Bowen Xing, Bin Zhou, Qi Wei, Bo Hou, Dong-mei Li, Tian Zhang, Rong Zhang
{"title":"基于静电补偿的正交误差对同相输出影响的研究","authors":"Bowen Xing, Bin Zhou, Qi Wei, Bo Hou, Dong-mei Li, Tian Zhang, Rong Zhang","doi":"10.1109/INERTIAL48129.2020.9090091","DOIUrl":null,"url":null,"abstract":"Quadrature error is an important factor limiting the performance of MEMS-gyroscope. It is caused by the stiffness asymmetry due to processing error. In this paper, the quadrature cancellation structure is designed for center support quadruple mass gyroscope (CSQMG). The experiment results show that the structure can reduce the quadrature error of the gyroscope greatly and the mechanical coupling. Based on the quadrature cancellation structure, the effect of the quadrature error on the in-phase detection signal is studied. Although the phase difference between the quadrature and the in-phase signal is 90 degrees, quadrature cancellation can also reduce the bias output. This is because when the quadrature error decreases, the anchor damping coupling decreases.","PeriodicalId":244190,"journal":{"name":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Study on the Effect of Quadrature Error on In-Phase Output Based on Electrostatic Compensation\",\"authors\":\"Bowen Xing, Bin Zhou, Qi Wei, Bo Hou, Dong-mei Li, Tian Zhang, Rong Zhang\",\"doi\":\"10.1109/INERTIAL48129.2020.9090091\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Quadrature error is an important factor limiting the performance of MEMS-gyroscope. It is caused by the stiffness asymmetry due to processing error. In this paper, the quadrature cancellation structure is designed for center support quadruple mass gyroscope (CSQMG). The experiment results show that the structure can reduce the quadrature error of the gyroscope greatly and the mechanical coupling. Based on the quadrature cancellation structure, the effect of the quadrature error on the in-phase detection signal is studied. Although the phase difference between the quadrature and the in-phase signal is 90 degrees, quadrature cancellation can also reduce the bias output. This is because when the quadrature error decreases, the anchor damping coupling decreases.\",\"PeriodicalId\":244190,\"journal\":{\"name\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL48129.2020.9090091\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL48129.2020.9090091","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study on the Effect of Quadrature Error on In-Phase Output Based on Electrostatic Compensation
Quadrature error is an important factor limiting the performance of MEMS-gyroscope. It is caused by the stiffness asymmetry due to processing error. In this paper, the quadrature cancellation structure is designed for center support quadruple mass gyroscope (CSQMG). The experiment results show that the structure can reduce the quadrature error of the gyroscope greatly and the mechanical coupling. Based on the quadrature cancellation structure, the effect of the quadrature error on the in-phase detection signal is studied. Although the phase difference between the quadrature and the in-phase signal is 90 degrees, quadrature cancellation can also reduce the bias output. This is because when the quadrature error decreases, the anchor damping coupling decreases.