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2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope 0.00016度/√hr角度随机游走(ARW)和0.0014度/小时偏置不稳定性(BI)从5.2M-Q和1厘米精密壳积分(PSI)陀螺仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090086
J. Cho, Sajal Singh, J. Woo, G. He, K. Najafi
{"title":"0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope","authors":"J. Cho, Sajal Singh, J. Woo, G. He, K. Najafi","doi":"10.1109/INERTIAL48129.2020.9090086","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090086","url":null,"abstract":"We report record-high performance from a fused-silica micro Precision Shell Integrating (PSI) gyroscope. The PSI gyroscope uses a fused-silica resonator with a diameter of 1 cm and a mechanical quality factor (Q) of 5.2 million. The gyroscope has an angle random walk (ARW) of 0.00016 deg/√hr and short-term in-run bias instability of 0.0014 deg/hr without any temperature compensation. This performance for such a small shell gyroscope compares well with the larger mHRG and HRG devices reported previously. This performance, in a device this small, is achieved by optimizing the fabrication of the shell resonator so it provides high Q, large mass, high frequency resonance, and low as-fabricated frequency mismatch.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127389170","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 32
Demonstration of Trajectory Estimation using A Mobile MEMS Rate Integrating Gyroscope Module 基于移动MEMS速率积分陀螺仪模块的轨迹估计演示
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090025
D. Ono, R. Gando, Y. Tomizawa
{"title":"Demonstration of Trajectory Estimation using A Mobile MEMS Rate Integrating Gyroscope Module","authors":"D. Ono, R. Gando, Y. Tomizawa","doi":"10.1109/INERTIAL48129.2020.9090025","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090025","url":null,"abstract":"This paper presents the first experimental demonstration of trajectory estimation using a mobile MEMS rate integrating gyroscope (RIG) module. The RIG module provides direct information of rotation angle to estimate the position, which eliminates the integration error of offset and noise occurred in the conventional rate-gyroscope based systems. The RIG module employed in tracking tests has an angular gain of 0.992 and an angular error of 0.8 deg rms at 100 deg/s. In the tracking experiment of a model train running in a fixed 2-D rail orbit for distance of 560 cm at velocity of 7 cm/s, the maximum position error is 3 cm (0.5%). As for tracking an indoor pedestrian walking for a distance of 88 m at 0.8 m/s, the maximum position error is 1.6 m (1.8%). The experimental results prove the feasibility of using RIG in trajectory estimation applications.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130846298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Antistiction Recoil Accelerometer 抗阻反冲加速度计
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090055
G. Gattere, F. Rizzini, C. Dall'Oglio
{"title":"Antistiction Recoil Accelerometer","authors":"G. Gattere, F. Rizzini, C. Dall'Oglio","doi":"10.1109/INERTIAL48129.2020.9090055","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090055","url":null,"abstract":"In this paper we describe a new MEM capacitive accelerometer architecture that is able to increase the robustness of the device from high-g shocks with respect to a conventional accelerometer. The concept is based on the recoil effect given by a 2 degrees of freedom mechanical structure. During an impact that goes beyond the accelerometer mechanical full scale, the displacement of the first mass, which houses the electrodes, is bounded by a set of physical stoppers. Instead, the recoil mass, linked to the sense mass through a rigid spring, stores extra potential energy. When the external acceleration is no longer applied, the retained energy in the stiff spring pushes back the first sense mass, thus helping it to detach from the stoppers. The proposed architecture was modelled through numerical simulations and verified thanks to an experimental campaign based on high-g shocks. The manufactured test structures showed a significant improvement in reducing the occurrence of adhesion phenomena.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130955778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS Gyro Array Employing Array Signal Processing for Interference and Outlier Suppression 采用阵列信号处理的MEMS陀螺阵列干扰与异常值抑制
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090089
Hiroyuki Kamata, Masato Kimishima, Tsutomu Sawada, Yoshitaka Suga, Haruto Takeda, Kosei Yamashita, S. Mitani
{"title":"MEMS Gyro Array Employing Array Signal Processing for Interference and Outlier Suppression","authors":"Hiroyuki Kamata, Masato Kimishima, Tsutomu Sawada, Yoshitaka Suga, Haruto Takeda, Kosei Yamashita, S. Mitani","doi":"10.1109/INERTIAL48129.2020.9090089","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090089","url":null,"abstract":"In this paper, two practical problems that cannot be ignored when forming compactly integrated MEMS IMU array at low cost using Coriolis vibration type MEMS with low power consumption - mutual vibration interference noise caused by MEMS proximity arrangement, and outlier noise caused by random telegraph signal noise - are firstly discussed. Then, we propose an easily implementable array signal processing filtering on a small FPGA that recovers gyroscope performance (angle random walk and bias instability) by suppressing the interference noise and removing the outlier noise dynamically. We fabricated 32 consumer MEMS IMU array board without IMU screening process, implemented the proposed filter, and evaluated its performance. As a result, although there are mutual interferences and a MEMS gyro sensor with poor performance, gyroscope performance (0.7mdeg/s/√Hz as angle random walk and 0.5deg/h as bias instability) which are close to the ideal array gain of 1/√32 were successfully achieved.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123119541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Quadrature-Induced Noise in Coriolis Vibratory Gyroscopes 科氏振动陀螺仪的正交噪声
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090022
D. Vatanparvar, A. Shkel
{"title":"Quadrature-Induced Noise in Coriolis Vibratory Gyroscopes","authors":"D. Vatanparvar, A. Shkel","doi":"10.1109/INERTIAL48129.2020.9090022","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090022","url":null,"abstract":"In this paper, we present a model for noise performance estimation of Coriolis Vibratory Gyroscopes (CVG) in the presence of quadrature coupling. Analytical equations based on a low-order averaged model of a CVG were derived and used for numerical simulation of the Zero-Rate Output (ZRO) in the open-loop angular rate mode of operation. We demonstrated that as a result of the quadrature coupling and noise in the drive oscillation frequency, Quadrature Noise (QN) is introduced to the gyroscope output. For example, in the case of a Dual Foucault Pendulum (DFP) gyroscope with a frequency split on the order of 0.48 Hz, the QN was shown to have an experimentally measured Angle Random Walk (ARW) on the order of 0.39 $left( {deg/sqrt {hr} } right)$, which was orders of magnitude higher than a theoretical ARW of 0.0024 $left( {deg/sqrt {hr} } right)$ predicted by the Mechanical-Thermal Noise (MTN) model. This observed discrepancy was a motivation for the development of the model. A good agreement between the noise characteristics of the experimentally measured ZRO and a numerically simulated ZRO was observed, when accounting for the quadrature coupling. We concluded that the quadrature- induced noise is a major factor limiting the performance of high quality factor gyroscopes in nearly mode-matched conditions. This paper presents an analytical model for the noise estimation, which was supported experimentally.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121772496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer 封装调频MEMS加速度计中机械应力的影响
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090090
E. E. Moreira, B. Kuhlmann, F. Alves, R. Dias, J. Cabral, J. Gaspar, L. Rocha
{"title":"Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer","authors":"E. E. Moreira, B. Kuhlmann, F. Alves, R. Dias, J. Cabral, J. Gaspar, L. Rocha","doi":"10.1109/INERTIAL48129.2020.9090090","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090090","url":null,"abstract":"Frequency modulated accelerometers composed of two double-ended tuning fork (DETF) resonators on a differential configuration were characterized for their sensitivity to force applied to their package. Commonly, differential architectures are employed to cancel common-mode errors, such as the mechanical stress or temperature dependency. The device dependence to mechanical stress was experimentally measured for forces up to 15 N and a reduction of about 5.6 times was obtained on the differential measurement. Additionally, the silicon dies were glued to chip-carriers using two different glues with distinct properties, and their sensitivity to stress was compared. The effectiveness of a viscoelastic glue over an epoxy-based glue for stress decoupling was tested. Long-term measurements under constant force were experimentally performed and for a time period of approximately 100 min, the stress relaxation and creeping of the viscoelastic glue enabled the recovery to the initial output of the sensor.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133997758","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Sensitivity Enhancement of Mems Resonant Accelerometers by Using Electrostatic Spring 利用静电弹簧提高Mems谐振加速度计的灵敏度
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090015
Xingyin Xiong, Wang Zheng, Kunfeng Wang, Zhitian Li, Wuhao Yang, X. Zou
{"title":"Sensitivity Enhancement of Mems Resonant Accelerometers by Using Electrostatic Spring","authors":"Xingyin Xiong, Wang Zheng, Kunfeng Wang, Zhitian Li, Wuhao Yang, X. Zou","doi":"10.1109/INERTIAL48129.2020.9090015","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090015","url":null,"abstract":"Resonant accelerometers are very attractive for high-precision measurement applications due to their high sensitivity, frequency output, and large dynamic range. In order to further increase their sensitivity, we propose a novel method to enhance sensitivity of MEMS resonant accelerometer by using electrostatic spring softening effect. The sensitivity is 691 Hz/g boosted up 60% higher than the original sensitivity and the nonlinearity is 0.5%, comparing to the original nonlinearity is 0.4%in preliminary tests.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115332707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Full-parameters mathematical model of high precision fiber optic gyroscope coil and automatic forming technology 高精度光纤陀螺仪线圈的全参数数学模型及自动成形技术
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090051
Zhisheng Zheng, Yueze Wang, Jie Yu, Bo-han Liu, Mao-chun Li, Guihong Chen
{"title":"Full-parameters mathematical model of high precision fiber optic gyroscope coil and automatic forming technology","authors":"Zhisheng Zheng, Yueze Wang, Jie Yu, Bo-han Liu, Mao-chun Li, Guihong Chen","doi":"10.1109/INERTIAL48129.2020.9090051","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090051","url":null,"abstract":"In this paper, a full parameter mathematical model of temperature error of optical fiber coil is established. The new model can be used to optimize the physical and chemical properties of different winding schemes (quadrupole, multipole), fiber, colloid and other components in the coil, as well as the assembly structure, and to study the influence of the technological parameters such as the number of winding layers and winding schemes on the temperature performance of the optical fiber coil under different winding conditions. An on-line measurement and compensation system for core parameters of high-precision optical fiber coil is designed and built. In view of the characteristics of long length, large size and high winding difficulty in the actual winding process of high-precision optical fiber coil, based on the self-developed high-precision coil winding machine, the mechanism of errors such as stress, polarization crosstalk and symmetry introduced in the winding process is studied, and the real-time online detection system of core parameters is designed and built, which is used for realtime online detection and online compensation, so as to further develop Step by step to improve the winding success rate of high-precision optical fiber coil. A complete set of high- precision fiber coil forming technology is studied. In this paper, every link of the high-precision fiber coil forming process is studied. From the selection of optical fiber and colloid materials, automatic winding, debonding and coil forming to the detection technology of optical fiber coil, the integrated design is carried out, and the high-precision optical fiber coil meeting the application of high-precision optical fiber gyroscope is finally prepared by using the whole set of technology.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124347625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Respiratory and Cardiac Signal From Accelerometer Gently Contacting on Torso 呼吸和心脏信号从加速度计轻轻接触躯干
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090066
S. Kano, H. Mekaru
{"title":"Respiratory and Cardiac Signal From Accelerometer Gently Contacting on Torso","authors":"S. Kano, H. Mekaru","doi":"10.1109/INERTIAL48129.2020.9090066","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090066","url":null,"abstract":"In this paper, we show a noninvasive and unobtrusive method to monitor respiration and heartbeat by accelerometers gently contacting on human torso. Noninvasiveness of measurements is a requisite factor for obtaining accurate vital signs. As a feasibility study, we place a 3-axis accelerometer in a name tag and monitor the respiratory and cardiac signals of the wearing person. A name tag hooked in neck gently contacts on chest/abdomen and respiratory and cardiac motions appear in the signal of the accelerometer.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"138 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132521837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamically Amplified Dual-mass Gyroscopes with In-situ Shock Survival Mechanism 具有原位冲击生存机制的动态放大双质量陀螺仪
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090021
Danmeng Wang, R. Noor, A. Shkel
{"title":"Dynamically Amplified Dual-mass Gyroscopes with In-situ Shock Survival Mechanism","authors":"Danmeng Wang, R. Noor, A. Shkel","doi":"10.1109/INERTIAL48129.2020.9090021","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090021","url":null,"abstract":"This paper reports on development of Dynamically Amplified dual-mass Gyroscope (DAG) and introduces, for the first time, a Trap-and-Hold (TAH) concept intended to increase survivability of gyroscopes to mechanical shocks and vibrations. The TAH concept utilizes out-of-plane electrodes to electrostatically excite the gyroscope’s proof-mass at resonance in the direction perpendicular to the substrate, trap the proof-mass electrostatically, and then keep the sensor structure locked to the substrate during the events of shock. We discuss our fabrication process to realize the TAH mechanism and present initial experimental results. In our demonstration, the operational device measuring rotation was instantaneously immobilized by TAH before the event of shock, and was subsequently released to its normal operation after the event of shock. The device preserved its functionality and fundamental characteristics, Angle Random Walk (ARW) and in-run bias instability (IrBS), before (ARW: 0.048 deg/rt-hr, IrBS: 0.6 deg/hr) and after the experiment (ARW: 0.0483 deg/rt-hr, IrBS: 0.69 deg/hr).","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132743353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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