Bin Li, X. Xi, Kun Lu, Yan Shi, D. Xiao, Xuezhong Wu
{"title":"基于几何谐波误差抑制的熔融硅微壳谐振腔分频改进","authors":"Bin Li, X. Xi, Kun Lu, Yan Shi, D. Xiao, Xuezhong Wu","doi":"10.1109/INERTIAL48129.2020.9090011","DOIUrl":null,"url":null,"abstract":"This paper demonstrates the impact of harmonic error on the natural frequency of micro shell resonator (MSR). Parameterized 3D model is established to analyze the frequency split of resonator with deviation along the circumferential and height direction. Both the n=1 tilt mode and n=2 wineglass modes are considered. The simulation results show that frequency split significantly increases as the growth of the 2nd and 4th harmonic errors. A rotary platform is used to reduce the harmonic error of the resonator by improving symmetry of the shell structure. Finally, more than 10 samples are electrostatically characterized and well matched with the simulation results.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Frequency Split Improvement of Fused Silica Micro Shell Resonator Based on Suppression of Geometric Harmonic Error\",\"authors\":\"Bin Li, X. Xi, Kun Lu, Yan Shi, D. Xiao, Xuezhong Wu\",\"doi\":\"10.1109/INERTIAL48129.2020.9090011\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper demonstrates the impact of harmonic error on the natural frequency of micro shell resonator (MSR). Parameterized 3D model is established to analyze the frequency split of resonator with deviation along the circumferential and height direction. Both the n=1 tilt mode and n=2 wineglass modes are considered. The simulation results show that frequency split significantly increases as the growth of the 2nd and 4th harmonic errors. A rotary platform is used to reduce the harmonic error of the resonator by improving symmetry of the shell structure. Finally, more than 10 samples are electrostatically characterized and well matched with the simulation results.\",\"PeriodicalId\":244190,\"journal\":{\"name\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL48129.2020.9090011\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL48129.2020.9090011","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Frequency Split Improvement of Fused Silica Micro Shell Resonator Based on Suppression of Geometric Harmonic Error
This paper demonstrates the impact of harmonic error on the natural frequency of micro shell resonator (MSR). Parameterized 3D model is established to analyze the frequency split of resonator with deviation along the circumferential and height direction. Both the n=1 tilt mode and n=2 wineglass modes are considered. The simulation results show that frequency split significantly increases as the growth of the 2nd and 4th harmonic errors. A rotary platform is used to reduce the harmonic error of the resonator by improving symmetry of the shell structure. Finally, more than 10 samples are electrostatically characterized and well matched with the simulation results.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
