A Monolithic Tri-axis MEMS Gyroscope Operating in Air

Abstract

In this work, a monolithic tri-axis MEMS gyroscope is realized through a TSMC SOI-MEMS platform and the device is characterized in ambient pressure. To fully make use of the limited chip area, the device is based on a single driving loop to couple the vibrating energy to three axes of sensing loops through Coriolis force. The resonator behavior is first characterized in vacuum, and then the rate measurements are evaluated through the use of spectrum analyzer and Lock-in Amplifier in air. Finally, angle random walks of 24.6 deg/rtsec, 25.4 deg/rt-sec, 9.52 deg/rt-sec, and bias instabilities of 8.78 dps, 11.32 dps, 4.92 dps are measured, respectively.