Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)最新文献_第4页

Lens fabrication on optical fiber end using photolithography 光纤端用光刻技术制造透镜

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984187

M. Sasaki, T. Ando, S. Nogawa, K. Hane

引用次数: 3

Mo/Si multilayers with different barrier layers for applications as EUV mirrors 具有不同阻挡层的Mo/Si多层用于EUV反射镜

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984103

S. Braun, H. Mai, M. Moss, R. Scholz

引用次数: 9

Thickness measurements of ultra-thin films using AFM 利用原子力显微镜测量超薄薄膜厚度

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984179

T. Kim, H. Kwon, J. Lee, Byung-Gook Park

引用次数: 2

Proximity effect correction for large patterns in electron-beam projection lithography 电子束投影光刻中大图样的接近效应校正

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984059

M. Osawa, K. Takahashi, M. Sato, H. Arimoto, K. Ogino, H. Hoshino, Y. Machida

引用次数: 0

Low loss optical coat for 157 nm lithography 157nm光刻用低损耗光学涂层

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984075

A. Matsumoto, A. Tanaka, J. Saito, J. Nagatsuka, T. Saito, S. Niisaka, K. Sone, M. Otani, C. Ouchi, M. Hasegawa, Y. Suzuki, R. Biro

引用次数: 0

Oxygen pressure dependence of the initial oxidation on Si[001] surface studied by AES combined with 用原子发射光谱法(AES)研究了Si[001]表面初始氧化的氧压依赖性

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984113

Y. Takakuwa, F. Ishida, T. Kawawa

引用次数: 0

Optical film formation with O/sub 2/ cluster ion assisted deposition 用O/亚2/簇离子辅助沉积形成光学薄膜

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984115

K. Shirai, Y. Fujiwara, R. Takahashi, N. Toyoda, S. Matsui, T. Mitamura, M. Terasawa, H. Tsubakino, I. Yamada

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引用次数: 0

Characterization of thermopile based on CMOS materials and post CMOS micromachining 基于CMOS材料和后CMOS微加工的热电堆表征

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984066

C. Du, Chengkuo Lee

引用次数: 4

SPM application of carbon nanotubes: probes and tweezers 碳纳米管在SPM中的应用:探针和镊子

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984068

Y. Nakayama, S. Akita

引用次数: 1

Portable biochemical detection systems using microfluidic and BioMEMS devices 使用微流体和生物机械设备的便携式生化检测系统

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984040

C. Ahn

引用次数: 1