{"title":"Fabrication of X-ray Mask using Poly-Si Microstructure for Diffraction Grating","authors":"K. Shimada, H. Tsujii, D. Noda, T. Hattori","doi":"10.1109/MHS.2007.4420897","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420897","url":null,"abstract":"There is an X-ray Talbot interferometer in one of the imaging technology by X-ray phase information. A diffraction grating is necessary for a Talbot interferometer, but the manufacture is difficult. In this study, we decided to make a diffraction grating to use it for a Talbot interferometer in X-ray lithography. For the development of a fine and high-precision X-ray mask, a rectangular structure of a high aspect ratio was formed through conventional UV lithography incorporating an ICP-based Si dry etching process that enables fine patterning. We succeeded in making 2.2 mum in width, a Poly-Si structure body of 4.7 mum high. We succeeded in forming 2.6 mum in width, a gold absorber of 4.2 mum high by Au electrolysis plating. We succeeded in making 2.2 mum in width, a SU-8 structure body of 10 mum high by X-ray lithography. Conventionally, we were able to complete a fine X-ray mask.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"186 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131774674","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Okada, S. Ikeda, T. Fukuda, F. Arai, M. Negoro, I. Takahashi
{"title":"Photoelastic Stress Analysis on Patient-Specific Anatomical Model of Cerebral Artery","authors":"Y. Okada, S. Ikeda, T. Fukuda, F. Arai, M. Negoro, I. Takahashi","doi":"10.1109/MHS.2007.4420913","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420913","url":null,"abstract":"In this paper, we propose a novel method to develop biomimetic models using polyurethane elastomer, which has high photoelastic coefficient, and a method to analyze stress states on the model by photoelastic effect. By using this method, stress condition on vascular wall is clearly visualized on vascular fringe as rainbow-colored photoelastic pattern, and stress can be quantitatively measured from that pattern. Ideally, retardation and path length of transmitted light through the polyurethane model should be observed for photoelastic analysis. Our method has capability to observe these two parameters simultaneously. Retardation and path length were determined from RGB value of rainbow-colored photoelastic stress pattern and permeability of light, respectively. The accuracy of stress analysis was evaluated by tensile test using cylindrical polyurethane models. 5.73% error was found in the result of photoelastic stress analysis. Lastly using the model produced by new method, we could analyze stress states quantitatively on the model of cerebral artery. Consequently, our method should be valuable for not only surgical simulations but also hemodynamic studies and pathological studies.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130964711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Novel Wet Anisotropic Etching Process for the Realization of New Shapes of Silicon MEMS Structures","authors":"P. Pal, K. Sato, M. Gosálvez, M. Shikida","doi":"10.1109/MHS.2007.4420906","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420906","url":null,"abstract":"In this work, we have developed a novel anisotropic wet etching process for the fabrication of MEMS microstructures with rounded concave and sharp convex corners, grooves for chip isolation, mesa structures with bent V-grooves, and 45deg mirrors by using a single etching mask. Tetra Methyl Ammonium Hydroxide (TMAH) at various concentrations with and without the non-ionic surfactant NC-200 at 0.1% of the total volume of the etchant has been used. In order to fabricate the microstructures with rounded concave corners, round shape mask pattern was used. Mesa structures and grooves for chip isolation were realized using spatially efficient convex corner compensation structures.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134342606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Sasaki, T. Iwami, G. Obinata, K. Miyawaki, K. Matsuo, K. Kiguchi
{"title":"Development of a new adaptation system for a manual wheelchair based on human body function","authors":"M. Sasaki, T. Iwami, G. Obinata, K. Miyawaki, K. Matsuo, K. Kiguchi","doi":"10.1109/MHS.2007.4420902","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420902","url":null,"abstract":"In this paper, we propose a new adaptation system for a manual wheelchair to reduce the load on the upper extremity of the user during wheelchair manipulation and also to increase the efficiency of the wheelchair propulsion. The proposed adaptation system is designed to provide optimal position of the handrim and the desired angular position of seat and backrest of the wheelchair based on the user's body function. Electromyogram signals from the user muscles, heart rate signals, oxygen uptake, amount of applied pressure on the seat and backrest, force/moment applied on the handrim, joint force/moment of the upper extremity and analytical results using the dynamic manipulating force ellipsoid and the driving force contribution figure are used as index parameters for the proposed adaptation system.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133465691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Kudoh, A. Kiyohara, C. Hosokawa, T. Taguchi, I. Hayashi
{"title":"Interaction between living neuronal network and outer world by programmable multisite stimulation system","authors":"S. Kudoh, A. Kiyohara, C. Hosokawa, T. Taguchi, I. Hayashi","doi":"10.1109/MHS.2007.4420824","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420824","url":null,"abstract":"Rat hippocampal neurons organized complex networks on a culture dish which has 64 planner microelectrodes and action potentials of neurons were recorded from an individual electrode. MED64 system, one of multi site recording systems for extracellular action potential was used for recording network activities of living neuronal networks and for applying inputs from outer world to the network. Neurons reconstructed complicated networks along culture days, and a spatio-temporal pattern of spontaneous action potentials was drastically changed after transient high-frequency bursting activities (HFB). After HFB, spatial distribution of spontaneous action potentials changed to heterogeneous one. We designed programmable multisite stimulation head amplifier, and analysis of evoked action potentials induced by the stimulator confirmed that there are some hub-like structure which has many inputs from other neurons. In addition we are developing \"biomodeling system\", in which living neuronal network connected to moving robot.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114574996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Transparent Biosensor with Micro Channel Array for Optical and Electrophysiological Cell Signal Detection","authors":"W. Tonomura, M. Sato, H. Okamura, S. Konishi","doi":"10.1109/MHS.2007.4420869","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420869","url":null,"abstract":"This paper describes transparent biosensors to detect both optical and electrophysiological signals of Luciferin-Iuciferase reaction. By using MEMS technologies, we have developed \"micro channel array (hereafter MCA)\" integrated with suction holes and detecting electrodes for electrophysiological biosensors. Each detecting electrode is electrically isolated. Reliable clamping of a single cell at the detecting electrode is expected to improve the cellular selectivity and S/N ratio. The transparent biosensors in this paper are designed as a variation of the MCA. Luciferin-Iuciferase reaction generates optical and electrophysiological signals simultaneously against chemical stimulus. In this study, we employed Per1-luc slice having circadian rhythm as a typical example of cell having Luciferin-Iuciferase reaction. Optical and electrophysiological signals of the Per1-luc slice could be successfully observed by developed transparent biosensors with MCA.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"257 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133764821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Khan, A. O. Nergiz, M. Elitaş, V. Patoglu, A. Sabanoviç
{"title":"A Hybrid Force-Position Controller based Man-Machine Interface for Manipulation of Micro Objects","authors":"S. Khan, A. O. Nergiz, M. Elitaş, V. Patoglu, A. Sabanoviç","doi":"10.1109/MHS.2007.4420827","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420827","url":null,"abstract":"A hybrid force-position controller based man-machine interface for manipulation of micro objects through pushing with a micro cantilever is presented. Visual feedback is employed to detect position and orientation of a micro particle and a piezoresistive AFM cantilever is automatically positioned to align the line of action of interaction forces in a way that will ensure the particle to track a desired trajectory. Control of the interaction force is delegated to a human operator through scaled bilateral teleoperation. A custom tele-micromanipulation setup is built for testing and preliminary experiments of controlled pushing to achieve pure translational motion of rectangular micro objects are implemented.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133641482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Lipid-tubular network formation for biochemical reaction","authors":"S. Nomura, K. Akiyoshi","doi":"10.1109/MHS.2007.4420874","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420874","url":null,"abstract":"Here we describe liposome connecting tubular networks as a chemical reactor system. Two types of cell-sized liposomes are prepared by natural swelling method. The one was encapsulating in vitro gene-expression system (without DNA) and the other was including plasmid DNA coding green fluorescent protein (GFP). After mixing them gently, ganglioside GM3 was added for the connecting liposomes to network formation. The gene expression was checked by confocal scanning fluorescent microscopy. Fluorescence recovery after photobleaching (FRAP) assay supports the diffusive transfer could be driven the reaction. Proteoliposome network formation was also demonstrated from in vitro synthesized membrane protein cytochrome b5 on liposomes. These result should be used for constructing membrane protein array or artificial-cellular reaction cluster.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133774512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Realtime Measurement of Mechanical Motion of Single Protein Molecules","authors":"K. Okamoto, M. Nishiyama, M. Terazima","doi":"10.1109/MHS.2007.4420843","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420843","url":null,"abstract":"Biomolecules, especially proteins, often consist of several rigid subunits and work like mechanical devices. Therefore their mechanical motion or the conformational dynamics are significantly investigated with a great deal of interests. However, it is a challenge to detect small mechanical motion, especially when its dimension is as small as several nanometers. Single molecule measurement technique making use of fluorescence resonance energy transfer (FRET) is one of effective solutions to observe molecular dynamics in very small dimensions like nanometers. We developed a single molecule measurement technique with improved time resolution. We employed the time stamp detection method to acquire the signals including rich information and the statistical data analysis to extract essential information from the signal. Using the new system, the conformational dynamics of cytochrome c (cyt c) protein molecules was investigated. The change of molecular structure is detected as that of the fluorescence intensity by way of FRET phenomenon. Some intermediate states were resolved and the time resolution in the order of millisecond was achieved.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132397672","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Arai, N. Inomata, R. Ookawara, Y. Yamanishi, Yu-Ching Lin
{"title":"Observation of carbon nanotubes in water by supplying fluorescent reagent with porous structured PDMS supports","authors":"F. Arai, N. Inomata, R. Ookawara, Y. Yamanishi, Yu-Ching Lin","doi":"10.1109/MHS.2007.4420858","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420858","url":null,"abstract":"We have demonstrated a visualization method of carbon nanotubes (CNTs) in water with fluorescent microscopy by using fluorescent dye background conditions that display a reversal contrast. We have successfully observed CNTs under a constant excitation light for more than ten minutes. We have developed novel chip system to supply fluorescence dye with appropriate concentration. The salt reaching method has been applied to PDMS (poly-dimethyl siloxane) in order to obtain porous structures. We have found that this porous structure provides homogeneous concentration of fluorescence dye by putting it in water and found out porous-PDMS support with larger porous gives a higher and steady concentration. The fine control of the concentration of the fluorescence dye in the microchannel has been achieved with a controlled speed of flow and mixture by means of a micro magnetic stirrer. Dielectrophoretic force was used for CNTs deposition onto electrodes that consist of transparent conductive film. It was confirmed that the proposed microfluidic system controls the concentration of fluorescent dye for a long term observation in water and is useful to apply CNTs to several biological application fields.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133227047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}