substrate and forming mold. Simulation results indicate that the geometric error increases linearly as the increase of the alignment deviation and uniform temperature field is necessary. The results provide reference for fabrication of highly symmetric resonators.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL48129.2020.9090074","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper reports modeling process and a simulated prediction of structural asymmetry for glass blown micro shell resonators. Alignment deviation between center of blowtorch and forming mold is considered as the main undesirable condition. Geometric error including height variation along the circumference is analyzed based on three-dimensional model of fused silica substrate and forming mold. Simulation results indicate that the geometric error increases linearly as the increase of the alignment deviation and uniform temperature field is necessary. The results provide reference for fabrication of highly symmetric resonators.