Dandan Liu, Wenjie Wu, Jinquan Liu, J. Fan, Shitao Yan, L. Tu
{"title":"一种自噪声为1 ng/Hz1/2的力平衡微机械加速度计","authors":"Dandan Liu, Wenjie Wu, Jinquan Liu, J. Fan, Shitao Yan, L. Tu","doi":"10.1109/INERTIAL48129.2020.9090057","DOIUrl":null,"url":null,"abstract":"MEMS Accelerometers are one of the core inertial measurement components in inertial navigation systems. This paper reports a high-precision force balance accelerometer based on MEMS technology. Utilizing a springmass structure with a low resonant frequency of 8 Hz and a periodic capacitive displacement transducer, the accelerometer has an extremely low self-noise of 1 ng/Hz1/2, which is one of the most sensitive MEMS-based accelerometers reported to date.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2\",\"authors\":\"Dandan Liu, Wenjie Wu, Jinquan Liu, J. Fan, Shitao Yan, L. Tu\",\"doi\":\"10.1109/INERTIAL48129.2020.9090057\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS Accelerometers are one of the core inertial measurement components in inertial navigation systems. This paper reports a high-precision force balance accelerometer based on MEMS technology. Utilizing a springmass structure with a low resonant frequency of 8 Hz and a periodic capacitive displacement transducer, the accelerometer has an extremely low self-noise of 1 ng/Hz1/2, which is one of the most sensitive MEMS-based accelerometers reported to date.\",\"PeriodicalId\":244190,\"journal\":{\"name\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL48129.2020.9090057\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL48129.2020.9090057","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2
MEMS Accelerometers are one of the core inertial measurement components in inertial navigation systems. This paper reports a high-precision force balance accelerometer based on MEMS technology. Utilizing a springmass structure with a low resonant frequency of 8 Hz and a periodic capacitive displacement transducer, the accelerometer has an extremely low self-noise of 1 ng/Hz1/2, which is one of the most sensitive MEMS-based accelerometers reported to date.
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