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2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)最新文献

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Brush Painting All-Carbon Wearable Dual Temperature and Strain Sensor for Human Health Monitoring 用于人体健康监测的刷涂全碳可穿戴双温度应变传感器
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568676
A. Arshad, Muhammad Umaid Bukhari, M. Q. Mehmood, M. Zubair, K. Riaz
{"title":"Brush Painting All-Carbon Wearable Dual Temperature and Strain Sensor for Human Health Monitoring","authors":"A. Arshad, Muhammad Umaid Bukhari, M. Q. Mehmood, M. Zubair, K. Riaz","doi":"10.1109/dtip54218.2021.9568676","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568676","url":null,"abstract":"Simple, cost effective, wearable and multifunctional health monitoring sensors are essential to improve the standard of living and quality of health in developing countries, especially in remote and rural communities. This paper presents a facile, low cost, environment friendly, wearable all-carbon dual temperature and strain sensor for health monitoring. The dual sensor is fabricated by painting conductive paste on flexible sticky-note paper. The conductive paste is prepared by mixing pencil graphite and ink from the gel pen. Resistive temperature sensor is painted on the one side of the paper while comb like capacitive strain sensor on the other side of the paper. The response of temperature and strain sensors is insensitive to each other. The strain sensor is successfully tested to detect deformation in different body parts like knee, elbow, finger and wrist. This dual-sensor can be used as a pedometer after integration on the knee, as a gesture sensor after integration on the finger. It can also be used as a touch sensor, rehabilitation sensor and body temperature sensor.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"160 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115593739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
BEOL modifications of a 130 nm SiGe BiCMOS technology for monolithic integration of thin-film wafer-level encapsulated D-Band RF-MEMS switches BEOL修改了130 nm SiGe BiCMOS技术，用于薄膜晶圆级封装D-Band RF-MEMS开关的单片集成
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568672
A. Göritz, S. Wipf, M. Wietstruck, M. Kaynak, M. Fraschke, A. Krüger, M. Lisker
{"title":"BEOL modifications of a 130 nm SiGe BiCMOS technology for monolithic integration of thin-film wafer-level encapsulated D-Band RF-MEMS switches","authors":"A. Göritz, S. Wipf, M. Wietstruck, M. Kaynak, M. Fraschke, A. Krüger, M. Lisker","doi":"10.1109/dtip54218.2021.9568672","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568672","url":null,"abstract":"Diversity in application makes the CMOS technologies interesting for solving the most complex requests from science and consumer electronics. The monolithic integration of MEMS devices into any CMOS technology is one of the most promising approach to reduce the parasitic effects by interconnects and small formfactors, at low production costs by wafer-level fabrication. In this work, an encapsulated RF-MEMS switch for mm-wave and sub-THz frequencies has been monolithically integrated into the AlCu-based Back-End-Of-Line (BEOL) of a 130 nm SiGe BiCMOS technology of IHP by modifications in the standard process flow and device design. The changes of the standard flow are detailed. Finally, a fully functional encapsulated RF-MEMS switch in a BiCMOS process is demonstrated.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116027780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Titanium isotropic and anisotropic etching for MEMS applications 钛各向同性和各向异性刻蚀在MEMS中的应用
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568501
R. Ettouri, T. Tillocher, P. Lefaucheux, B. Boutaud, J. Phung, H. Philippe, R. Dussart
{"title":"Titanium isotropic and anisotropic etching for MEMS applications","authors":"R. Ettouri, T. Tillocher, P. Lefaucheux, B. Boutaud, J. Phung, H. Philippe, R. Dussart","doi":"10.1109/dtip54218.2021.9568501","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568501","url":null,"abstract":"Titanium (Ti) exhibits several advantages for the fabrication of biomedical microelectromechanical systems (bio-MEMS), due to its remarkable properties such as good corrosion resistance and biocompatibility. Recent advances in titanium micromachining have made it possible to create such microsystems. Motivated by this opportunity, in this paper we present our efforts to advance Ti MEMS technology through a novel fluorine-based reactive ion etching (RIE) process. Bulk Ti was etched in an inductively coupled plasma using a mixture of sulfur hexafluoride, oxygen, and argon. The RIE process parameters, such as reactive gas flow ratios, total gas flow rate and self-bias voltage, were carefully studied and optimized to achieve fast etch rates for creating titanium trenches of different width. The obtained etching characteristics can be interpreted in terms of competitive effects between simultaneous etching and oxidation of the Ti surface by atomic F and O, respectively.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132283746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3 基于Ni柱阵列的LiNBO3表面声子晶体模式(SPnC)的温度敏感性
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568671
A. Talbi, Ghizlaine Boussatour, A. Mazzamurro, Cecile Ghouila Houri, O. Boumatar, P. Pernod
{"title":"Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3","authors":"A. Talbi, Ghizlaine Boussatour, A. Mazzamurro, Cecile Ghouila Houri, O. Boumatar, P. Pernod","doi":"10.1109/dtip54218.2021.9568671","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568671","url":null,"abstract":"This work focuses on the theoretical and experimental investigation of acoustic waves sensors based on 2D Surface Phononic Crystals (PnC). We investigated the temperature coefficient of frequency (TCF) for surface localized modes in 2D PnCs composed of Ni pillars deposited on Y-cut LiNBO3 substrate. We demonstrated both theoretically and experimentally that near the first limit of the Brillouin zone, the surface acoustic wave's temperature sensitivity depends considerably on pillars stiffness temperature constants, theirs resonance modes and lattice symmetry of the PnC.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117031171","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mechanical characterization of bulk-micromachined Ti membranes by microbending and by vibrometry 用微弯曲和振动法表征大块微加工钛膜的力学特性
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568677
G. Bécan, A. Bosseboeuf, J. Phung, H. Philippe, B. Boutaud, M. Woytasik, P. Coste, E. Lefeuvre
{"title":"Mechanical characterization of bulk-micromachined Ti membranes by microbending and by vibrometry","authors":"G. Bécan, A. Bosseboeuf, J. Phung, H. Philippe, B. Boutaud, M. Woytasik, P. Coste, E. Lefeuvre","doi":"10.1109/dtip54218.2021.9568677","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568677","url":null,"abstract":"This paper presents the mechanical characterization of membranes micromachined in bulk-titanium wafers, which can be future parts of various Ti-based MEMS such as pressure sensors or microvalves for corrosive environment. One membrane was characterized by microbending using a mechanical microprobe. Two membranes were characterized by vibrometry using microscopic interferometry, and the residual mechanical stress could be derived from these measurements. These are key experiments for successful design of future Ti-based MEMS.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128382828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and Simulation of an Electrostatic Energy Harvester for Biomedical Implants 生物医学植入物静电能量采集器的设计与仿真
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568675
F. Ambía, Jhordan Chavez, M. Lallart, X. Leroux, É. Lefeuvre
{"title":"Design and Simulation of an Electrostatic Energy Harvester for Biomedical Implants","authors":"F. Ambía, Jhordan Chavez, M. Lallart, X. Leroux, É. Lefeuvre","doi":"10.1109/dtip54218.2021.9568675","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568675","url":null,"abstract":"This paper presents the design of an electrostatic MEMS energy harvester for medical implant application. It examines solutions for constraining the motion of the mobile part in one direction and proposes an innovative spring architecture. Indeed, constraining the mobile part motion is essential to avoid undesired contact between comb electrodes. It is particularly important in environments in which mechanical vibrations result from complex combination of rotations and translations. The objective of the considered device is to power the next generation of leadless pacemakers using mechanical energy generated by heartbeat motion. Such solution would dramatically increase the lifetime of implants and would be very beneficial for the patients by reducing the number of replacement surgical operations. Numerical simulations based on analytical modelling and acceleration signal mimicking heartbeat motion enabled to analyze the system response in various condition, showing the interest and benefits of the proposed approach.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"2008 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128861143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Comparative study of perforated microcantilevers for MEMS applications 用于MEMS应用的多孔微悬臂梁的比较研究
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568667
Soumya Purohit, P. Pal, A. Pandey
{"title":"Comparative study of perforated microcantilevers for MEMS applications","authors":"Soumya Purohit, P. Pal, A. Pandey","doi":"10.1109/dtip54218.2021.9568667","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568667","url":null,"abstract":"In this paper, the circular, square and hexagonal perforations of size 2.5 µm-14.5 µm are considered and compared with a simple rectangular beam. Structural and coupled structural-electrostatic analyses are performed using COMSOL Metaphysics to obtain the results. As the perforation size increases, both resonance frequency and static deflection of the beam increase and the pull-in voltage decrease. Among all the proposed designs, design with hexagonal perforation has the highest resonance frequency of 34.5 kHz. Static deflection is found to be greater in beams with circular perforations. Beam with square perforations has the lowest pull-in voltage of 3.84 V.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124934652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Developing MEMS Electric Current Sensors for End-use Monitoring of Power Supply: Part XI - A Nonlinear Error Correction Scheme 用于终端监控电源的MEMS电流传感器的开发:第11部分-非线性误差校正方案
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568663
Ming–ming Lv, Dong F. Wang, T. Itoh, R. Maeda
{"title":"Developing MEMS Electric Current Sensors for End-use Monitoring of Power Supply: Part XI - A Nonlinear Error Correction Scheme","authors":"Ming–ming Lv, Dong F. Wang, T. Itoh, R. Maeda","doi":"10.1109/dtip54218.2021.9568663","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568663","url":null,"abstract":"Cantilever current sensors (CCS) have received increasing attention recently because of a passive sensing signal correlating to a linear detecting one. When a two-wire appliance is energized however, the distance between the cantilever and the two-wire appliance will become a time variable, which will undermine the above linear relationship. As a result, a nonlinear error is generated, and the measurement accuracy is thus decreased. The larger the amplitude of the cantilever is, the greater the nonlinear error is. In this study, a nonlinear error correction scheme is proposed for the first time without decreasing the sensitivity. Since the nonlinear error can be decreased by increasing the initial distance, while the sensitivity of the cantilever current sensor (CCS) is also decreased. Therefore, it is necessary to compensate for the decrease in the sensitivity by increasing the magnetic induction intensity of the magnet located on the cantilever. When the magnetic induction intensity is increased by 3 times, the initial distance can be increased from 3.5 mm to 5.5mm while maintaining the same sensitivity, and the nonlinear error is decreased from 47% to 32%. The proposed correction scheme is proven to be valid for decreasing the nonlinearity error while maintaining the sensitivity.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127825141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements 具有电测量的MEMS陀螺仪中电气和机械耦合的表征
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568500
Margot Morlans, J. Guerard, J. Juillard
{"title":"Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements","authors":"Margot Morlans, J. Guerard, J. Juillard","doi":"10.1109/dtip54218.2021.9568500","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568500","url":null,"abstract":"We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133031447","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimization of the Electrical Excitation for a Bionically Inspired Fluid-Actuator 仿生激励流体作动器的电激励优化
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568497
Robert Annuth, Wolfgang Hölzl, Gabriele Bosetti, G. Schrag
{"title":"Optimization of the Electrical Excitation for a Bionically Inspired Fluid-Actuator","authors":"Robert Annuth, Wolfgang Hölzl, Gabriele Bosetti, G. Schrag","doi":"10.1109/dtip54218.2021.9568497","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568497","url":null,"abstract":"We investigate a micromechanical bending actuator that generates a fluid flow through piezoelectric excitation of segmented electrodes. The bio-inspired structure is supposed to wave like the caudal fin of fish (the so-called undulatory movement), as the movement pattern enables a high degree of efficiency. We have developed a method to optimize the electrical stimulation of the actuator and thus evoke undulatory movement. As a result, we can describe the relationship between electrical stimulation and the resulting movement of the structure. We successfully validated the results of this approach by laser interferometry measurements.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126645355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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