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2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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A Chip-Scale Nanophotonic Optical Gyroscope 芯片级纳米光子光学陀螺仪
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739715
P. Khial, A. White, A. Hajimiri
{"title":"A Chip-Scale Nanophotonic Optical Gyroscope","authors":"P. Khial, A. White, A. Hajimiri","doi":"10.1109/ISISS.2019.8739715","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739715","url":null,"abstract":"This paper presents the first demonstration of a nanophotonic optical gyroscope (NOG) on a silicon-photonic platform. Reciprocal sensitivity enhancement is introduced as an effective method to overcome the limitations of NOGs.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129252114","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Characterization of Scale Factor Nonlinearities in Coriolis Vibratory Gyroscopes 科里奥利振动陀螺仪中尺度因子非线性的表征
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739717
D. Vatanparvar, M. Asadian, Sina Askari, A. Shkel
{"title":"Characterization of Scale Factor Nonlinearities in Coriolis Vibratory Gyroscopes","authors":"D. Vatanparvar, M. Asadian, Sina Askari, A. Shkel","doi":"10.1109/ISISS.2019.8739717","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739717","url":null,"abstract":"In this paper, we studied the mechanisms which contribute to Scale Factor (SF) nonlinearity in Coriolis Vibratory Gyroscopes (CVG) operating in the open-loop angular rate mode. Analytical equations were derived to quantify the effects of electro-mechanical nonlinearities, modal coupling, and nonlinear capacitive sensing on SF. Experimental results with a Dual Foucault Pendulum (DFP) gyroscope are presented and compared to simulated data of the predictive model. In our experiments, we demonstrated that by minimizing the electro-mechanical nonlinearities, the SF error is reduced by 27.7% at the angular rate of 1 Hz. We concluded that modal coupling is the major source of SF nonlinearity. We also concluded that nonlinearity in the capacitive sensing has the lowest contribution to SF nonlinearity, at angular rates up to 1 Hz. Finally, we discussed conditions under which a linear SF can be achieved.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"224 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126172969","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A Novel Resonant Accelerometer Based on Quartz on Silicon (QoS) 一种基于石英硅(QoS)的新型谐振加速度计
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739634
Chao Han, Yulong Zhao, Cun Li
{"title":"A Novel Resonant Accelerometer Based on Quartz on Silicon (QoS)","authors":"Chao Han, Yulong Zhao, Cun Li","doi":"10.1109/ISISS.2019.8739634","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739634","url":null,"abstract":"a novel way to fabricate quartz resonant accelerometer is proposed in this paper, which mainly includes Quartz on Silicon (QoS) technology and Inductively Coupled Plasma (ICP) etching. The QoS method can fabricate ultra-thin quartz wafer on silicon, so that the quartz layer can be easily etched by ICP dry etching for replacing conventional fluoride-based wet etching. Based on the proposed fabrication method, a quartz micro accelerometer with micro-leverage mechanism amplifying the inertial force is designed, simulated and fabricated. A link beam is designed between micro-leverage and DETF to make a single micro-leverage effective in DETF, which can concentrate and distribute stress into two DETF beams for making their axial stress basically same. The simulation sensitivity of the accelerometer is 31.88 Hz/g with the amplification of micro-leverage.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131764308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Design and Performance of Wheel-mounted MEMS IMU for Vehicular Navigation 车载导航轮式MEMS IMU的设计与性能
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739733
O. Mezentsev, J. Collin
{"title":"Design and Performance of Wheel-mounted MEMS IMU for Vehicular Navigation","authors":"O. Mezentsev, J. Collin","doi":"10.1109/ISISS.2019.8739733","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739733","url":null,"abstract":"In modern cars MEMS gyroscopes and accelerometers provide essential measurements for enhancing the stability and control. Both types of sensors have significant noise at low frequencies, limiting the measurement accuracy especially in low dynamic conditions. In addition, uncompensated accelerometer tilt causes large bias to acceleration estimates. For gyroscopes, physical rotation of the sensor can be used to remove the constant part of the gyro errors and reduce low-frequency noise. In ground vehicles such rotation exists conveniently in wheels. When inertial sensors are attached to wheel, both types of sensors provide information on the rotation, gyroscopes naturally and accelerometers via specific force measurement. In addition, as a result of carouseling, accurate wheel heading, roll and pitch estimation can be estimated with high resolution, and the result is nearly bias-free. Combining the wheel orientation to distance traveled via known radius enables classic dead reckoning mechanization (assuming zero slip) and other vehicle dynamics monitoring systems (considering wheel slip as unknown to be solved). In the paper, we provide details of wheel-mounted inertial system hardware and algorithms and show test results for several system configurations and applications. We discuss future system improvements, in particular, system miniaturization and an energy-harvesting development progress for next-generation inertial systems.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116456381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Nonlinear Dynamical System Model for Drive Mode Amplitude Instabilities in MEMS Gyroscopes MEMS陀螺仪驱动模式振幅不稳定性的非线性动力系统模型
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739703
Ulrike Nabholz, M. Curcic, J. Mehner, Peter Degenfeld-Schonburg
{"title":"Nonlinear Dynamical System Model for Drive Mode Amplitude Instabilities in MEMS Gyroscopes","authors":"Ulrike Nabholz, M. Curcic, J. Mehner, Peter Degenfeld-Schonburg","doi":"10.1109/ISISS.2019.8739703","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739703","url":null,"abstract":"The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing, as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical systems (MEMS) became a mature technology, the modelling techniques used for predicting their behaviour expanded from mostly linear approaches to include nonlinear dynamic effects. This leads to an increased understanding of the various nonlinear phenomena that limit the performance of MEMS sensors. In this work, we develop a model of two nonlinearly coupled mechanical modes and employ it to explain measured drive mode instabilities in MEMS gyroscopes. Due to 3:1 internal resonance between the drive mode and a parasitic mode, energy transfer within the conservative system occurs. From measurements of amplitude response curves showing hysteresis effects, we extract all nonlinear system parameters and conclude that the steady-state model needs to be expanded by a transient simulation in order to fully explain the measured system behaviour.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133697221","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Development of a High-G Shock Sensor Based on MEMS Technology for Mass-Market Applications 面向大众市场的基于MEMS技术的高g冲击传感器研制
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739763
Jean Marie Darmanin, A. Tocchio, G. C. Tripoli, P. Pesenti, A. Donadel, A. Granata, Matteo Quartiroli, Paolo Rosingana, S. Facchinetti
{"title":"Development of a High-G Shock Sensor Based on MEMS Technology for Mass-Market Applications","authors":"Jean Marie Darmanin, A. Tocchio, G. C. Tripoli, P. Pesenti, A. Donadel, A. Granata, Matteo Quartiroli, Paolo Rosingana, S. Facchinetti","doi":"10.1109/ISISS.2019.8739763","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739763","url":null,"abstract":"In this paper, the development of a tri-axial high-g shock sensor based on ST ThELMA (Thick Epitaxial Layer for Micro-gyroscopes and Accelerometers) MEMS (Micro Electro-Mechanical Sensors) technology is presented. We provide a comprehensive overview on shock sensing by comparing the current solutions available on the market and in the literature with the proposed design. From an extensive measurement campaign using a first prototype and reference sensors, design guidelines were extracted. These include: required full scale, minimum output data rate, bandwidth range and operation mode, for a dedicated high-g sensor for the mass market. Additionally, we briefly illustrate how this sensor can be coupled with a low-g accelerometer to add value in inertial systems.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133544884","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Evaluation Method for the Absolute Orientation from the Rotation Vector on Mobile Devices 移动设备上基于旋转矢量的绝对方位评估方法
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739713
Nils Büscher, Marcel Stieringer, C. Haubelt
{"title":"Evaluation Method for the Absolute Orientation from the Rotation Vector on Mobile Devices","authors":"Nils Büscher, Marcel Stieringer, C. Haubelt","doi":"10.1109/ISISS.2019.8739713","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739713","url":null,"abstract":"Smartphone applications for indoor navigation or augmented reality play an increasingly important role on mobile devices. However, the accuracy of the inertial sensors on mobile devices is a limiting factor. In this paper, we propose a novel test method to assess the accuracy of the absolute orientation from the Rotation Vector using the time proven bearing method from marine navigation. The test allows every smartphone user to test the Rotation Vector of their device without the need for additional equipment. Additionally, our work considers magnetic effects and user errors and introduces means to mitigate the influences to ensure a reliable test result.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116555111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modulation Methods in Time Division Multiplexing Interferometric Fiber Optic Gyroscopes 时分复用干涉光纤陀螺仪的调制方法
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739274
Jili He, Rui Gan, Ningfang Song
{"title":"Modulation Methods in Time Division Multiplexing Interferometric Fiber Optic Gyroscopes","authors":"Jili He, Rui Gan, Ningfang Song","doi":"10.1109/ISISS.2019.8739274","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739274","url":null,"abstract":"The principle of Time Division Multiplexing (TDM) interferometric fiber optic gyroscopes (IFOGs) is well understood and has been successfully applied to many fields by a number of organizations[1]. In this paper, a TDM configuration structure has been presented. Three modulation methods of TDM IFOGs are investigated in detail, the effects of different modulation methods on fundamental noise, Signal to Noise Ratio (SNR) and Random walk coefficient (RWC) are analyzed, the test results of a prototype are shown. Based on the analysis and experiments, a more effective modulation method for high performance is proposed.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122429884","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Low-Power Frequency-to-Digital-Converter for a 6-Axis MEMS Frequency-Modulated Inertial Measurement Unit 用于6轴MEMS调频惯性测量单元的低功耗频率-数字转换器
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739760
M. Bestetti, M. Leoncini, P. Minotti, C. R. Marra, G. Langfelder, A. Tocchio, S. Facchinetti
{"title":"Low-Power Frequency-to-Digital-Converter for a 6-Axis MEMS Frequency-Modulated Inertial Measurement Unit","authors":"M. Bestetti, M. Leoncini, P. Minotti, C. R. Marra, G. Langfelder, A. Tocchio, S. Facchinetti","doi":"10.1109/ISISS.2019.8739760","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739760","url":null,"abstract":"The work presents and characterizes a frequency digitization circuit used in a multi-parameter, multi-axis inertial measurement unit wholly based on frequency modulated (FM) sensors. With a low quantization noise of $35mu mathbf{HZ}mathrm{ms}$ at 100-Hz output data rate, and a linear full-scale of 1 kHz, the proposed frequency to digital converter (FDC) achieves 149 dB of dynamic range, referred to a 50 Hz sensing bandwidth. The circuit operation is successfully demonstrated on both Lissajous FM gyroscopes and time-switched FM accelerometers, on both in-plane and out-of-plane sensing axes.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115880143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Angle Random Walk Minimization for Frequency Modulated Gyroscopes 调频陀螺仪角度随机游走最小化
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739529
A. Sabater, K. Moran
{"title":"Angle Random Walk Minimization for Frequency Modulated Gyroscopes","authors":"A. Sabater, K. Moran","doi":"10.1109/ISISS.2019.8739529","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739529","url":null,"abstract":"Compared to amplitude modulated gyroscopes, frequency modulated (FM) gyroscopes have demonstrated excellent long-term stability. A notable limitation with FM gyroscopes is FM operation can decrease short-term stability. Short-term stability is typically quantified via angle random walk (ARW). This work presents an FM gyroscope ARW minimization method. As the measured and predicted values of minimized ARW are in agreement, this work provides a means to account for the competing effects associated with amplitude and frequency stability.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116965562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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