2007 International Symposium on Micro-NanoMechatronics and Human Science最新文献

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Force Feedback Mouse with Differential Mechanism for Omni-Traveling 全向移动差动机构力反馈鼠标
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420894
Hiroyuki Kudo, K. Suzumori, T. Kanda
{"title":"Force Feedback Mouse with Differential Mechanism for Omni-Traveling","authors":"Hiroyuki Kudo, K. Suzumori, T. Kanda","doi":"10.1109/MHS.2007.4420894","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420894","url":null,"abstract":"The goal of this research is to develop a new haptic interface device, which can improve operability and expressiveness of personal computer (PC). A new mouse type device named active mouse is developed. It consists of one omni-traveling mechanism, force sensor, position sensor and communication and control system. The omni-traveling mechanism consists of one sphere ball, two differential mechanisms, and two motors. This mechanism realizes rotation of one motor that will not affect the other motor. Therefore, output of the two motors can be composed as output to the ball. As a result, this omni-traveling mechanism can achieve 4.8[N] force at 5[V] and 500 [mAJ in compact size. The two motors of omni-traveling mechanism, force sensor and position sensor are controlled with communication and control modules developed in this research. The communication system for Active Mouse equips with USB interface. The USB interface supplies DC voltage and support communication with PC. Therefore this device can be used for general PC just connecting USB interface. To confirm function ability of the Active Mouse, a graphical program is developed. Using this program, Active Mouse can input user's force and position data to PC, and output force to user. From here, Active Mouse realizes functions of general mouse and also works as haptic device.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122062162","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Design and fabrication of a shape memory alloy actuated exoskeletal microarm 形状记忆合金驱动外骨骼微臂的设计与制造
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420877
F. Aral, D. Azuma, K. Narumi, Y. Yamanishi, Yu-Ching Lin
{"title":"Design and fabrication of a shape memory alloy actuated exoskeletal microarm","authors":"F. Aral, D. Azuma, K. Narumi, Y. Yamanishi, Yu-Ching Lin","doi":"10.1109/MHS.2007.4420877","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420877","url":null,"abstract":"This paper reports the design and fabrication process and control system of an exoskeletal microarm. The research of the microarm is part of a new concept of endoscopes designed for endoscopic submucosal dissection (ESD) operation. This novel ESD endoscope has two suction grippers to hold the lesion skin, and a cautery knife to cut. The grippers and cautery knife are actuated by shape memory alloy (SMA). SMA is known for its high work output unit volume and its high power/mass ratio. Plus, its exoskeletal link mechanism enables to calculate the position of its end tip, necessary for the control of the grippers and the knife. The microarm is composed of polydimethylsiloxane (PDMS) using soft lithography technique. The microarm is coated with hardening epoxy polymer, leaving only the joint part of the microarm uncoated. The microarm's bending angle is controlled by PID control system where SMA's electrical resistance change is used as a feedback parameter. The fabricated exoskeletal microarm successfully bent in a joint, and its angle was able to control under the PID control system.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122147087","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Projection Clutching System for Force Transmission System based on Tulip-shaped Electrostatic Clutch 基于郁金香形静电离合器的力传递系统的投影抓紧系统
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420905
H. Sasaki, S. Takagi, M. Shikida, K. Sato
{"title":"Projection Clutching System for Force Transmission System based on Tulip-shaped Electrostatic Clutch","authors":"H. Sasaki, S. Takagi, M. Shikida, K. Sato","doi":"10.1109/MHS.2007.4420905","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420905","url":null,"abstract":"We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed minute projection with high-power and large strokes (Output: 600 mN and displacement: 60 mum). This time, we added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4x4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 x 6.0 x 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127090040","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fluctuations in sliding motion of cytoskeltal filament driven by molecular motors 分子马达驱动的细胞骨架丝滑动运动的波动
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420851
Y. Imafuku, N. Mitarai, K. Tawada, H. Nakanishi
{"title":"Fluctuations in sliding motion of cytoskeltal filament driven by molecular motors","authors":"Y. Imafuku, N. Mitarai, K. Tawada, H. Nakanishi","doi":"10.1109/MHS.2007.4420851","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420851","url":null,"abstract":"It has been found in several in vitro experiments that cytoskeletal filaments driven by molecular motors show finite diffusion in sliding movement even in the long filament limit (Imafuku et al., 1996a, 1997; Noda et al., 2005). This anomalous fluctuation can be evidence that there exists some cooperativity among the motors in action because fluctuation should be averaged out if the action of each motor is independent. In order to understand the nature of the cooperativity in existing models of molecular motors, we perform numerical simulations and analyze velocity correlation on three models that are known to show some kind of cooperativity and/or large diffusion coefficient in the long filament limit. It is shown that Prost model (1994) and Duke model (1999) do not give a finite diffusion in the long filament limit in spite of collective action of motors. Quenched randomness in Sekimoto-Tawada model (1995) has been shown to give constant diffusion coefficient independent of filament length because of long time correlation proportional to filament length, but such a long correlation time is found to conflict with the experimental time scales. We conclude that none of the three models represent experimental findings, and a mechanism to be understood should allow both the amplitude and the time scale of the velocity correlation to be independent of the filament length.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127105515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electrostatic Silicon Microgripper with Low Voltage of Actuation 低驱动电压静电硅微夹持器
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420878
R. Wierzbicki, C. Adda, H. Hotzendorfer
{"title":"Electrostatic Silicon Microgripper with Low Voltage of Actuation","authors":"R. Wierzbicki, C. Adda, H. Hotzendorfer","doi":"10.1109/MHS.2007.4420878","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420878","url":null,"abstract":"In this paper we present design considerations and results of experiments conducted in order to lower maximum driving voltage of a silicon microgripper's comb-drive actuator. Several different designs have been created, structures were fabricated and tested. We were able to decrease initial 60 V driving voltage of previous designs to levels of 9 V and 7 V with an operating range (gripper tips distance) of 75 mum. The created structures reveal to be fully functional, which has been proved through grasping and manipulation tests.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127695045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Laser-driven viscous micropump using a spining rotor 采用旋转转子的激光驱动粘性微泵
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420819
A. Takaura, H. Inoue, S. Maruo
{"title":"Laser-driven viscous micropump using a spining rotor","authors":"A. Takaura, H. Inoue, S. Maruo","doi":"10.1109/MHS.2007.4420819","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420819","url":null,"abstract":"Optically driven micropumps using viscous drag exerted on a rotating microrotor was developed. As the first prototype, a disk microrotor (diameter: 10 mum), which has three columns as targets for the optical trap, is confined to a U-shaped microchannel. To pump fluid, the disk microrotor is rotated by a time-shared optical trapping technique. The flow field inside the U-shaped microchannel was analyzed using finite element method (FEM) based on the Navier-Stokes equation. The optimized micropump was fabricated using a two-photon microfabrication technique. The flow rate of the micropump agreed with simulation result obtained by FEM analysis. Furthermore, we developed a helical rotor as a spining rotor inside the U-shaped microchannel. Unlike the previous disk microrotor, the helical rotor can be rotated just by focusing a laser beam without scanning of the laser beam. It was demonstrated that the rotation of the helical rotor generated fluid flow.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"os-51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127791926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Development of a disposable multi-compartment micro-cell culture device 一次性多室微细胞培养装置的研制
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420890
H. Nakayama, H. Kimura, M. Nishikawa, K. Komori, T. Fujii, Y. Sakai
{"title":"Development of a disposable multi-compartment micro-cell culture device","authors":"H. Nakayama, H. Kimura, M. Nishikawa, K. Komori, T. Fujii, Y. Sakai","doi":"10.1109/MHS.2007.4420890","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420890","url":null,"abstract":"Our final goal is development of a multi-compartment micro-cell culture system \"on-chip animal/human\". Towards the final goal, we designed and developed a disposable-type three-compartment micro-cell culture using polydimethylsiloxane (PDMS)-based microfabrication and small magnetic stirrer-based internal pumping system (for disposability and space-saving). The developed device was able to be operated in two different perfusion modes, that is, an each compartment perfusion mode and an entire device perfusion mode, so that cells derived from different tissue/organ can be grown or maintained in different culture protocols and finally they are connected for toxicokinetic studies over the entire device. To evaluate the chemical distribution and biological metabolic processes, we incorporated fat and liver-tissue derived cells in the device because they control the distribution and biotransformation of hydrophobic and carcinogenic chemicals. Liver-derived cells, human hepatocarcinoma Hep G2, were inoculated and cultured in the liver compartment in addition to the fat tissue compartment where mature rat adipocytes were immobilized in a 3D scaffold. Both cells remained attached to the surface in monolayers on the bottom surfaces of each compartment without detachment or forming floating aggregates during perfusion. Rat primary hepatocytes were also stably cultured in the liver tissue compartment. We are now trying fluorescent-based visualization of toxicokinetic processes in the liver compartment in the present and absence of rat tissue compartment in the devices administered with fluorescent and carcinogenic chemicals.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123283657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Multi-Switchable Micro Dispenser Chip-Set for Portable Health Care Devices 多开关微型分配器芯片组便携式医疗保健设备
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420907
T. Hasegawa, F. Omatsu, T. Tsuji, K. Ikuta
{"title":"Multi-Switchable Micro Dispenser Chip-Set for Portable Health Care Devices","authors":"T. Hasegawa, F. Omatsu, T. Tsuji, K. Ikuta","doi":"10.1109/MHS.2007.4420907","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420907","url":null,"abstract":"Pneumatic ( air pressure drive ) micro dispenser system without any dead volume of sample was developed successfully. The 10- directional switching valve chip and the sampling chip as the component of this dispenser were developed successfully. The sampling chip can divide liquid every 1 muL or 0.5 muL without any dead volume of sample by decompressing and the compressing air. This simple operation is caused by the original novel detecting method of micro fluid and check valves of hat shape. The switching valve chip selects the outlet that injects the dispensed sample. This chip has a special rotary mechanism with the silicone rubber leak-preventions and the precise auto- positioning mechanism. This chip can switch ten outlets by built- in micro solenoid (1 N, 6 V DC) under high leakage pressure (higher than 500 kPa). Since the both of chips were fabricated by our original \"hybrid micro stereo lithography\" (hybrid-IH process), the micro assembling and bonding are not needed.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123376214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Machine Vision Force Feedback for Electrostatic Microgrippers 静电微夹持器的机器视觉力反馈
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420863
R. Wierzbicki, H. Hotzendorfer, C. Adda
{"title":"Machine Vision Force Feedback for Electrostatic Microgrippers","authors":"R. Wierzbicki, H. Hotzendorfer, C. Adda","doi":"10.1109/MHS.2007.4420863","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420863","url":null,"abstract":"In this paper we present design considerations and a prototype of a machine vision implemented force feedback system for silicon electrostatic microgrippers. A model of the gripper system is presented and experimentally identified. A tuned PID control system for the gripper's tips opening and gripping force level is presented. The accuracy and the resolution of the system are estimated at levels of 0.250 muN and 0.075 muN, respectively. Finally, Results of gripping experiments are presented.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"129 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122994914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental Verification of CMP Process Analysis CMP工艺分析的实验验证
2007 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2007-11-01 DOI: 10.1109/MHS.2007.4420922
Y. Hashimoto, N. Suzuki, R. Hino, E. Shamoto
{"title":"Experimental Verification of CMP Process Analysis","authors":"Y. Hashimoto, N. Suzuki, R. Hino, E. Shamoto","doi":"10.1109/MHS.2007.4420922","DOIUrl":"https://doi.org/10.1109/MHS.2007.4420922","url":null,"abstract":"The present study performs an experimental verification of an analytical model of the Chemical Mechanical Polishing (CMP) process, focusing on friction force and the distribution of the material removal rate. A coupled Fluid-Structure analytical model, which can predict the friction force and the distribution of the material removal rate, is developed. Oxide CMP experiments are conducted using a fabricated CMP system, and measured friction force and distribution of the material removal rate are compared with the analytical results. As a result, it is confirmed that the wafer's rotational speed affects the friction force and the distribution of the material removal rate. Additionally, the results determined by the developed analytical model agree with the measurements. The magnitude of the friction force under a condition in which the wafer does not rotate becomes smaller than when the wafer rotates at the same speed as the polishing pad. The direction of the friction force inclines against the rotational center of the polishing pad. The material removal rate when the wafer does not rotate is high around the edge of the wafer as compared with that at other areas. In particular, it becomes high around the leading edge and the area where the rotational radius of the polishing pad is large. These specific characteristics of the friction force and the distribution of the material removal rate are explained using the analytical results.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123019792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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