Developing MEMS Electric Current Sensors for End-use Monitoring of Power Supply: Part XI - A Nonlinear Error Correction Scheme

Ming–ming Lv, Dong F. Wang, T. Itoh, R. Maeda
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Abstract

Cantilever current sensors (CCS) have received increasing attention recently because of a passive sensing signal correlating to a linear detecting one. When a two-wire appliance is energized however, the distance between the cantilever and the two-wire appliance will become a time variable, which will undermine the above linear relationship. As a result, a nonlinear error is generated, and the measurement accuracy is thus decreased. The larger the amplitude of the cantilever is, the greater the nonlinear error is. In this study, a nonlinear error correction scheme is proposed for the first time without decreasing the sensitivity. Since the nonlinear error can be decreased by increasing the initial distance, while the sensitivity of the cantilever current sensor (CCS) is also decreased. Therefore, it is necessary to compensate for the decrease in the sensitivity by increasing the magnetic induction intensity of the magnet located on the cantilever. When the magnetic induction intensity is increased by 3 times, the initial distance can be increased from 3.5 mm to 5.5mm while maintaining the same sensitivity, and the nonlinear error is decreased from 47% to 32%. The proposed correction scheme is proven to be valid for decreasing the nonlinearity error while maintaining the sensitivity.
用于终端监控电源的MEMS电流传感器的开发:第11部分-非线性误差校正方案
悬臂电流传感器(CCS)是一种与线性检测信号相关联的被动传感信号,近年来受到越来越多的关注。然而,当双线器具通电时,悬臂与双线器具之间的距离将成为一个时间变量,这将破坏上述线性关系。结果产生了非线性误差,降低了测量精度。悬臂梁幅值越大,非线性误差越大。本文首次提出了一种不降低灵敏度的非线性误差校正方案。由于增加初始距离可以减小非线性误差,同时也降低了悬臂式电流传感器的灵敏度。因此,有必要通过增加位于悬臂上的磁体的磁感应强度来补偿灵敏度的降低。当磁感应强度增加3倍时,在保持灵敏度不变的情况下,可将初始距离从3.5 mm增加到5.5mm,非线性误差从47%降低到32%。结果表明,该修正方案在保持灵敏度的同时减小了非线性误差。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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