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2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Impact of Parasitics on the Settling Time of a Readout Circuit for High Performance MEMS Accelerometers 寄生对高性能MEMS加速度计读出电路稳定时间的影响
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739750
Alice Lanniel, Tobias Boeser, Lena Aichholz, T. Alpert, M. Ortmanns
{"title":"Impact of Parasitics on the Settling Time of a Readout Circuit for High Performance MEMS Accelerometers","authors":"Alice Lanniel, Tobias Boeser, Lena Aichholz, T. Alpert, M. Ortmanns","doi":"10.1109/ISISS.2019.8739750","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739750","url":null,"abstract":"This work analyses the impact of parasitic capacitances and resistances of MEMS sensors on the settling time of their readout circuit. The type of sensor considered is the capacitive sensing and the readout circuit is realised as a switched-capacitor circuit. The frontend is first represented as a low pass filter and then the simulations are performed on transistor level. The results are also verified analytically and with measurements. This work demonstrates that besides the overall capacitance and resistance of the frontend, also the parasitics of the MEMS accelerometer have an important impact on the settling. Furthermore, it is shown that the simplified model of the frontend and the MEMS are quite accurate regarding settling time evaluation enabling a faster verification.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127274382","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
[Front matter] (前页)
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/isiss.2019.8739682
{"title":"[Front matter]","authors":"","doi":"10.1109/isiss.2019.8739682","DOIUrl":"https://doi.org/10.1109/isiss.2019.8739682","url":null,"abstract":"","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126657099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Study of A Novel Second-order Stress Isolation for Silicon Resonator Applied on MEMS Sensor 应用于MEMS传感器的新型硅谐振腔二阶应力隔离的研究
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739408
Jing Zhang, Yagang Wang, Yudong Liu, Chen Lin, Z. Yao, Yan Su, Peiwen Xu
{"title":"The Study of A Novel Second-order Stress Isolation for Silicon Resonator Applied on MEMS Sensor","authors":"Jing Zhang, Yagang Wang, Yudong Liu, Chen Lin, Z. Yao, Yan Su, Peiwen Xu","doi":"10.1109/ISISS.2019.8739408","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739408","url":null,"abstract":"This paper studied the stress distribution and resonant frequency variation of the Micro Electro Mechanical System (MEMS) resonator when temperature varies. To address this problem, a novel second-order stress isolation frame had been proposed. By finite element analysis and the tests of three kind of prototypes, it was verified that the second-order stress isolation frame showed a good adaptability of the ambient temperature, and its temperature coefficient of frequency (TCf) was reduced from -1011ppm/°C to -99.5 ppm/°C. However, this kind of frame damaged the sensitivity of device to a certain extent.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126531471","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Demonstration of a Robust Hybrid Classical/Quantum Accelerometer 一种鲁棒混合经典/量子加速度计的演示
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739762
P. Cheiney, B. Barrett, S. Templier, Olivier Jolly, B. Battelier, P. Bouyer, H. Porte, F. Napolitano
{"title":"Demonstration of a Robust Hybrid Classical/Quantum Accelerometer","authors":"P. Cheiney, B. Barrett, S. Templier, Olivier Jolly, B. Battelier, P. Bouyer, H. Porte, F. Napolitano","doi":"10.1109/ISISS.2019.8739762","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739762","url":null,"abstract":"We present a hybrid accelerometer that combines the large bandwidth and dynamic range of a mechanical accelerometer with the extreme stability of a quantum accelerometer based on cold atom interferometry. We describe our experimental setup and hybridization algorithm and, to assess the performances of the apparatus, we simulate a mobile environment in the laboratory by adding simultaneously vibration noise, temperature variations and laser intensity fluctuations. Even under these conditions, we are able to track the accelerometer bias to less than $1 mu mathrm{g}$. In a normal laboratory environment, our hybrid accelerometer then reaches a precision of 10 ng after 11 hours of integration. Finally, we present a novel system that compensates in real-time phase shifts due to vibrations and Doppler shifts that occur when changing the AI orientation. This allows us to operate optimally the atom interferometer in an arbitrary direction, opening the way toward truly mobile operation.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"156 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121397798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Amplitude Amplified Dual-Mass Gyroscope: Design Architecture and Noise Mitigation Strategies 振幅放大双质量陀螺仪:设计架构和降噪策略
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739620
Danmeng Wang, A. Efimovskaya, A. Shkel
{"title":"Amplitude Amplified Dual-Mass Gyroscope: Design Architecture and Noise Mitigation Strategies","authors":"Danmeng Wang, A. Efimovskaya, A. Shkel","doi":"10.1109/ISISS.2019.8739620","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739620","url":null,"abstract":"This paper presents our latest test results of an amplitude amplified dual-mass MEMS gyroscope. We discuss the effects of quadrature errors, parasitic capacitance, and frontend components on gyroscope's performance. Three mitigation strategies were utilized, including (1) precision electrostatic frequency tuning to reduce quadrature errors and to compensate for imperfections; (2) increased sensing capacitance to boost Signal-to-Noise Ratio (SNR); (3) a custom low-noise front-end electronics with balanced and differential pick-off channels to improve SNR and reduce noise. A performance of 0.09 deg/hr in-run bias stability and 0.0096 deg/rt-hr Angle Random Walk (ARW) were reported in the paper.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113964440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Study on Mounting Position of IMU for Better Accuracy of ZUPT-Aided Pedestrian Inertial Navigation 提高zupt辅助行人惯性导航精度的IMU安装位置研究
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739708
Yusheng Wang, Sina Askari, A. Shkel
{"title":"Study on Mounting Position of IMU for Better Accuracy of ZUPT-Aided Pedestrian Inertial Navigation","authors":"Yusheng Wang, Sina Askari, A. Shkel","doi":"10.1109/ISISS.2019.8739708","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739708","url":null,"abstract":"We present a study on the effect of mounting position of IMU to a foot on the navigation accuracy of ZUPT-aided pedestrian inertial navigation. In this study, we compared two IMU mounting positions, forefoot and heel, in terms of the length of the stance phase, velocity uncertainty, and the shock level during the stance phase. Circular Error Probable (CEP) of localization was experimentally demonstrated to be reduced by about 50%, when mounting the IMU on the forefoot rather than behind the heel. The conclusion was demonstrated by investigating different walking paces, types of floors (hard floor, grass lawn, and sand), trajectories (upstairs and downstairs), and gait patterns produced by different persons. To the best of our knowledge, this study is the first attempt to investigate the velocity uncertainty during the stance phase in pedestrian navigation, a critical characteristic of ZUPT-aided algorithms.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"89 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123137984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 26
A Laboratory Testbed for Self-Contained Navigation 独立导航的实验室试验台
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739646
Sina Askari, Chi-Shih Jao, Yusheng Wang, A. Shkel
{"title":"A Laboratory Testbed for Self-Contained Navigation","authors":"Sina Askari, Chi-Shih Jao, Yusheng Wang, A. Shkel","doi":"10.1109/ISISS.2019.8739646","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739646","url":null,"abstract":"Presented a customizable laboratory testbed for the sensor fusion of multiple Inertial Measurement Units (IMU) and SOund Navigation And Ranging sensors (SONAR), for self-contained navigation experiments. We described the architecture and communication interfaces for the simultaneous collection of data from two IMUs and two SONARs, however, parallel acquisition from a larger variety of sensors is also feasible. Representative human gait patterns are experimentally acquired to demonstrate the functionality of the testbed.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124450195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam 四质量陀螺仪与16 ppm的频率不匹配的焦点离子束修剪
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739610
Jianlin Chen, T. Tsukamoto, Shuji Tanaka
{"title":"Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam","authors":"Jianlin Chen, T. Tsukamoto, Shuji Tanaka","doi":"10.1109/ISISS.2019.8739610","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739610","url":null,"abstract":"This paper reports a frequency trimming method of a quad-mass MEMS gyroscope using focus ion beam (FIB). A quad-mass gyroscope (QMG) using the standard SOI MEMS process was developed. The relationship between trimming geometry and resonant frequency was estimated by finite element analysis (FEA) and validated by experiment. The resonant frequency mismatch was initially about 2791 ppm. The proposed trimming method enables to reduce the frequency mismatch as small as 16 ppm with a small change of Q factor.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130894647","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Tackling SDM Feedback Coefficient Modulation in Area Optimized Frontend Readout Circuit for High Performance MEMS Accelerometers 高性能MEMS加速度计面积优化前端读出电路中SDM反馈系数调制的研究
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739683
Alice Lanniel, Tobias Boeser, T. Alpert, M. Ortmanns
{"title":"Tackling SDM Feedback Coefficient Modulation in Area Optimized Frontend Readout Circuit for High Performance MEMS Accelerometers","authors":"Alice Lanniel, Tobias Boeser, T. Alpert, M. Ortmanns","doi":"10.1109/ISISS.2019.8739683","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739683","url":null,"abstract":"This work evaluates a switched capacitor frontend readout circuit for high performance MEMS accelerometers composed of a sigma-delta modulator. It presents the importance of random chopping for EMC purposes and the problems attached to it in the case of a pseudo-differential sigma-delta modulator. For example, it shows with simulation on verilog models that the noise floor is raised and that there is a loss of signal information. Moreover, the choppers in the feedback loop of the sigma-delta modulator create intermodulation between the bitstream and the dummy sensor causing distortions. Finally, it shows several possible solutions.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"124 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127346677","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Characterization of Energy Dissipation Mechanisms in Dual Foucault Pendulum Gyroscopes 双傅科摆陀螺仪能量耗散机制的表征
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739650
M. Asadian, Sina Askari, Yusheng Wang, A. Shkel
{"title":"Characterization of Energy Dissipation Mechanisms in Dual Foucault Pendulum Gyroscopes","authors":"M. Asadian, Sina Askari, Yusheng Wang, A. Shkel","doi":"10.1109/ISISS.2019.8739650","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739650","url":null,"abstract":"In this paper, the primary energy dissipation mechanisms in a dynamically balanced Dual Foucault Pendulum (DFP) gyroscope are identified and characterized experimentally. A Q-factor over one million was measured at room temperature on a vacuum packaged mode-ordered DFP, with operational frequency at 15 kHz. The measurement at low temperature, using a cryogenic probe station, made the anchor loss limit of Q-factor observable. A Q-factor of over 9 million was measured at 110K. The unbalanced electrostatic softening due to fabrication imperfection was identified to contribute to the anchor loss.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128526392","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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