2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献_第3页

A Flight Capable Atomic Gravity Gradiometer With a Single Laser 单激光原子重力梯度仪

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090014

S. Weiner, Xuejian Wu, Z. Pagel, Dongzoon Li, Jacob Sleczkowski, Francis Ketcham, H. Mueller

引用次数: 6

Study on the Effect of Quadrature Error on In-Phase Output Based on Electrostatic Compensation 基于静电补偿的正交误差对同相输出影响的研究

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090091

Bowen Xing, Bin Zhou, Qi Wei, Bo Hou, Dong-mei Li, Tian Zhang, Rong Zhang

引用次数: 1

INERTIAL 2020 Author Index 惯性2020作者索引

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/inertial48129.2020.9090020

引用次数: 0

Near-Zero Power Mechanical Shock-Resistant Inertial Wakeup System with Scaled Inputs 具有比例输入的近零功率机械抗冲击惯性唤醒系统

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090064

Sean Yen, B. Griffin, B. Barney, Adam M. Edstrand, A. I. Young, T. Pluym, Emily Donahue, Robert W. Reger

引用次数: 1

Calibration and Compensation of The Misalignment Angle Errors For The Disk Resonator Gyroscopes 盘式谐振陀螺仪对准角误差的标定与补偿

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090094

Peng Wang, Yi Xu, Guoxiong Song, Qingsong Li, Yulie Wu, Xuezhong Wu, D. Xiao

引用次数: 5

Chipping and wearing in MEMS inertial sensors: effects on stability and predictive analysis through test structures MEMS惯性传感器中的芯片磨损:通过测试结构对稳定性的影响和预测分析

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090056

L. G. Pagani, L. Guerinoni, L. Falorni, G. Gattere, Giovanni Mogavero, A. Ghisi, G. Langfelder

引用次数: 3

A High-resolution Area-change-based Capacitive MEMS Accelerometer for Tilt Sensing 一种高分辨率基于面积变化的电容式MEMS倾斜传感加速度计

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090016

K. Rao, Huafeng Liu, Xiaoli Wei, Wenjie Wu, Chenyuan Hu, J. Fan, Jinquan Liu, L. Tu

{"title":"A High-resolution Area-change-based Capacitive MEMS Accelerometer for Tilt Sensing","authors":"K. Rao, Huafeng Liu, Xiaoli Wei, Wenjie Wu, Chenyuan Hu, J. Fan, Jinquan Liu, L. Tu","doi":"10.1109/INERTIAL48129.2020.9090016","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090016","url":null,"abstract":"This paper reports a newly developed chip-level micro-electromechanical system (MEMS) accelerometer for tilt sensing based on differential array area-change capacitive displacement transducer and through-silicon-wafer etching process. The proposed MEMS accelerometer consists of a silicon-based acceleration-sensitive spring-mass structure, a upper glass cover plate and an universal capacitive readout application specific integrated circuit (ASIC) die, which is used to apply differential driving signals and pickup capacitance change due to area-variation under in-plane motion. The MEMS accelerometer has a linear measurement range of ±30° with a scale factor of 33.6 mV/°. The tilt measurement resolution of the MEMS accelerometer is evaluated by the modified Allan deviation with the results showing that an angle resolution of 0.003° at an integral time of 3 seconds. Compared with the commercial MEMS tilt sensors, the proposed MEMS accelerometer in this work has a larger full measurement range and a larger bandwidth but a little bit poor linearity. Hence, it is believed that the proposed chip-level MEMS accelerometer is promising to be a high-resolution tilt sensor with a lower power consumption and smaller volume.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115432993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator 基于热弹性耗散的环形MEMS谐振器品质因子修剪方法

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090082

Abdelli Hamza, T. Tsukamoto, Shuji Tanaka

引用次数: 2

A MIMU/GNSS/Magnetometer/Polarized Light Integrated Compass Algorithm 一种MIMU/GNSS/磁强计/偏振光综合罗经算法

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090009

Xiaofeng He, Ruiguang He, Chen Fan, Lilian Zhang, Hang Shang, Mingyao Yuan

引用次数: 1

Ultra-compact navigation-grade Inertial Measurement Unit IMU400 超紧凑导航级惯性测量单元IMU400

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2020-03-01 DOI: 10.1109/INERTIAL48129.2020.9090072

Y. Korkishko, V. Fedorov, V. Prilutskiy, V. Ponomarev, S. Prilutskiy, D. Obuhovich, I. Fedorov, A. Zuev, V. Varnakov, S. Kostritskii, I. Morev

{"title":"Ultra-compact navigation-grade Inertial Measurement Unit IMU400","authors":"Y. Korkishko, V. Fedorov, V. Prilutskiy, V. Ponomarev, S. Prilutskiy, D. Obuhovich, I. Fedorov, A. Zuev, V. Varnakov, S. Kostritskii, I. Morev","doi":"10.1109/INERTIAL48129.2020.9090072","DOIUrl":"https://doi.org/10.1109/INERTIAL48129.2020.9090072","url":null,"abstract":"At present time interferometric fiber-optic gyroscopes (IFOG, FOG) are widely used in inertial navigation systems (INS), and in wide range of applications have replaced its well-established main competitor ring laser gyroscopes (RLG). Recently, in order to cover the mass-market applications spectrum requiring low-cost and compact inertial sensor yet as much precise as it can be, RPC Optolink has launched new IFOG-based product: ultra-compact navigation-grade inertial measurement unit IMU400, its SWaP properties are: 80×95×62 mm, 0.7 kg, 0.5 l, ≤7 W. The aim of the current work was the production of pilot IMU400 devices batch and the estimation of the performance of IMU with direct approach and also with strapdown inertial navigation systems (SINS) simulation methods, which by sense is indirect way of performance observation. Main IMU400 Gyro and Accelerometer parameters are: Angle Random Walk (ARW) = 0.007 °/√hour, Bias Instability (BI) = 0.01°/h; Velocity Random Walk (VRW) = 40µg/√Hz, BI = 6µg. SINS expected performance (max): heading 0.2°×sec(lat) (1σ, 10 min align time).","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128134671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2