Identification-Based Approach for Electrical Coupling Compensation in a MEMS Gyroscope

Abstract

This work consists of a new approach to identify and compensate the parasitic electrical coupling between the excitation and the detection circuits of a MEMS gyroscope. Based on multivariable identification and the nonlinear behavior of electrostatic actuators, we propose a systematic and flexible way to model the mechanical modes as well as the parasitic coupling. The electrical coupling model is then used to compensate the parasitic effects of the device. Our main contributions are: (i) no model structure is enforced, so all the dynamics between actuation and detection are considered; and (ii) the multivariable framework allows also identifying the parasitic cross-couplings.