2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

Digital Closed-loop Fiber Optic Gyroscopes - A Choice for Micro/Nano-Satellites Application 数字闭环光纤陀螺仪-微/纳米卫星应用的选择

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739663

Jing Jin, Jili He, Kun Ma, Linghai Kong

引用次数: 5

Identification-Based Approach for Electrical Coupling Compensation in a MEMS Gyroscope 基于辨识的MEMS陀螺仪电耦合补偿方法

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739573

Kévin Colin, Fabrício Saggin, C. Blanc, X. Bombois, A. Korniienko, G. Scorletti

引用次数: 2

Self-Induced Parametric Amplification in the Disk Resonant Gyroscope 圆盘谐振陀螺仪的自激参量放大

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739314

K. Moran, K. Stanzione, A. Sabater, Taneka Lewis, V. Bădescu, Andrew Wang

引用次数: 1

Laser Self-Mixing Interferometry for Precision Displacement Measurement in Resonant Gyroscopes 激光自混频干涉法用于谐振陀螺仪的精密位移测量

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739659

G. He, R. Gordenker, J. Woo, J. Nees, B. Shiari, T. Nagourney, J.Y.N. Cho, K. Najafi

{"title":"Laser Self-Mixing Interferometry for Precision Displacement Measurement in Resonant Gyroscopes","authors":"G. He, R. Gordenker, J. Woo, J. Nees, B. Shiari, T. Nagourney, J.Y.N. Cho, K. Najafi","doi":"10.1109/ISISS.2019.8739659","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739659","url":null,"abstract":"Laser self-mixing interferometry (SMI), as an alternative contactless displacement measurement method, has extremely high resolution (pico-meter), large dynamic range and wide bandwidth. Comparing to electrostatic capacitive sensing, its detection accuracy does not depend on the gap size, electrode area, or bias voltage, which are bottlenecks for high-performance vibrating sensors. This paper presents our initial study in measuring vibrations of 3D shell resonators by laser self-mixing interferometry for application in high-performance gyroscopes. Our measurement of vibrations of a shell resonator using a VCSEL shows a noise-equivalent displacement resolution of 329pm with 100Hz bandwidth for resonator vibration amplitudes of less than 100nm, which can be improved down to $pmb{2.2}mathbf{pm}/surdmathbf{Hz}$ using low noise voltage amplifiers. If used with a fused silica shell resonator gyroscope, a rate resolution of 0.45 mdeg/hr with 1Hz bandwidth can be expected. To expand sensor dynamic range, a real-time, high-accuracy phase unwrapping technique is proposed. The scale factor of the SMI can be optimized in real time through mid-fringe point tracking by a positioning actuator.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130348666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Low Power High Bandwidth Acceleration Sensor For Industrial Applications 工业应用低功耗高带宽加速度传感器

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739510

R. Forke, K. Hiller, S. Hahn, S. Weidlich, S. Konietzka, T. Motl, Alexander Praedicow, T. Otto

引用次数: 0

Geometrical and Process Effects on MEMS Dimensional Loss: a Frequency Based Characterization 几何和工艺对MEMS尺寸损耗的影响:基于频率的表征

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739744

G. Gattere, F. Rizzini, L. Corso, A. Alessandri, F. Tripodi, S. Paleari

{"title":"Geometrical and Process Effects on MEMS Dimensional Loss: a Frequency Based Characterization","authors":"G. Gattere, F. Rizzini, L. Corso, A. Alessandri, F. Tripodi, S. Paleari","doi":"10.1109/ISISS.2019.8739744","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739744","url":null,"abstract":"In this paper we describe a methodology to fully characterize the Deep Reactive Ion Etching (DRIE) of Micro-Electro Mechanical (MEM) structures. One of the key aspects of this manufacturing step is the dimensional loss (CDloss) with respect to nominal geometry. For the sake of simplicity, this parameter is commonly considered uniform in the mechanical element design, leading to a series of approximations. In order to better fashion the local response of the etching process on the mechanical elements, a test pattern of resonating structures was implemented. An in plane resonator using folded springs arranged in a “Tang-like” configuration, shielded with different sets of dummy elements was designed. With an extensive experimental campaign, it has been possible to demonstrate a strong correlation between the first natural frequency of the resonator (i.e. CDloss) with the characteristic dimensions of the shielding elements. Moreover, the effect of different etching equipment was analyzed, showing a significant impact and highlighting the need of different mask design customization for each process tool.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121793105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Acousto-Optic Gyroscope with Improved Sensitivity and 100 second Stability in a Small Form Factor 声光陀螺仪具有提高灵敏度和100秒稳定在一个小的形状因素

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739521

A. Mahmoud, L. Cai, J. Bain, T. Mukherjee, G. Piazza

引用次数: 1

Ice-surface Profilometry with Millimeter Vertical Resolution over 10's of Meters Using a MEMS Inclinometer 使用MEMS倾角计，具有毫米垂直分辨率超过10米的冰面轮廓测量

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739749

M. Bremer, T. Richardson, K. Mertins

引用次数: 0

Improved Scale-Factor and Bias Stability of Ovenized Inertial Sensors in an Environmentally-Stabilized Inertial Measurement Unit (eIMU) 环境稳定惯性测量单元(eIMU)中加热惯性传感器尺度因子和偏置稳定性的改进

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739649

D. Lemmerhirt, Onnop Srivannavit, Sam Chen, Tom Litow, J. Mitchell, Philip C. Cooksey, R. Sturdevant, J. Bingham, Orlando Padilla, M. Trevino

{"title":"Improved Scale-Factor and Bias Stability of Ovenized Inertial Sensors in an Environmentally-Stabilized Inertial Measurement Unit (eIMU)","authors":"D. Lemmerhirt, Onnop Srivannavit, Sam Chen, Tom Litow, J. Mitchell, Philip C. Cooksey, R. Sturdevant, J. Bingham, Orlando Padilla, M. Trevino","doi":"10.1109/ISISS.2019.8739649","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739649","url":null,"abstract":"This paper reports on scale-factor and bias stability improvements for a commercial 6-axis inertial measurement unit (IMU) enabled using oven-stabilized “environment-resistant packaging (ERP).” Precise temperature control of the IMU die is accomplished using an in-package isolation substrate with thermal isolation for low-power heating. This substrate also isolates the sensors from system-level mechanical stresses. The resulting ovenized device is known as an Environmentally-Stabilized Inertial Measurement Unit, or eIMU. For the first time., a population of eIMU devices has undergone rigorous third-party testing to quantify the performance of the eIMU compared to the same IMU in its standard manufacturer package. The results indicate a 13–115 x improvement for scale-factor vs temperature and a 6–40 x improvement for bias repeatability vs. temperature for the 3 gyroscopes and 3 accelerometers in the IMU. In addition., the eIMU shows 12–44 percent improvement in bias stability for each of these sensors and up to 19 x improvement in long-term drift.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131400656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Directional Ranging for Enhanced Performance of Aided Pedestrian Inertial Navigation 增强辅助行人惯性导航性能的方向测距

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739685

Yusheng Wang, Sina Askari, Chi-Shih Jao, A. Shkel

引用次数: 15