具有电测量的MEMS陀螺仪中电气和机械耦合的表征

2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Pub Date : 2021-08-25 DOI:10.1109/dtip54218.2021.9568500

Margot Morlans, J. Guerard, J. Juillard

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引用次数: 0

摘要

我们提出了一种直观的方法来表征弱耦合谐振器中的寄生耦合。本文的研究重点是MEMS陀螺仪，这是耦合谐振器的一个例子。了解电气和机械耦合的值将允许我们以电子方式取消它们，从而减少陀螺仪测量的偏置不稳定性。

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Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements

We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.

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2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)

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