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2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)最新文献

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COMPENSATION OF PERTURBATIVE EFFECTS ON A THRUST MEASUREMENT MEMS PROBE FOR ELECTRIC PROPULSION 电推进推力测量mems探头微扰效应补偿
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568665
Séverin Astruc, P. Elias, R. Lévy
{"title":"COMPENSATION OF PERTURBATIVE EFFECTS ON A THRUST MEASUREMENT MEMS PROBE FOR ELECTRIC PROPULSION","authors":"Séverin Astruc, P. Elias, R. Lévy","doi":"10.1109/dtip54218.2021.9568665","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568665","url":null,"abstract":"A quartz force sensor is being developed to measure the thrust of an electron cyclotron resonance (ECR) plasma thruster. This microelectromechanical system (MEMS) is immersed in the plasma jet produced by the thruster. At this location, it is subject to thermal heating, ion sputtering, and electrostatic charging effects. It also creates a Debye sheath that can change the thrust measurement. These perturbations cause a drift in the force measurement. Using a Finite-Element modeling of the MEMS probe, several sensor designs have been simulated in order to test different methods for reducing the thermal thrust drift. The use of an additional electrode on the sensor can reduce the effect of temperature gradient across the sensor by an order of magnitude. Moreover, a quartz temperature sensor enable to compensate the offset. Numerical simulations show that the thrust drift is reduced by 50% with this method.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"22 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132531136","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of a Mechanical Contact Type RF-MEMS Switch for VHF Band Applications 一种用于甚高频波段的机械接触式RF-MEMS开关的研究
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568686
Mounira Bengashier, I. Grech, O. Casha, R. Farrugia, Barnaby Portelli
{"title":"Investigation of a Mechanical Contact Type RF-MEMS Switch for VHF Band Applications","authors":"Mounira Bengashier, I. Grech, O. Casha, R. Farrugia, Barnaby Portelli","doi":"10.1109/dtip54218.2021.9568686","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568686","url":null,"abstract":"This paper presents an investigation of a mechanical contact type RF-MEMS switch for VHF band applications. Different contact electrostatically actuated switches were analytically studied and simulated using CoventorWare FEM software. The switches were optimized for different parameters depending on the design geometry and the number of the actuator comb fingers. This work is an extension to the development of tuneable piezoelectric BAW resonators with the aim of achieving cost-effective tuneability over a wide frequency range based on a switchable array of these resonators. Thus, the switches were fabricated on the same PiezoMUMPs process as the resonators. Both two-state and three-state switches were investigated. In the case of the two-state switch, the simulated and experimental values of the actuation (pull-in) voltage were found to be 14 V and 17 V respectively.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127870049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators AlN压电四致动器2轴倾斜微扫描仪的准静态操作
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568679
D. Hah
{"title":"Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators","authors":"D. Hah","doi":"10.1109/dtip54218.2021.9568679","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568679","url":null,"abstract":"Aluminum nitride (AlN) started to draw attentions as a material for piezoelectric actuation owing to its CMOS process compatibility and safeness for biomedical applications. Due to its relatively low piezoelectric coefficients, AlN-based piezoelectric actuators have been mostly operated in resonance modes, especially in optical scanning. This paper presents a novel design of a 2-axis-tilt microscanner with AlN piezoelectric quad-actuators and meander-shaped hinges for reasonable quasi-static operation. Through finite-element-method simulation, it is shown that the proposed device can have about 9 degree of optical scan angle in two dimensions with the voltage amplitude of 50 V. Lissajous scanning operation of the device is demonstrated as well via simulation.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115617305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Facile Way of Surface Texturing of Si{100} using KOH for Silicon Solar Cells 硅太阳能电池用KOH表面织构硅{100}的简便方法
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568684
A. Gupta, P. Pal, C. Sharma
{"title":"A Facile Way of Surface Texturing of Si{100} using KOH for Silicon Solar Cells","authors":"A. Gupta, P. Pal, C. Sharma","doi":"10.1109/dtip54218.2021.9568684","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568684","url":null,"abstract":"Wet etching of Si{100} in an alkaline solution result in pyramidal structures, mostly bounded by four {111} planes. Such geometrical structures work as excellent light trapping structures and potentially help in the efficiency increment of solar cells. In this work, the effect of very low concentration potassium hydroxide (KOH) on the etched surface morphology of Si{100} is systematically studied. KOH concentration is varied from 1.0 to 0.1 wt% KOH in a step of 0.5 wt% to investigate the effect of etching concentration. Wet etching is carried at a fixed temperature of 70°C for 5 to 40 min of etching time. Samples are taken for investigation after every 5 minutes of interval. The lowest reflectance of around 12 % is measured on the samples textured in 0.5 wt% KOH for 10 min.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125932514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Use of epitaxial PZT thin films for La2/3Sr1/3MnO3based MEMs devices on SrTiO3/Si 基于SrTiO3/Si的la2 / 3sr1 / 3mno3 MEMs器件外延PZT薄膜的应用
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568662
Laryssa Mirelly Carvalho De Araujo, J. J. Manguele, B. Vilquin, Zhe Wang, C. Adamo, P. R. Romeo, C. Cibert, G. Poullain, B. Domengès, V. Pierron, D. Schlom, L. Méchin
{"title":"Use of epitaxial PZT thin films for La2/3Sr1/3MnO3based MEMs devices on SrTiO3/Si","authors":"Laryssa Mirelly Carvalho De Araujo, J. J. Manguele, B. Vilquin, Zhe Wang, C. Adamo, P. R. Romeo, C. Cibert, G. Poullain, B. Domengès, V. Pierron, D. Schlom, L. Méchin","doi":"10.1109/dtip54218.2021.9568662","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568662","url":null,"abstract":"Lead zirconate titanate Pb(Zr,Ti)O3 (PZT) is a well know ferroelectric material with excellent piezoelectric properties, namely large piezoelectric coefficients, low leakage current and reliable performance, which makes it very suitable as an actuator material in Micro-ElectroMechanical Systems (MEMS). The performance of piezoelectric MEMS is, however, strongly dependent on the film quality. In the present work, the epitaxial growth of PZT is desired as it can help to reduce high-frequency losses, to allow for larger electromechanical coupling and to increase the final device sensitivity. We used an epitaxially grown conductive oxide bottom electrode, namely 45 nm thick La2/3Sr1/3MnO3 (LSMO) films, deposited on SrTiO3 buffered (001) silicon substrates using a combination of pulsed laser deposition and reactive molecular beam epitaxy techniques. The 500 nm thick c-axis oriented PZT layers were deposited at 600°C by magnetron sputtering on the LSMO films on STO/Si (001). The piezoelectric and ferroelectric properties of the PZT layers were studied by PiezoForce Microscopy on as-grown PZT films and Polarization versus Electric field measurements on samples covered with Pt top electrodes. The PZT films exhibited good piezoelectric and ferroelectric properties with a remanent polarization higher than 20 µC·cm−2, which makes them suitable for the fabrication of piezoelectric MEMS based on doubly-clamped LSMO suspended structures.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122030700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Gyroscope-Free UAV Navigation 无陀螺仪无人机导航
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568680
Hamad Alzaabi, I. Elfadel
{"title":"Gyroscope-Free UAV Navigation","authors":"Hamad Alzaabi, I. Elfadel","doi":"10.1109/dtip54218.2021.9568680","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568680","url":null,"abstract":"In this paper, it is shown that a simple geometric constraint on the sensor location of a MEMS accelerometer array in a strapdown, gyroscope-free inertial navigation system leads to a new method for computing the angular velocities of the moving body. The new method consists in decoupling the computation of linear acceleration from that of angular velocities and in deriving generic angular velocity formulas that are valid for arbitrary sensor array configurations under very mild geometric constraints on sensor placement. In particular, it is shown that the determination of angular velocities requires at least a set of four triaxial accelerometers that are not co-planar and whose barycenter coincides with the center of mass of the moving body.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134374474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro thermal anemometer (µTA) for turbulence measurement: development, fabrication and characterization 微热风速计(µTA)湍流测量:开发，制造和表征
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568498
Baptiste Baradel, O. Léon, A. Giani, P. Combette, F. Méry
{"title":"Micro thermal anemometer (µTA) for turbulence measurement: development, fabrication and characterization","authors":"Baptiste Baradel, O. Léon, A. Giani, P. Combette, F. Méry","doi":"10.1109/dtip54218.2021.9568498","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568498","url":null,"abstract":"The present work provides details on the fabrication and the characterization of a micro thermal anemometer for measuring velocity fluctuations in turbulent flows. This device is based on a freestanding thin platinum wire of 60 µm × 0.2 µm × 1.5 µm acting as sensing element, placed in the middle of a 900 µm length bridge and supported by a silicon structure. A discussion is provided on the designing steps and the manufacturing process relying on micro fabrication techniques. A series of flow velocity measurements was conducted in a turbulent boundary layer to evaluate the response of this sensor. The results are discussed and compared with conventional hot wire anemometry measurements and semi-empirical models to highlight the relevance of this new sensor for turbulence studies.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132256990","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of a bio-inspired angular acceleration sensor : towards the non-invasive investigation of inner ear pathologies 生物启发角加速度传感器的发展:对内耳病理的非侵入性调查
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568668
E. Puyoo, Alice Vieren, L. Roiban, L. Grémillard, E. Ionescu
{"title":"Development of a bio-inspired angular acceleration sensor : towards the non-invasive investigation of inner ear pathologies","authors":"E. Puyoo, Alice Vieren, L. Roiban, L. Grémillard, E. Ionescu","doi":"10.1109/dtip54218.2021.9568668","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568668","url":null,"abstract":"In this paper, we introduce the development of a bio-inspired system that mimics the angular acceleration sensor function provided by the vestibular system. The prototype is made of a Plexiglas piece that presents the pattern of a semicircular canal at scale 10, with a simplified geometry. A flexible piezoresistive cantilever integrated on polyimide substrate is used to model the electro-mechanical transduction of the cupula/hair cells system. The electro-mechanical response of the complete system is analyzed when submitted to both pulse and sine rotational excitations. It is demonstrated that the biomimetic system only responds to one rotational axis, and is also sensitive to the rotational direction. We also validate that the prototype actually responds to the expected medium vestibular frequencies (from 0.16Hz to 0.64Hz).","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116858224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Miniaturized Soft Transformable Swimmer for Evironmentally Friendly and Sustainable Fluidic Carrier 用于环保和可持续流体载体的微型软变形游泳器
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568678
G. Hwang, Beomjoon Kim, Atsushi Toyokura, Y. Mita, Akio Higo
{"title":"Miniaturized Soft Transformable Swimmer for Evironmentally Friendly and Sustainable Fluidic Carrier","authors":"G. Hwang, Beomjoon Kim, Atsushi Toyokura, Y. Mita, Akio Higo","doi":"10.1109/dtip54218.2021.9568678","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568678","url":null,"abstract":"We developed a magnetically actuated soft transformable microswimmer for an environmentally friendly and sustainable fluidic handling. They are made of the composite mixture of magnetic micro particles and soft UV curable resin. The custom developed manufacturing system allows to program the local magnetizations of each fractional areas with UV light exposure for both the bending motion by magnetic field and the surface microstructuring to minimize surface stiction. The manufacturable device scale ranges from the smallest of 38S×702 µm2 to the largest 2.0×5.5 mm2. We demonstrated successful liquid sample handling between droplets or hydrogel substrates showing a great potential to serve as a fluidic carrier for biochemical sample analysis or drug delivery.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129444224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Design and Characterisation of Microfluidic Channels Fabricated using Additive Manufacturing Techniques 采用增材制造技术制备的微流体通道的设计与表征
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI: 10.1109/dtip54218.2021.9568670
Gianluca Baldacchino, I. Grech, R. Farrugia, O. Casha
{"title":"Design and Characterisation of Microfluidic Channels Fabricated using Additive Manufacturing Techniques","authors":"Gianluca Baldacchino, I. Grech, R. Farrugia, O. Casha","doi":"10.1109/dtip54218.2021.9568670","DOIUrl":"https://doi.org/10.1109/dtip54218.2021.9568670","url":null,"abstract":"An in-depth investigation on the technical feasibility of developing a range of microfluidic platforms, using a low-cost, LCD-based Stereolithography Apparatus (SLA) 3D printer, is presented. The 3D printed microfluidic platforms are based on a unibody design consisting of open-top tape-capped channels, with either semi-circular or rectangular cross-sectional geometries defined by sub-millimeter dimensions. Microfluidic channel designs for micro-mixer applications were successfully printed with a minimum feature size of 500 µm. The microfluidic platforms were characterised using pressure-flow rate measurements and optical profilometery. Experimental results have been compared to analytical calculations and validated Computational Fluid Dynamics (CFD) simulation results. Tolerances in the results were observed due to material deformation such as shrinkage during printing, surface roughness, and 3D printer limitations such as layer height and xy-axis resolution.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121397208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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