{"title":"振幅放大双质量陀螺仪:设计架构和降噪策略","authors":"Danmeng Wang, A. Efimovskaya, A. Shkel","doi":"10.1109/ISISS.2019.8739620","DOIUrl":null,"url":null,"abstract":"This paper presents our latest test results of an amplitude amplified dual-mass MEMS gyroscope. We discuss the effects of quadrature errors, parasitic capacitance, and frontend components on gyroscope's performance. Three mitigation strategies were utilized, including (1) precision electrostatic frequency tuning to reduce quadrature errors and to compensate for imperfections; (2) increased sensing capacitance to boost Signal-to-Noise Ratio (SNR); (3) a custom low-noise front-end electronics with balanced and differential pick-off channels to improve SNR and reduce noise. A performance of 0.09 deg/hr in-run bias stability and 0.0096 deg/rt-hr Angle Random Walk (ARW) were reported in the paper.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Amplitude Amplified Dual-Mass Gyroscope: Design Architecture and Noise Mitigation Strategies\",\"authors\":\"Danmeng Wang, A. Efimovskaya, A. Shkel\",\"doi\":\"10.1109/ISISS.2019.8739620\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents our latest test results of an amplitude amplified dual-mass MEMS gyroscope. We discuss the effects of quadrature errors, parasitic capacitance, and frontend components on gyroscope's performance. Three mitigation strategies were utilized, including (1) precision electrostatic frequency tuning to reduce quadrature errors and to compensate for imperfections; (2) increased sensing capacitance to boost Signal-to-Noise Ratio (SNR); (3) a custom low-noise front-end electronics with balanced and differential pick-off channels to improve SNR and reduce noise. A performance of 0.09 deg/hr in-run bias stability and 0.0096 deg/rt-hr Angle Random Walk (ARW) were reported in the paper.\",\"PeriodicalId\":162724,\"journal\":{\"name\":\"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISISS.2019.8739620\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISISS.2019.8739620","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Amplitude Amplified Dual-Mass Gyroscope: Design Architecture and Noise Mitigation Strategies
This paper presents our latest test results of an amplitude amplified dual-mass MEMS gyroscope. We discuss the effects of quadrature errors, parasitic capacitance, and frontend components on gyroscope's performance. Three mitigation strategies were utilized, including (1) precision electrostatic frequency tuning to reduce quadrature errors and to compensate for imperfections; (2) increased sensing capacitance to boost Signal-to-Noise Ratio (SNR); (3) a custom low-noise front-end electronics with balanced and differential pick-off channels to improve SNR and reduce noise. A performance of 0.09 deg/hr in-run bias stability and 0.0096 deg/rt-hr Angle Random Walk (ARW) were reported in the paper.
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