Sensitivity Enhancement of Mems Resonant Accelerometers by Using Electrostatic Spring

Abstract

Resonant accelerometers are very attractive for high-precision measurement applications due to their high sensitivity, frequency output, and large dynamic range. In order to further increase their sensitivity, we propose a novel method to enhance sensitivity of MEMS resonant accelerometer by using electrostatic spring softening effect. The sensitivity is 691 Hz/g boosted up 60% higher than the original sensitivity and the nonlinearity is 0.5%, comparing to the original nonlinearity is 0.4%in preliminary tests.