A. Talbi, Ghizlaine Boussatour, A. Mazzamurro, Cecile Ghouila Houri, O. Boumatar, P. Pernod
{"title":"Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3","authors":"A. Talbi, Ghizlaine Boussatour, A. Mazzamurro, Cecile Ghouila Houri, O. Boumatar, P. Pernod","doi":"10.1109/dtip54218.2021.9568671","DOIUrl":null,"url":null,"abstract":"This work focuses on the theoretical and experimental investigation of acoustic waves sensors based on 2D Surface Phononic Crystals (PnC). We investigated the temperature coefficient of frequency (TCF) for surface localized modes in 2D PnCs composed of Ni pillars deposited on Y-cut LiNBO3 substrate. We demonstrated both theoretically and experimentally that near the first limit of the Brillouin zone, the surface acoustic wave's temperature sensitivity depends considerably on pillars stiffness temperature constants, theirs resonance modes and lattice symmetry of the PnC.","PeriodicalId":173313,"journal":{"name":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/dtip54218.2021.9568671","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This work focuses on the theoretical and experimental investigation of acoustic waves sensors based on 2D Surface Phononic Crystals (PnC). We investigated the temperature coefficient of frequency (TCF) for surface localized modes in 2D PnCs composed of Ni pillars deposited on Y-cut LiNBO3 substrate. We demonstrated both theoretically and experimentally that near the first limit of the Brillouin zone, the surface acoustic wave's temperature sensitivity depends considerably on pillars stiffness temperature constants, theirs resonance modes and lattice symmetry of the PnC.