Surface & Coatings Technology最新文献

{"title":"Surface integrity engineering via ultrasonic surface rolling for enhanced hot salt stress corrosion cracking resistance of TC11 alloy","authors":"Mengyao Li,&nbsp;Daoxin Liu,&nbsp;Kai Zhou,&nbsp;Yanjie Liu,&nbsp;Zhiqiang Yang,&nbsp;Junnan Wu,&nbsp;Xiaohua Zhang","doi":"10.1016/j.surfcoat.2025.132757","DOIUrl":"10.1016/j.surfcoat.2025.132757","url":null,"abstract":"<div><div>Ultrasonic surface rolling processing (USRP) was applied to TC11 titanium alloy to improve its resistance to hot salt stress corrosion cracking (HSSCC) under high-temperature constant-load tensile conditions. By tailoring the number of processing passes, USRP produced a refined surface finish and introduced a thermally stable compressive residual stress (CRS) field. The CRS stability was maintained through the pinning and entanglement of high-density dislocations, effectively suppressing stress relaxation during thermal-mechanical exposure. The smoother surface reduced local stress concentrations and limited CRS redistribution. In addition, USRP promoted the rapid development of a dense amorphous–nanocrystalline composite oxide film, which served as an effective barrier to corrosive species and mitigated oxygen-induced embrittlement. These combined effects markedly enhanced the HSSCC resistance of TC11 alloy, demonstrating the potential of USRP as a robust surface engineering technique for extending the service life of titanium alloys in aggressive high-temperature salt environments.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132757"},"PeriodicalIF":6.1,"publicationDate":"2025-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A fluorine-free of polymer-ceramic superhydrophobic coating with combined characteristics of anti-corrosion, anti-icing, and hydrodynamic stability","authors":"Xuewu Li ,&nbsp;Chen Li ,&nbsp;Tian Shi ,&nbsp;Hejie Yang ,&nbsp;Chuanwei Zhang ,&nbsp;Rongrong Liu","doi":"10.1016/j.surfcoat.2025.132748","DOIUrl":"10.1016/j.surfcoat.2025.132748","url":null,"abstract":"<div><div>Aluminum-lithium alloys are susceptibility to localized corrosion, stress corrosion cracking, and icing in harsh environments causing severe safety risks and life-cycle limitations. To address this, a robust, fluorine-free multifunctional ceramic-polymer composite coating is developed for simultaneous liquid repellence, corrosion protection, and anti-icing performance. The hierarchical polymer-ceramic microstructure traps air to form a solid-air-liquid triphasic interface, significantly enhancing long-term stability. This work integrates: (1) eco-friendly fluorine-free design using polyurethane-polydimethylsiloxane (PU-PDMS) matrix, (2) one-step air-spray fabrication enabling scalability, and (3) synergistic Al₂O₃-TiO₂/PU-PDMS composition achieving multifunctionality. Results demonstrate exceptional performances: static water contact angle of 165.9 ± 0.9°, sliding angle of 6.1 ± 0.5°, electrochemical impedance increment by 3 orders of magnitude, positive shift of corrosion potential by 90 mV with 99.2 % inhibition efficiency, significant delay of 229 % in the freezing time of seawater (210 s vs. 690 s), buoyancy enhanced by 33 %, drag reduction of 45.37 % validated via boat tests and COMSOL simulations, and certain air capture capability and resistance to water impact. Such coating provides a scalable, eco-conscious solution integrating corrosion resistance, icephobicity, drag reduction, and mechanical durability. The prepared coating is mainly applied to the surface structure of aircraft and ships (hull and bottom), which helps to reduce the corrosion and icing on the surface of aircraft and ships in low temperatures and high humidity environments, and reduces energy consumption during ship operation through drag reduction and buoyancy enhancement effects. Its multifunctionality stems from stable air-film formation, hierarchical roughness, and chemical passivation. This work provides a paradigm for sustainable polymer composite design, bridging interfacial engineering with industrial applications in aerospace and marine systems.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132748"},"PeriodicalIF":6.1,"publicationDate":"2025-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222704","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Surface studying of oxygen plasma-treated ZnO thin films in the oxidation of glucose for sensing use","authors":"Fariba Amani ,&nbsp;Hassan Bidadi ,&nbsp;Mohammad Ali Mohammadi ,&nbsp;Mohammad Ghafouri","doi":"10.1016/j.surfcoat.2025.132751","DOIUrl":"10.1016/j.surfcoat.2025.132751","url":null,"abstract":"<div><div>This study reports the fabrication and characterization of activated zinc oxide (ZnO) thin films via oxygen plasma treatment for application in <span>d</span>-glucose oxidation. ZnO thin films were synthesized using a co-precipitation method followed by spin coating, and subsequently exposed to oxygen plasma for 6 and 9 min. Their structural and optical properties were analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX), atomic force microscopy (AFM), ultraviolet-visible (UV–Vis) spectroscopy, attenuated total reflectance Fourier-transform infrared spectroscopy (ATR-FTIR), and photoluminescence (PL) spectroscopy. XRD analysis revealed a reduction in the average crystallite size from 16 nm to 12 nm after plasma treatment. SEM images showed clear surface morphological modifications, while AFM indicated an increase in surface roughness from 2.85 nm to 6.03 nm due to the incorporation of oxygen-containing functional groups. UV–Vis spectroscopy showed an increase in the optical band gap from 3.26 eV to 3.32 eV. Moreover, ATR–FTIR and PL results confirmed the enhanced glucose oxidation activity of the plasma-treated ZnO thin films.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132751"},"PeriodicalIF":6.1,"publicationDate":"2025-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Grain boundary rotation-mediated strengthening in nano-columnar cr-based hard coatings","authors":"Shao-rong Bie ,&nbsp;Bao-wei Zhao ,&nbsp;Ding-shun She ,&nbsp;Zhi-qiang Fu ,&nbsp;Jia-jie Kang ,&nbsp;Xiao-yong Ren","doi":"10.1016/j.surfcoat.2025.132732","DOIUrl":"10.1016/j.surfcoat.2025.132732","url":null,"abstract":"<div><div>To investigate the hardening mechanisms of CrN-based hard coatings, transmission electron microscopy (TEM) was employed to correlate nanoindentation-induced deformation with microstructural evolution. Among the investigated coatings, CrAlN exhibits the highest hardness and Young's modulus (41.2 GPa/402.8 GPa), outperforming CrSiN (30.5 GPa/336.2 GPa) and CrN (26.7 GPa/305.7 GPa). The superior performance of the CrAlN is attributed to a coordinated deformation mechanism involving ∼9° deflection of columnar grains under compression loading, which facilitates stress redistribution while maintaining structural continuity. Additionally, stress-induced phase transformations at acute-angle grain boundaries—from FCC CrAlN to HCP Cr₂N and FCC AlN—further enhance strain accommodation, contributing to an improved strength-toughness balance. In contrast, CrSiN coating develops internal crack formation accompanied by Cr₂N phases. While these transformations increased hardness, they also introduced embrittlement, compromising ductility. The CrN coating, lacking both solid-solution strengthening and grain refinement, displayed extensive trans-granular fracture and grain disintegration, indicative of limited capacity for stress delocalization. These findings provide mechanistic insights into the structure–property relationships of CrN-based coatings and offer design guidelines for the development of advanced wear-resistant coatings with tailored mechanical responses.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132732"},"PeriodicalIF":6.1,"publicationDate":"2025-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222553","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Corrosion resistance of an AlSi alloy (AS12) after sulfuric anodizing and MAO: Mechanisms and effect of sealing with sodium decanoate","authors":"Anas Ben Romdhane ,&nbsp;Delphine Veys-Renaux ,&nbsp;Khaled Elleuch ,&nbsp;Emmanuel Rocca","doi":"10.1016/j.surfcoat.2025.132745","DOIUrl":"10.1016/j.surfcoat.2025.132745","url":null,"abstract":"<div><div>AlSi alloys, widely used in moulded parts for industrial or domestic applications, may undergo an electrochemical finishing treatment in order to enhance their surface properties, especially their corrosion resistance. In the present study, anodic layers are grown on an AS12 alloy by conventional anodizing in sulfuric acid on the one hand and by microarc oxidation (MAO) on the other hand. While both aluminium and silicon are completely oxidized within the microarc layer, metallic silicon particles are embedded within the classic porous alumina layer formed in acidic medium, generating strains and resulting in a cracked coating. Regarding the corrosion resistance, evaluated comparatively by electrochemical impedance spectroscopy (EIS) measurements performed in NaCl 0.1 M and salt spray test (SST), the results consistently show an improvement by microarc oxidation but not by sulfuric anodizing, since the corrosion mechanisms are mainly driven by galvanic coupling between silicon particles and aluminium matrix. A sealing post-treatment in sodium decanoate CH₃(CH₂)₈CCONa is considered as well on both types of anodic layers. An enhancement of the anticorrosion performances is noticed in each case, more significantly for sulfuric anodizing.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132745"},"PeriodicalIF":6.1,"publicationDate":"2025-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222558","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Unveiling advanced corrosion resistance of novel Al-5Si/Al2O3 cold spray coatings for enhanced durability of AZ31 magnesium alloy","authors":"Nasir Ullah ,&nbsp;Naeem Ul Haq Tariq ,&nbsp;Hari Bhakta Oli ,&nbsp;Xinyu Cui ,&nbsp;Jiqiang Wang ,&nbsp;Tianying Xiong","doi":"10.1016/j.surfcoat.2025.132749","DOIUrl":"10.1016/j.surfcoat.2025.132749","url":null,"abstract":"<div><div>An innovative corrosion-resistant Al-5Si/Al₂O₃ composite coating was effectively deposited on AZ31 magnesium alloy using the supersonic cold spray technique. The corrosion performance of both coated and uncoated AZ31 samples was systematically evaluated through a 1000-h salt spray test in 5 wt% NaCl and electrochemical methods. Comprehensive morphological and chemical characterizations were conducted using scanning electron microscopy (SEM) with energy-dispersive spectroscopy (EDS), white light interferometry (WLI), X-ray diffraction (XRD), and high-resolution X-ray photoelectron spectroscopy (HR-XPS). The uncoated AZ31 alloy exhibited severe corrosion degradation, characterized by deep pits, microcracks, and a ∼ 4 × times thicker corrosion layer compared to coated samples, primarily attributed to the formation of non-protective MgO/Mg(OH)₂ layers and the presence of Mg₇Zn₃ intermetallic phases. In contrast, the Al-5Si/Al₂O₃ composite coating demonstrated outstanding corrosion resistance, with minimal surface degradation, a ∼ 3× reduced corrosion depth. Electrochemical measurements revealed a substantial decrease in corrosion rate from 82.51 μm/year (bare AZ31) to 4.17 μm/year (composite-coated AZ31). Unlike conventional Al-based cold spray coatings, this study introduces a dual-phase Al-5Si/Al₂O₃ composite that promotes the formation of stable Al₂O_3, and in-situ generated SiO₂ passive films, thereby offering superior and long-term corrosion protection in aggressive chloride environments. These findings underscore the efficacy of the composite coating in significantly enhancing the corrosion resistance of AZ31 magnesium alloy.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132749"},"PeriodicalIF":6.1,"publicationDate":"2025-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Tribocorrosion properties of heat-treated FeCrCoMnSix high-entropy alloy coatings","authors":"Shuling Zhang ,&nbsp;Di Jiang ,&nbsp;Qingchen Liang ,&nbsp;Xiangdong Yang ,&nbsp;Wei Sun ,&nbsp;Guoshuai Cao ,&nbsp;Feng Guo ,&nbsp;Xiaoqing Tian","doi":"10.1016/j.surfcoat.2025.132750","DOIUrl":"10.1016/j.surfcoat.2025.132750","url":null,"abstract":"&lt;div&gt;&lt;div&gt;Although non-metallic element Si has attracted much attention in the design of high entropy alloys (HEAs) and heat treatment has been proven to improve coating defects, there is still a lack of systematic research on the friction corrosion behavior of FeCrCoMnSi&lt;sub&gt;x&lt;/sub&gt; HEAs, especially coatings with different Si contents in annealed state, and their correlation with phase composition and structural defects, after annealing treatment. Therefore, the FeCrCoMnSi&lt;sub&gt;x&lt;/sub&gt; high-entropy alloy, HEA coating was fabricated on the surface of 45 steel substrates via laser cladding technology. Subsequently, the microstructure and tribocorrosion properties of the FeCrCoMnSi&lt;sub&gt;x&lt;/sub&gt; HEA alloy coatings were investigated after a heat treatment at 600 °C for 1 h. The results indicate that after the recrystallization process, the FeCrCoMnSi&lt;sub&gt;x&lt;/sub&gt; HEA coatings still predominantly consist of FCC and BCC dual-phase solid-solution phases. However, the microstructure is refined, and there are fewer defects. When a small amount of Si is incorporated into the coating, the microstructure transforms into a dense eutectic structure. In particular, the Si&lt;sub&gt;0.6&lt;/sub&gt; coating exhibits a refined equiaxed crystal structure. After the annealing treatment, the precipitated metal silicides significantly enhance the overall hardness of the coating. The hardness of the Si&lt;sub&gt;0.6&lt;/sub&gt; coating reaches up to 551.3 HV. Electrochemical analysis shows that after the annealing treatment, the corrosion resistance of the coatings in a 3.5 % NaCl solution is improved. The fine recrystallized structure with fewer defects and higher density delays the development of pitting corrosion. The self-corrosion current density of the Si&lt;sub&gt;0.6&lt;/sub&gt; coating decreased from 1.1484 × 10&lt;sup&gt;‐&lt;/sup&gt;&lt;sup&gt;−6&lt;/sup&gt; A⋅cm&lt;sup&gt;2&lt;/sup&gt; before annealing to 9.5076 × 10&lt;sup&gt;‐&lt;/sup&gt;&lt;sup&gt;−7&lt;/sup&gt; A⋅cm&lt;sup&gt;2&lt;/sup&gt;, a decrease of 17 %. The self-corrosion potential also increased from ‐−0.329 V to ‐−0.301 V. The Si&lt;sub&gt;0.6&lt;/sub&gt; coating exhibits the best corrosion resistance, with a corrosion protection efficiency reaching 94.17 %. Moreover, the tribocorrosion analysis of the coating in a 3.5 % NaCl solution reveals that interface reactions occur under the combined action of friction and corrosion, leading to the formation of Cr and Si oxides, which reduces the coefficient of friction, COF. On the other hand, these oxides effectively improve the coating's resistance to oxidative wear and Cl&lt;sup&gt;‐&lt;/sup&gt;&lt;sup&gt;−&lt;/sup&gt; erosion. Among them, the COF and wear loss of the Si&lt;sub&gt;0.6&lt;/sub&gt; coating decrease to 0.1524 and 2.2268 × 10&lt;sup&gt;‐&lt;/sup&gt;&lt;sup&gt;−5&lt;/sup&gt; mm&lt;sup&gt;3&lt;/sup&gt;/Nm respectively, compared with the unannealed Si&lt;sub&gt;0.6&lt;/sub&gt; coating (0.202 and 4.0598 × 10&lt;sup&gt;‐&lt;/sup&gt;&lt;sup&gt;−5&lt;/sup&gt; mm&lt;sup&gt;3&lt;/sup&gt;/N⋅·m), the COF decrease by 25 % and the wear loss decrease by 45 %, showing better resistance to friction and corrosion. And demonstrating excellent tribocorrosion resistance. The above studies confi","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132750"},"PeriodicalIF":6.1,"publicationDate":"2025-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Tuning bandgaps of NiFe layered double hydroxides through V doping: A first-principles study","authors":"Sheng-Chieh Huang,&nbsp;Chao-Cheng Kaun","doi":"10.1016/j.surfcoat.2025.132742","DOIUrl":"10.1016/j.surfcoat.2025.132742","url":null,"abstract":"<div><div>Using first-principles calculations, we explore the effects of cation ordering, magnetic states, and doping concentrations on bandgaps of NiFe and NiFeV layered double hydroxides (LDHs). Our results indicate that the compositions modulate the bandgaps, narrowed from 1.73 (Ni:Fe = 3:1) to 0.75 eV (Ni:Fe = 5:3), as well as from 1.71 (Ni:Fe:V = 6:1:1) to 0.68 (Ni:Fe:V = 4:3:1), and further downs to 0.08 eV (Ni:Fe:V = 2:1:1) under specific structural constraints. This bandgap control originates from changes in the oxidation states of Fe ions. Our results reveal the optimal configuration of NiFeV LDHs for the lowest bandgap, providing insights for designing efficient optoelectronic devices and OER catalysts.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132742"},"PeriodicalIF":6.1,"publicationDate":"2025-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A comparative study on the formation of Micro-arc oxidation coatings on AZ31B and AC84 magnesium alloys","authors":"Chi-Hua Chiu ,&nbsp;Shih-Yen Huang ,&nbsp;Yu-Ren Chu ,&nbsp;Shun-Han Yang ,&nbsp;Peng-Wei Chu ,&nbsp;Jyh-Wei Lee ,&nbsp;Yoshihito Kawamura ,&nbsp;Yueh-Lien Lee","doi":"10.1016/j.surfcoat.2025.132743","DOIUrl":"10.1016/j.surfcoat.2025.132743","url":null,"abstract":"<div><div>This study investigates the micro-arc oxidation (MAO) behavior of AZ31B and Mg–8Al–4Ca (AC84) magnesium alloys, with emphasis on the role of the β–Al–Ca phase (β phase). Constant-voltage MAO treatments were performed, and the resulting coatings were characterized by SEM and TEM. At low voltage (150 V), the high conductivity of the β phase in AC84 promoted localized discharges, leading to uneven and thinner coatings compared to the more uniform coatings on AZ31B. At higher voltages (≥200 V), AC84 formed stable Mg–Ca-rich silicate/oxide phases, enhancing coating corrosion resistance. However, reduced discharge intensity in AC84 at high voltages also limited coating growth, resulting in thinner layers under identical conditions. Selective removal of surface β phases prior to MAO improved coating uniformity and thickness, yielding characteristics closer to those of AZ31B. These findings demonstrate the significant influence of β phase distribution and anodizing voltage on MAO coating evolution and performance.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132743"},"PeriodicalIF":6.1,"publicationDate":"2025-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Optimizing ion-assisted deposition: Passivation behavior of Y₂O₃ and YAG thin films in plasma environments","authors":"Duy Thanh Cu ,&nbsp;Meng-Fu Chi ,&nbsp;Guo-Yang Ciou ,&nbsp;Kuan-Wei Lu ,&nbsp;Meng-Chi Li ,&nbsp;Chien-Cheng Kuo","doi":"10.1016/j.surfcoat.2025.132744","DOIUrl":"10.1016/j.surfcoat.2025.132744","url":null,"abstract":"<div><div>The semiconductor manufacturing equipment market is essentially driven by the need for high-quality corrosion-resistant coatings in order to deliver longer durability and better performance. This study explores the formation, growth, and stability of fluorine-enhanced passivation layers on Y₂O₃ and YAG thin films prepared via ion-assisted electron beam evaporation with various ion source voltages (120 V, 140 V, 160 V). This study advances the understanding of Y₂O₃ and YAG materials by examining their different passivation behaviors under CF₄/O₂ plasma etching, highlighting the critical role of ion energy in controlling fluorine incorporation, surface morphology evolution, and the formation of stable passivation layers that enhance plasma resistance. Results show that increasing the ion source voltage in the ion source system creates better fluorine retention in Y₂O₃ particles, generating the smoothest morphology and the thickest passivation layer at 160 V, resulting in better corrosion resistance. In contrast, YAG exhibits the most favorable passivation characteristics at 140 V, where it achieves the lowest roughness, highest fluorine incorporation, and the most uniform passivation layer. Moreover, YAG films exhibit better passivation characteristics, and the long-term stability test (up to 6 h) shows the dynamic protection mechanism, with a continuously growing passivation layer (44.51 nm to 54.70 nm) and a maintained smooth surface. On the other hand, although the Y₂O₃ films also form a passivation layer, the protective nature of this layer is essentially undermined by the crystalline nature of the films. This results in a less stable and effective barrier than the dense, uniform layer formed on the amorphous YAG, which leads to poor long-term plasma resistance. Moreover, XPS analysis confirmed the formation of a dense, fluorine-rich passivation layer on both materials, indicated by the significant suppression of the underlying Y and Al signals after plasma exposure.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"516 ","pages":"Article 132744"},"PeriodicalIF":6.1,"publicationDate":"2025-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145222703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}