{"title":"低驱动电压静电硅微夹持器","authors":"R. Wierzbicki, C. Adda, H. Hotzendorfer","doi":"10.1109/MHS.2007.4420878","DOIUrl":null,"url":null,"abstract":"In this paper we present design considerations and results of experiments conducted in order to lower maximum driving voltage of a silicon microgripper's comb-drive actuator. Several different designs have been created, structures were fabricated and tested. We were able to decrease initial 60 V driving voltage of previous designs to levels of 9 V and 7 V with an operating range (gripper tips distance) of 75 mum. The created structures reveal to be fully functional, which has been proved through grasping and manipulation tests.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Electrostatic Silicon Microgripper with Low Voltage of Actuation\",\"authors\":\"R. Wierzbicki, C. Adda, H. Hotzendorfer\",\"doi\":\"10.1109/MHS.2007.4420878\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we present design considerations and results of experiments conducted in order to lower maximum driving voltage of a silicon microgripper's comb-drive actuator. Several different designs have been created, structures were fabricated and tested. We were able to decrease initial 60 V driving voltage of previous designs to levels of 9 V and 7 V with an operating range (gripper tips distance) of 75 mum. The created structures reveal to be fully functional, which has been proved through grasping and manipulation tests.\",\"PeriodicalId\":161669,\"journal\":{\"name\":\"2007 International Symposium on Micro-NanoMechatronics and Human Science\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 International Symposium on Micro-NanoMechatronics and Human Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.2007.4420878\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Symposium on Micro-NanoMechatronics and Human Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2007.4420878","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electrostatic Silicon Microgripper with Low Voltage of Actuation
In this paper we present design considerations and results of experiments conducted in order to lower maximum driving voltage of a silicon microgripper's comb-drive actuator. Several different designs have been created, structures were fabricated and tested. We were able to decrease initial 60 V driving voltage of previous designs to levels of 9 V and 7 V with an operating range (gripper tips distance) of 75 mum. The created structures reveal to be fully functional, which has been proved through grasping and manipulation tests.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
