Study on the Effect of Quadrature Error on In-Phase Output Based on Electrostatic Compensation

Abstract

Quadrature error is an important factor limiting the performance of MEMS-gyroscope. It is caused by the stiffness asymmetry due to processing error. In this paper, the quadrature cancellation structure is designed for center support quadruple mass gyroscope (CSQMG). The experiment results show that the structure can reduce the quadrature error of the gyroscope greatly and the mechanical coupling. Based on the quadrature cancellation structure, the effect of the quadrature error on the in-phase detection signal is studied. Although the phase difference between the quadrature and the in-phase signal is 90 degrees, quadrature cancellation can also reduce the bias output. This is because when the quadrature error decreases, the anchor damping coupling decreases.