Design Comparison and Survivability of Epitaxially Encapsulated MEMS Disc Resonating Gyroscopes at High Shock (>27,000g)

Abstract

In this work, we compared the survivability of epitaxially encapsulated (EPI) MEMS disc resonating gyroscopes (DRGs) with ten different designs up to shocks near 50,000g. Though most DRGs survived, there are clear differences in the performance of devices post shock. Devices are clustered into their respective shock groups, but some devices maintain their superior performance even in the face of extreme shock. This work expands on the previous work of understanding shock resistance in gyroscopes and which devices may maintain performance under various conditions.