Surface & Coatings Technology最新文献

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Microstructure influence on functional properties of HVOF deposited NiCoCrAlY bond coat - SPS YSZ topcoat systems
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-12 DOI: 10.1016/j.surfcoat.2025.132157
Aravind Kumar Thoutam , Xin-Hai Li , Björn Kjellman , Mohit Gupta , Nicolaie Markocsan
{"title":"Microstructure influence on functional properties of HVOF deposited NiCoCrAlY bond coat - SPS YSZ topcoat systems","authors":"Aravind Kumar Thoutam ,&nbsp;Xin-Hai Li ,&nbsp;Björn Kjellman ,&nbsp;Mohit Gupta ,&nbsp;Nicolaie Markocsan","doi":"10.1016/j.surfcoat.2025.132157","DOIUrl":"10.1016/j.surfcoat.2025.132157","url":null,"abstract":"<div><div>Advanced thermal barrier coatings (TBCs) consisting of suspension plasma sprayed (SPS) topcoat and high-velocity oxy-fuel (HVOF) deposited bond coat were used in this study. Hastelloy-X substrates were coated with NiCoCrAlY bond coat using HVOF and yttrium stabilized zirconia (YSZ) with SPS techniques, respectively. Eight different topcoats were investigated with the standard HVOF bond coat for a lifetime and functional properties evaluation. Diverse microstructural features like interpass porosity, vertical and branching cracks in the coatings revealed a substantial influence on the lifetime and functional properties of the coatings. Thermal cyclic fatigue (TCF) and thermal shock tests were performed to evaluate the lifetime of the coatings and functional properties were assessed using laser flash analysis (LFA), air jet erosion tester, micro-indentation, etc. Specific emphasis on the sintering behavior of the microstructure and the mechanism behind the coating failure was detailed in this work. The findings demonstrate that HVOF-SPS systems offer a promising alternative to conventional coating technologies.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"508 ","pages":"Article 132157"},"PeriodicalIF":5.3,"publicationDate":"2025-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143844005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of advanced Cu and Ni temperature sensors on ceramic-coated tubes via electroless plating 通过化学电镀在陶瓷涂层管上开发先进的铜和镍温度传感器
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-12 DOI: 10.1016/j.surfcoat.2025.132161
Aitor Bikarregi , Santiago Dominguez , Victoria Astigarraga , Gabriel A. López , Alejandra López , Marta Brizuela
{"title":"Development of advanced Cu and Ni temperature sensors on ceramic-coated tubes via electroless plating","authors":"Aitor Bikarregi ,&nbsp;Santiago Dominguez ,&nbsp;Victoria Astigarraga ,&nbsp;Gabriel A. López ,&nbsp;Alejandra López ,&nbsp;Marta Brizuela","doi":"10.1016/j.surfcoat.2025.132161","DOIUrl":"10.1016/j.surfcoat.2025.132161","url":null,"abstract":"<div><div>Considering the high cost of precious elements, it is necessary to replace metals like platinum or gold in the sensor sector. In this work, copper and nickel sensor circuits based on autocatalytic techniques were proposed with the aim of monitoring the temperature of cylindrically shaped (and electrically conductive) components. After electrically insulating the tube, a lithographic masking strategy adapted to the cylindrical surface was employed. The surface was functionalized with silanes to deposit a catalytic surface composed of palladium and tin. Non-critical materials such as copper and nickel were selected as sensor materials, depositing them over the catalytic surface by electroless plating. These circuits were electrically characterized on a home-designed testing equipment. Electrical resistance was measured over a range of temperatures: from room temperature up to 250 °C. The electrical results for the copper sensing layer evidenced the need for a protective layer. Silicon oxide was chosen as a protective material. However, it was observed that the sensing and protective layers interact due to their chemical affinity. In contrast, the electrical response of the nickel circuit was stable and repeatable after thermal cycling (heating and cooling), indicating that protection was not necessary for the working temperature range. The sensors developed performed well with regards to functionalization of tubes in terms of time response, repeatability, and stability at the maximum operating temperature.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"507 ","pages":"Article 132161"},"PeriodicalIF":5.3,"publicationDate":"2025-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143829148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigating the penetration of a plasma polymer film into porous silicon with helium ion microscopy
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-11 DOI: 10.1016/j.surfcoat.2025.132150
Karyn L. Jarvis , Anders Barlow , E. Eduardo Antunez , Maria Alba , Sally L. McArthur , Paul R. Stoddart , Nicolas H. Voelcker
{"title":"Investigating the penetration of a plasma polymer film into porous silicon with helium ion microscopy","authors":"Karyn L. Jarvis ,&nbsp;Anders Barlow ,&nbsp;E. Eduardo Antunez ,&nbsp;Maria Alba ,&nbsp;Sally L. McArthur ,&nbsp;Paul R. Stoddart ,&nbsp;Nicolas H. Voelcker","doi":"10.1016/j.surfcoat.2025.132150","DOIUrl":"10.1016/j.surfcoat.2025.132150","url":null,"abstract":"<div><div>Plasma polymerisation is a thin film deposition technique that is frequently used to modify surfaces for a variety of biomedical and industrial applications. Many materials have some degree of porosity and generally it is not well understood how effectively plasma polymer films penetrate pores with varying pore diameters. Plasma polymerised acrylic acid (ppAAc) films with thicknesses of approximately 50, 100 and 150 nm were deposited onto four porous silicon (pSi) substrates with pore sizes of 13–25 nm, 32–58 nm, 120–180 nm and 0.9–1.2 μm, to investigate the relationship between pore size and film penetration into the pores. Film chemistry was characterised by X-ray photoelectron spectroscopy while film thicknesses on non-porous substrates deposited at the same time as the pSi substrates were measured using spectroscopic ellipsometry. Helium ion microscopy (HIM) was used to image the ppAAc films on the pSi substrates and also to determine film thickness. For the three pSi substrates, with pores diameters &lt;180 nm, negligible film penetration into the pores was observed in the HIM images. Continuous films were observed, completely occluding the pores when the ppAAc films were thicker than the diameter of the largest pores. For pSi with pore diameters of 0.9–1.2 μm, ppAAc film was observed up to 2 μm inside the pore. These results indicate the pore size scales required for the penetration of plasma polymer films into a porous structure, which is an important consideration when applying plasma polymer coatings to porous substrates for any application.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"507 ","pages":"Article 132150"},"PeriodicalIF":5.3,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of TiO2 on hydrogen trapping and diffusion at grain boundaries in Cr2O3-based coatings: experimental and first-principles studies
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-11 DOI: 10.1016/j.surfcoat.2025.132156
Jianglong Chen , Yanhui Hou , Guangqiang Li
{"title":"Effect of TiO2 on hydrogen trapping and diffusion at grain boundaries in Cr2O3-based coatings: experimental and first-principles studies","authors":"Jianglong Chen ,&nbsp;Yanhui Hou ,&nbsp;Guangqiang Li","doi":"10.1016/j.surfcoat.2025.132156","DOIUrl":"10.1016/j.surfcoat.2025.132156","url":null,"abstract":"<div><div>The lifespan of pipelines exposed to hydrogen environments over an extended period can be significantly reduced due to hydrogen embrittlement, and there is a potential risk of hydrogen-induced cracking. Currently, the most effective method is to incorporate a hydrogen permeation barrier layer on the inner surface of the pipelines. Therefore, this paper employs plasma spraying technology to prepare Cr<sub>2</sub>O<sub>3</sub> and Cr<sub>2</sub>O<sub>3</sub>–10%TiO<sub>2</sub> hydrogen permeation barrier coatings and combines first-principles calculations based on density functional theory to explore in depth the synergistic effects of Cr<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> on hydrogen permeation resistance. Experimental results indicate that the doping of TiO<sub>2</sub> not only significantly enhances the surface smoothness of the coating but also effectively reduces pore defects. This improvement directly prolongs the time required for hydrogen atoms to penetrate the coating and decreases the hydrogen permeation current density, thereby greatly enhancing the hydrogen barrier performance of the coating. Furthermore, first-principles calculations reveal that the hydrogen permeation resistance mechanism of the composite coating primarily relies on two core aspects: on the one hand, its dense crystalline structure and stable chemical bond structure effectively hinder the adsorption process of hydrogen atoms on the coating surface, slowing down the permeation rate of hydrogen atoms. On the other hand, once hydrogen atoms successfully penetrate the interior of the hydrogen permeation barrier layer, they are trapped by interstitial sites and vacancies within the coating, effectively preventing further diffusion of the hydrogen atoms.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"507 ","pages":"Article 132156"},"PeriodicalIF":5.3,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhancement mechanism of HVOF interlayers on ta-C film load-bearing and wear resistance
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-11 DOI: 10.1016/j.surfcoat.2025.132158
Bodun Zhu , Lunlin Shang , Yu Bian , Wensheng Li , Lei Shao , Guangan Zhang
{"title":"Enhancement mechanism of HVOF interlayers on ta-C film load-bearing and wear resistance","authors":"Bodun Zhu ,&nbsp;Lunlin Shang ,&nbsp;Yu Bian ,&nbsp;Wensheng Li ,&nbsp;Lei Shao ,&nbsp;Guangan Zhang","doi":"10.1016/j.surfcoat.2025.132158","DOIUrl":"10.1016/j.surfcoat.2025.132158","url":null,"abstract":"<div><div>Tetrahedral amorphous carbon (<em>ta</em>-C) films possess the advantages of excellent wear resistance and high hardness. However, the high internal stress and intrinsic brittleness lead to the “egg shell effect” resulting in cracking and failure. In this study, we prepared HVOF/PVD duplex coatings with five different interlayers (Stellite12, NiCrBSi, Cr<sub>3</sub>C<sub>2</sub>-25NiCr, WC-10Co-4Cr, and WC-12Co) by HVOF to enhance the load-bearing capacity of the top <em>ta</em>-C film. Combining experimental results with finite element analysis, we investigated the effects of various interlayers on mechanical properties, tribological behavior, and wear mechanisms of <em>ta</em>-C films, and further compared them to the single <em>ta</em>-C film. The results indicate that the HVOF layer can significantly improve the comprehensive mechanical property and wear resistance of the duplex coatings.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"508 ","pages":"Article 132158"},"PeriodicalIF":5.3,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143851633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of silicon content on the characterization of (CrTaWSi)Nx thin films
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-10 DOI: 10.1016/j.surfcoat.2025.132154
Li-Zhu Wang , Li-Chun Chang , Yung-I Chen
{"title":"Effects of silicon content on the characterization of (CrTaWSi)Nx thin films","authors":"Li-Zhu Wang ,&nbsp;Li-Chun Chang ,&nbsp;Yung-I Chen","doi":"10.1016/j.surfcoat.2025.132154","DOIUrl":"10.1016/j.surfcoat.2025.132154","url":null,"abstract":"<div><div>(CrTaWSi)N<sub><em>x</em></sub> films with 0–15.8 at.%Si were fabricated through magnetron cosputtering. The influences of Si content on the structural, mechanical, tribological, and antioxidative properties of (CrTaWSi)N<sub><em>x</em></sub> films were evaluated. The films grew a face-centered cubic phase and amorphous structure as the Si content was &lt;6.4 at.% and &gt;12.5 at.%, respectively. The crystalline (CrTaWSi)N<sub><em>x</em></sub> film with 6.4 at.%Si had the highest hardness and elastic modulus of 30.5 and 304 GPa, respectively. In contrast, the mechanical properties of the amorphous (CrTaWSi)N<sub><em>x</em></sub> films were at low levels. Moreover, the films with higher hardness were ascribed to the nanocomposite formation, accompanied by higher wear resistance and lower coefficient of friction. The (Cr<sub>0.31</sub>Ta<sub>0.10</sub>W<sub>0.31</sub>Si<sub>0.28</sub>)N<sub>0.76</sub> films with 15.8 at.%Si maintained an amorphous structure after annealing at 600 °C up to 24 h in the air accompanied by a surficial oxide layer restricting further oxidation.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"507 ","pages":"Article 132154"},"PeriodicalIF":5.3,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143823739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Toward bioactive calcium carbonate and hydroxyapatite-based coatings via plasma electrolytic oxidation – A review of challenges and current state-of-the-art
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-10 DOI: 10.1016/j.surfcoat.2025.132135
Vladlens Grebnevs , Arturs Viksna , Wojciech Simka
{"title":"Toward bioactive calcium carbonate and hydroxyapatite-based coatings via plasma electrolytic oxidation – A review of challenges and current state-of-the-art","authors":"Vladlens Grebnevs ,&nbsp;Arturs Viksna ,&nbsp;Wojciech Simka","doi":"10.1016/j.surfcoat.2025.132135","DOIUrl":"10.1016/j.surfcoat.2025.132135","url":null,"abstract":"<div><div>Bioactive implant coatings on metallic substrates are pivotal in modern biomedical engineering, offering both temporary and long-term solutions for repairing hard calcified tissue defects. Coatings combining calcium carbonate (CC) and hydroxyapatite (HA) are particularly effective in mimicking natural calcified tissues, embodying the principles of fourth-generation biomaterials. Existing techniques largely constrain the development of fully functional CC/HA coatings. Concurrently, plasma electrolytic oxidation (PEO), one of the most prospective approaches for metallic surface chemical modification, remains underexplored in the context of carbonates. This paper comprehensively reviewed the challenges and limitations associated with the parallel incorporation of CC and HA into PEO coatings, focusing on the additives' aggregate state, physicochemical properties, synthesis methods, and PEO process parameters. Additionally, an optimum strategy for creating Ti-based CC/HA coatings was identified via deductive approach and causal analysis. Standard PEO baths comprising only soluble components were recognized as inapplicable, whereas those representing biphasic particle suspensions exhibited undeniable advantages for the stated purpose. The ultimately preferred bath recipe consisted of CC particle suspension synthesized via carbonation route and further subjected to competing dissolution-precipitation and chemisorption reactions in dibasic sodium phosphate electrolyte. In sum, the current study provides a reliable conceptual basis toward practical implementation of CC/HA PEO coatings.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"506 ","pages":"Article 132135"},"PeriodicalIF":5.3,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143807443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimizing Ni-YSZ microstructure through anodic aluminum oxide substrate pore size modulation for enhanced reversible solid oxide cell performance
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-10 DOI: 10.1016/j.surfcoat.2025.132130
Sanghoon Lee , Jaewon Hwang , Wonjong Yu , Sangbong Ryu , Suk Won Cha
{"title":"Optimizing Ni-YSZ microstructure through anodic aluminum oxide substrate pore size modulation for enhanced reversible solid oxide cell performance","authors":"Sanghoon Lee ,&nbsp;Jaewon Hwang ,&nbsp;Wonjong Yu ,&nbsp;Sangbong Ryu ,&nbsp;Suk Won Cha","doi":"10.1016/j.surfcoat.2025.132130","DOIUrl":"10.1016/j.surfcoat.2025.132130","url":null,"abstract":"<div><div>Integrating renewable energy sources into the power grid requires the development of efficient, large-scale energy storage systems to address the intermittency and variability of these energy supplies. Reversible Solid Oxide Cells (RSOCs) present a promising solution due to their dual functionality in fuel cell and electrolysis modes. This study investigates the effect of varying the pore sizes of anodic aluminum oxide (AAO) substrates on the microstructural properties and electrochemical performance of Ni-YSZ fuel electrodes in RSOCs. By modulating the pore size of the AAO templates, control over key parameters such as grain size, porosity, and surface roughness of the Ni-YSZ fuel electrodes was achieved. The findings demonstrate that these microstructural parameters significantly influence the fuel electrode's ionic and electronic conductivity, gas diffusion efficiency, and charge transfer reactions. In particular, AAO substrates with optimized pore sizes facilitated the formation of low-tortuosity and high-performance fuel electrodes capable of efficient operation at lower temperatures. This research provides critical insights into designing and optimizing Ni-YSZ fuel electrodes for next-generation RSOCs, contributing to advancing durable and efficient energy storage solutions for large-scale renewable energy systems.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"508 ","pages":"Article 132130"},"PeriodicalIF":5.3,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143843893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-temperature oxidation and hot corrosion behavior of CoMoCrSi coating by APS and HVOF spraying
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-09 DOI: 10.1016/j.surfcoat.2025.132136
Zhiqiang Yang, Daoxin Liu, Yanjie Liu, Kai Zhou, Mengyao Li, Junnan Wu, Kaifa Fan, Xiaohua Zhang
{"title":"High-temperature oxidation and hot corrosion behavior of CoMoCrSi coating by APS and HVOF spraying","authors":"Zhiqiang Yang,&nbsp;Daoxin Liu,&nbsp;Yanjie Liu,&nbsp;Kai Zhou,&nbsp;Mengyao Li,&nbsp;Junnan Wu,&nbsp;Kaifa Fan,&nbsp;Xiaohua Zhang","doi":"10.1016/j.surfcoat.2025.132136","DOIUrl":"10.1016/j.surfcoat.2025.132136","url":null,"abstract":"<div><div>High-temperature oxidation behavior and hot corrosion failure mechanism of CoMoCrSi coatings (T800) prepared by atmospheric plasma spraying (APS) and high-velocity oxy-fuel spraying (HVOF) were investigated. The HVOF-T800 coating exhibited superior oxidation resistance during the oxidation. In the hot corrosion, the APS-T800 coating developed an external layer of CoMoO<sub>4</sub> and an internal layer of CoCr<sub>2</sub>O<sub>4</sub>, ultimately leading to internal delamination failure. Nevertheless, the HVOF-T800 coating formed an outer layer of Cr<sub>2</sub>O<sub>3</sub>, an intermediate layer of CoCr<sub>2</sub>O<sub>4</sub>, and an inner blocking layer of SiO<sub>2</sub>, resulting in interfacial delamination failure as the final failure mode, exhibited greater resistance to hot corrosion medium intrusion.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"507 ","pages":"Article 132136"},"PeriodicalIF":5.3,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143823738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Convergence during feedback controlled reactive magnetron sputtering: Mechanisms and classification
IF 5.3 2区 材料科学
Surface & Coatings Technology Pub Date : 2025-04-09 DOI: 10.1016/j.surfcoat.2025.132095
J. Van Bever , K. Strijckmans , S. Konstantinidis , D. Depla
{"title":"Convergence during feedback controlled reactive magnetron sputtering: Mechanisms and classification","authors":"J. Van Bever ,&nbsp;K. Strijckmans ,&nbsp;S. Konstantinidis ,&nbsp;D. Depla","doi":"10.1016/j.surfcoat.2025.132095","DOIUrl":"10.1016/j.surfcoat.2025.132095","url":null,"abstract":"<div><div>During feedback control of reactive magnetron sputtering, process parameters often exhibit a complex time-dependent behavior. This behavior hinders process stabilization and can lead to a modification of the desired film properties. This study investigates the processes behind this behavior by performing time-resolved measurements during reactive sputtering of aluminum in argon/oxygen mixtures. Two distinct groups of physical processes were identified. The first group exhibits a relatively fast time-dependent behavior, leading to process stabilization within 5 to 8 min. This group includes processes related to reactive gas introduction, its interaction with deposited material, and the feedback loop characteristics. The second group causes a continuous drift of the process for more than 45 min, primarily due to oxide deposition on the chamber walls and target erosion. These two groups have a different impact on the process curves known as hysteresis curves. For the first group, the impact is minimal while for the second group the hysteresis curve becomes distorted, potentially leading to misinterpretation or incorrect selection of deposition conditions. The utilization of the difference between the discharge voltage and floating potential as the feedback input signal eliminates the impact of oxide deposition and mitigates this problem.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"507 ","pages":"Article 132095"},"PeriodicalIF":5.3,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143823736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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