Microsystems & Nanoengineering最新文献

{"title":"Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrate.","authors":"Yimo Chen, Yan Shi, Xiang Xi, Yang Yu, Kun Lu, Dingbang Xiao, Xuezhong Wu","doi":"10.1038/s41378-025-00932-4","DOIUrl":"https://doi.org/10.1038/s41378-025-00932-4","url":null,"abstract":"<p><p>This study presents a scheme for the identification and trimming of the first three harmonics of mass defects in micro hemispherical resonators (MHRs), aiming to refine their mass balancing techniques. Given the manufacturing and structural uniqueness of MHRs, a multimodal elastic electrode substrate is designed to respond to the first three harmonics. Configured as cantilever beams with a load platform, this substrate forms an identification assembly with the MHR. The radial eccentric forces generated by the 1st and 3rd harmonics in the MHR can excite the swing modes of the assembly, while the axial force generated by the 2nd harmonic can induce axial mode vibrations along the Z-axis. A method is proposed to decompose the vibration information of the elastic electrode substrate into double-cycle, single-cycle, and offset components under the N = 2 modes, enabling the extraction of swing mode and Z-axis translational mode response signals and the retro-calculation of the first three harmonics. Finite element simulation, based on a model of the identification assembly, validates the proposed scheme by simulating the identification and trimming process. Subsequently, an identification assembly sample is fabricated and subjected to identification and trimming of the first three harmonics using a laser vibrometer and femtosecond laser ablation process. After multiple iterations, the first three harmonics are reduced by 92.8%, 89.3%, and 75.5%, respectively, effectively suppressing the swing modes and axial translation modes induced by unbalanced mass.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"71"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12019184/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144017793","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification.","authors":"Wenxin Luo, Fa Dai, Yijun Liu, Xin Wang, Mingjie Li","doi":"10.1038/s41378-025-00934-2","DOIUrl":"https://doi.org/10.1038/s41378-025-00934-2","url":null,"abstract":"<p><p>The sensing and identification of trace gases are essential for ensuring chemical safety and protecting human health. This study introduces a low-power electronic nose system that utilizes a single sensor driven by repeated pulsed power inputs, offering a viable alternative to conventional sensor array-based methods. The sensor's compact design and suspended architecture facilitate a rapid thermal response, effectively decoupling the influences of temperature, physisorption, and charge exchange on the conductivity of the sensing material. This mechanism generates distinct gas sensing responses, characterized by alternating dual responses within a single time period. The unique dynamics of the dual signals, which vary with gas type and concentration, enable precise identification of multiple gas species using machine learning (ML) algorithms. Microfabricated through wafer-level batch processing, our innovative electronic nose system holds significant potential for battery-powered mobile devices and IoT-based monitoring applications.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"72"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12019587/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144012399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application.","authors":"Linlin Wang, Yuan Wang, Max Tietze, Bernardo Pereira Madeira, Rui P Martins, Pui-In Mak, Nicolas Chanut, Divya Rajagopal, Masaya Sugihara, Rob Ameloot, Chen Wang","doi":"10.1038/s41378-025-00917-3","DOIUrl":"https://doi.org/10.1038/s41378-025-00917-3","url":null,"abstract":"<p><p>This paper explored the practical utility of gas sensing applications based on the multi-degree-of-freedom (Multi-DoF) bulk acoustic wave (BAW) resonant sensors, including 1, 2, and 3-DoF devices, where piezoelectric actuation and sensing methods were adopted. Zeolitic imidazolate framework-8 (ZIF-8) was chosen for the adsorption and desorption of the ethanol vapor, thereby facilitating the gas sensing mechanism and introducing the external mass changes to the multi-DoF resonating system. Similar to conventional quartz crystal microbalance (QCM) gas sensors, the frequency shift of all the devices (1, 2, and 3-DoF devices) was tracked to characterize the sensitivity. Besides, for the 2 and 3-DoF devices, the amplitude ratio (AR) change was also recorded and observed with an enhancement in performance. Compared with the state-of-the-art gas sensor based on 2-DoFcapacitively coupled resonators, the presented devices achieved better Q factor in air, stability, and resolution in terms of both frequency shifts and AR changes. The dominant mass change (dominant stiffness change in the state-of-the-art) of the proposed resonant devices matched well with the theoretical mass sensing principle, which is both predictable and crucial for the accurate modeling of the practical mass sensor. Furthermore, a lower ethanol vapor concentration from 0.1% to 2% was successfully detected by the proposed 2-DoF device, demonstrating even better sensing performance than that of the state-of-the-art.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"69"},"PeriodicalIF":7.3,"publicationDate":"2025-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12015448/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143971994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Gecko-inspired soft actuators for wafer handling via overcuring-induced anisotropic microstructures in DLP 3D printing.","authors":"Sooheon Kim, Jongwon Kim, Sangbo Seo, Hongyun So","doi":"10.1038/s41378-025-00920-8","DOIUrl":"https://doi.org/10.1038/s41378-025-00920-8","url":null,"abstract":"<p><p>The anisotropic setae structures of geckos demonstrate a natural anisotropic response to external forces, thereby enabling rapid and repeated attachment and detachment. Considering this biological mechanism, this study proposes an innovative process that harnesses the overcuring of resins in digital light processing (DLP) 3D printing to emulate setae structures. The proposed method facilitates the spontaneous fabrication of anisotropic shapes from isotropically modeled geometries. Furthermore, it reduces the number of hierarchical structures typically produced in conventional 3D printing and creates smooth surfaces, thereby enhancing the structural stability for directional adhesion and detachment. The anisotropic structures were processed into functional surfaces through a double-casting method, exhibiting an adhesive strength akin to that of gecko-setae structures while maintaining easy detachment capabilities. Finally, a simple mechanical module was fabricated to directly demonstrate the detachment effect. This study introduces a novel approach to DLP printing for fabricating enhanced anisotropic structures that can be seamlessly integrated with existing 3D printing techniques. By strategically utilizing overcuring, a phenomenon often perceived as a limitation, this study demonstrated its potential to expand the boundaries of next-generation 3D printing technologies.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"68"},"PeriodicalIF":7.3,"publicationDate":"2025-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12015356/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144027958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Levitation and controlled MHz rotation of a nanofabricated rod by a high-NA metalens.","authors":"Hailong Pi, Chuang Sun, Kian Shen Kiang, Tiberius Georgescu, Bruce Jun-Yu Ou, Hendrik Ulbricht, Jize Yan","doi":"10.1038/s41378-025-00886-7","DOIUrl":"https://doi.org/10.1038/s41378-025-00886-7","url":null,"abstract":"<p><p>An optically levitated nanoparticle in a vacuum provides an ideal platform for ultra-precision measurements and fundamental physics studies because of the exceptionally high-quality factor and rich motion modes, which can be engineered by manipulating the optical field and the geometry of the nanoparticle. Nanofabrication technology with the ability to create arbitrary nanostructure arrays offers a precise way of engineering the optical field and the geometry of the nanoparticle. Here, for the first time, we optically levitate and rotate a nanofabricated nanorod via a nanofabricated a-Si metalens which strongly focuses a 1550 nm laser beam with a numerical aperture of 0.953. By manipulating the laser beam's polarization, the levitated nanorod's translation frequencies can be tuned, and the spin rotation mode can be switched on and off. Then, we showed the control of rotational frequency by changing the laser beam's intensity and polarization as well as the air pressure. Finally, a MHz spin rotation frequency of the nanorod is achieved in the experiment. This is the first demonstration of controlled optical spin in a metalens-based compact optical levitation system. Our research holds promise for realizing scalable on-chip integrated optical levitation systems.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"67"},"PeriodicalIF":7.3,"publicationDate":"2025-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12012181/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143992964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Anti-aliasing multi-bit sigma-delta modulated cobweb-like disk resonator gyroscope with extending input range.","authors":"Bo Fan, Shihao Du, Jingchuan Zhou, Zhenghao Lu, Dacheng Xu, Shuwen Guo, Yuyu Tan, Fang Chen","doi":"10.1038/s41378-025-00919-1","DOIUrl":"https://doi.org/10.1038/s41378-025-00919-1","url":null,"abstract":"<p><p>A novel cobweb-like disk resonator gyroscope (CDRG) is introduced in this paper, which integrates a multi-bit electro-mechanical sigma-delta modulation (ΣΔΜ) system to significantly expand the input angular rate signal range, improving performance metrics like signal-to-noise ratio (SNR) and noise reduction. This design seeks to overcome the limitations associated with single-bit ΣΔΜ gyroscope systems by incorporating a linear multi-bit force feedback mechanism that utilizes nonlinear actuators driven by pulse density modulation. The proposed gyroscope system effectively broadens the input range without necessitating higher actuation voltages. In the absence of electronic trimming, experimental findings indicate significant enhancements in performance metrics: the input range, angle random walk, and bias instability improved by 30%, 106.2%, and 487.9%, respectively, when compared to traditional ΣΔΜ CDRG system configurations.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"66"},"PeriodicalIF":7.3,"publicationDate":"2025-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12012175/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144029364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Extracellular vesicle-based point-of-care testing for diagnosis and monitoring of Alzheimer's disease.","authors":"Xiang Li, Jie Chen, Yang Yang, Hongwei Cai, Zheng Ao, Yantao Xing, Kangle Li, Kaiyuan Yang, Weihua Guan, James Friend, Luke P Lee, Nian Wang, Feng Guo","doi":"10.1038/s41378-025-00916-4","DOIUrl":"https://doi.org/10.1038/s41378-025-00916-4","url":null,"abstract":"<p><p>Extracellular vesicles (EVs) show potential for early diagnosis of Alzheimer's disease (AD) and monitoring of its progression. However, EV-based AD diagnosis faces challenges due to the small size and low abundance of biomarkers. Here, we report a fully integrated organic electrochemical transistor (OECT) sensor for ultrafast, accurate, and convenient point-of-care testing (POCT) of serum EVs from AD patients. By utilizing acoustoelectric enrichment, the EVs can be quickly propelled, significantly enriched, and specifically bound to the OECT detection area, achieving a gain of over 280 times response in 30 s. The integrated POCT sensor can detect serum EVs from AD patients with a limit of detection as low as 500 EV particles/mL and a reduced detection time of just two minutes. Furthermore, the integrated POCT sensors were used to monitor AD progression in an AD mouse model by testing the mouse Aβ EVs at different time courses (up to 18 months) and compared with the Aβ accumulation using high-resolution magnetic resonance imaging (MRI). This innovative technology has the potential for accurate and rapid diagnosis of Alzheimer's and other neurodegenerative diseases, and monitoring of disease progression and treatment response.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"65"},"PeriodicalIF":7.3,"publicationDate":"2025-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12006457/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144018738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm.","authors":"Chen Wang, Xinyu Wu, Sina Sadeghpour, Milad Shojaeian, Linlin Wang, Bernardo Pereira Madeira, Yangyang Guan, Huafeng Liu, Yuan Wang, Pan Zhang, Pui-In Mak","doi":"10.1038/s41378-025-00910-w","DOIUrl":"https://doi.org/10.1038/s41378-025-00910-w","url":null,"abstract":"<p><p>This paper describes a novel, system-level design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can concurrently design and co-optimize the electronic and mechanical parts of a MEMS device comprising freeform geometries to achieve a better system performance, i.e., a high sensitivity, a good system stability, and large fabrication tolerances. Also, the introduction of freeform geometries allows higher degrees of freedom in the design process, improving the diversity and potentially the performance of the MEMS devices. A MEMS accelerometer comprising a freeform mechanical motion preamplifier in a closed-loop control system is presented to demonstrate the effectiveness of the design approach. The optimization process shows the main figure-of-merit (FOM) is improved by 195%. In the mechanical component alone (open-loop system), the product of sensitivity and bandwidth has improved by 151%, with sensitivity increasing by 276%. For closed-loop performance, there is an improvement of 120% for the ratio of open and closed-loop displacements. The product of sensitivity and bandwidth is improved by 27% in the closed-loop system. Excellent immunities to fabrication errors and parameter mismatch are achieved. Experiments show that the displacement of the MEMS accelerometer in the closed-loop system decreased by 86% with 4.85 V feedback voltage compared with that in the open-loop system under a 1 g 100 Hz acceleration input. The static and dynamic nonlinearities in the closed-loop system are improved by 64% and 61%, respectively, compared with those in the open-loop system, in the ±1 g acceleration input range. Besides, the closed-loop system improves the cross-axis sensitivity by 18.43%, compared with that in the open-loop system. It is the first time a closed-loop system for a MEMS accelerometer comprising a mechanical motion preamplifier is successfully implemented experimentally.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"64"},"PeriodicalIF":7.3,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12003626/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143972209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Electrochemical microfluidic biosensor for the detection of CD4⁺ T cells.","authors":"Katarzyna Białas, Hui Min Tay, Chayakorn Petchakup, Razieh Salimian, Stephen G Ward, Mark A Lindsay, Han Wei Hou, Pedro Estrela","doi":"10.1038/s41378-025-00893-8","DOIUrl":"https://doi.org/10.1038/s41378-025-00893-8","url":null,"abstract":"<p><p>Since the onset of the HIV epidemic, assessing CD4⁺ T-cells has become a routine procedure for evaluating immune deficiency, with flow cytometry established as the gold standard. Over time, various strategies and platforms have been introduced to improve CD4⁺ cell enumeration, aiming to enhance the performance of diagnostic devices and bring the service closer to patients. These advancements are particularly critical for low-resource settings and point-of-care applications, where the excellent performance of flow cytometry is hindered by its unsuitability in such environments. This work presents an innovative electrochemical microfluidic device that, with further development, could be applied for HIV management in low resource settings. The setup integrates an electrochemical sensor within a PDMS microfluidic structure, allowing for on-chip electrode functionalization and cell detection. Using electrochemical impedance spectroscopy, the biosensor demonstrates a linear detection range from 1.25 × 10⁵ to 2 × 10⁶ cells/mL, with a detection limit of 1.41 × 10⁵ cells/mL for CD4⁺ cells isolated from blood samples, aligning with clinical ranges for both healthy and HIV⁺ patients. The biosensor shows specificity towards CD4⁺ cells with negligible response to monocytes, neutrophils, and bovine serum albumin. Its integration with a microfluidic chip for sensor fabrication and cell detection, compact size, minimal manual handling, ease of fabrication, electrochemical detection capability, and potential for multiplexing together with the detection range make the device particularly advantageous for use in low-resource settings, standing out among other devices described in the literature. This study also investigates the integration of a microfluidic Dean Flow Fractionation (DFF) chip for cell separation.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"63"},"PeriodicalIF":7.3,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11982565/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144018694","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Contactless Braille sensing based on GaN optical devices integrated with epoxy lenses.","authors":"Hongyu Cheng, Jiahao Yin, Sirui Li, Kwai Hei Li","doi":"10.1038/s41378-025-00904-8","DOIUrl":"10.1038/s41378-025-00904-8","url":null,"abstract":"<p><p>Braille serves as an efficient means for visually impaired individuals to access textual information and engage in communication. However, the process of reading Braille can often be cumbersome and time-intensive, particularly in bidirectional human-machine interaction. In this work, a compact optical device for contactless detection of Braille is fabricated and characterized. The GaN-on-sapphire chip, which employs monolithic integration, serves as the core for both light emission and photodetection, significantly reducing its overall footprint. The incorporation of the semi-ellipsoid epoxy lens with optimized dimensions ensures consistent and accurate detection. The sensing device demonstrates high stability and fast response through its line-scanning capabilities on Braille codes. The captured signals are analyzed using a microcontroller, and the Braille recognition results are wirelessly transmitted to a portable mobile device, enabling the conversion into audio and visual formats. This innovative design not only facilitates Braille reading but also holds the potential to advance human-machine interaction.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"11 1","pages":"62"},"PeriodicalIF":7.3,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11978887/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143812058","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}