IEEE transactions on ultrasonics, ferroelectrics, and frequency control最新文献_第8页

A Deep Reinforcement Learning Based Region-Specific Beamformer for Sparse Arrays 3-D Ultrasound Imaging 基于深度强化学习的区域特定波束形成器用于稀疏阵列三维超声成像。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-15 DOI: 10.1109/TUFFC.2025.3560872

Mohamed Tamraoui;Hervé Liebgott;Emmanuel Roux

{"title":"A Deep Reinforcement Learning Based Region-Specific Beamformer for Sparse Arrays 3-D Ultrasound Imaging","authors":"Mohamed Tamraoui;Hervé Liebgott;Emmanuel Roux","doi":"10.1109/TUFFC.2025.3560872","DOIUrl":"10.1109/TUFFC.2025.3560872","url":null,"abstract":"Sparse arrays offer several advantages over other element reduction techniques for 3-D ultrasound imaging. However, the large interelement spacing in these arrays results in high sidelobe-related artifacts, which significantly degrade image quality and limit their application in 3-D ultrasound imaging. Adaptive beamformers have been proposed to mitigate sidelobe-related artifacts, but they often degrade speckle texture quality, resulting in unnaturally dark images. To overcome these limitations, we propose RSB-Net, a region-specific beamformer based on deep reinforcement learning (DRL). RSB-Net adaptively selects the most suitable beamformer for each pixel of the image, applying adaptive beamforming in regions dominated by sidelobe artifacts and delay-and-sum (DAS) beamforming in regions where speckle texture should be preserved. The effectiveness of RSB-Net was validated on both simulated and experimental synthetic transmit aperture (STA) RF datasets with a newly designed sparse array prototype. On simulated data, RSB-Net achieved significant gains, with improvements of 52.81 dB in contrast ratio (CR) and 0.65 in a generalized contrast-to-noise ratio (gCNR) compared to DAS beamforming. In experimental tissue-mimicking phantom data, RSB-Net demonstrated similar performance, achieving gains of 51.01 dB and 0.64, respectively. These results highlight the potential of RSB-Net as a robust and effective solution for high-quality B-mode 3-D ultrasound imaging using 2-D sparse arrays, advancing the standardization of 3-D ultrasound in clinical settings by enhancing anatomical visualization, reducing operator dependency, and improving measurement accuracy for lesions and calcifications.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"772-785"},"PeriodicalIF":3.0,"publicationDate":"2025-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143968259","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A High-Frequency Ultrasound Endoscope for Minimally Invasive Spine Surgery 用于微创脊柱手术的高频超声内窥镜。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-10 DOI: 10.1109/TUFFC.2025.3559870

M. Nicole MacMullin;Theresa Gu;Thomas G. Landry;Nicholas Campbell;Sean D. Christie;Jeremy A. Brown

{"title":"A High-Frequency Ultrasound Endoscope for Minimally Invasive Spine Surgery","authors":"M. Nicole MacMullin;Theresa Gu;Thomas G. Landry;Nicholas Campbell;Sean D. Christie;Jeremy A. Brown","doi":"10.1109/TUFFC.2025.3559870","DOIUrl":"10.1109/TUFFC.2025.3559870","url":null,"abstract":"The transition to minimally invasive spinal surgery over traditional open procedures requires the development of imaging techniques that meet the size constraints. Due to size restrictions associated with minimally invasive spine surgery (MISS), current imaging techniques are largely limited to microscopy, which is only capable of line-of-sight imaging of the tissue surface. A miniature, high-resolution ultrasound imaging endoscope has been developed as a potential alternative imaging method that would enable intraoperative guidance. We have designed and developed a 30-MHz miniature, 64-element high-resolution imaging endoscope using PIN-PMT-PT single crystal as the piezoelectric substrate. The packaged probe had cross-sectional dimensions of <inline-formula> <tex-math>$3.8times 4.2$ </tex-math></inline-formula> mm and a length of 14 cm. Two editions of the endoscope were created with a forward facing and 40° angle to enable visualization of structures during a medial and lateral approach, respectively. The probe was combined with a custom imaging system that produced real-time images with a field of view ranging between ±32° and an image depth of 15 mm. The two-way axial resolution was measured to be <inline-formula> <tex-math>$38~mu $ </tex-math></inline-formula>m based on the -6-dB width of the pulse envelope. The -6-dB lateral resolution was measured to be 113, 131, and <inline-formula> <tex-math>$158~mu $ </tex-math></inline-formula>m at steering angles of 0°, 12°, and 25°, respectively, which were close to the simulated values of 106, 118, and <inline-formula> <tex-math>$144~mu $ </tex-math></inline-formula>m. Preliminary clinical imaging studies successfully demonstrated the visualization of pertinent spinal anatomy during minimally invasive surgeries. The imaging probe was also able to demonstrate compression and decompression of nerve roots, supporting its potential use as a clinical tool.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"828-836"},"PeriodicalIF":3.0,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144012604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Respiratory Motion Effects and Mitigation Strategies on Boiling Histotripsy in Porcine Liver and Kidney 猪肝脏和肾脏沸腾组织的呼吸运动效应及缓解策略。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-09 DOI: 10.1109/TUFFC.2025.3559458

Ekaterina M. Ponomarchuk;Gilles P. L. Thomas;Minho Song;Yak-Nam Wang;Stephanie Totten;George R. Schade;Vera A. Khokhlova;Tatiana D. Khokhlova

{"title":"Respiratory Motion Effects and Mitigation Strategies on Boiling Histotripsy in Porcine Liver and Kidney","authors":"Ekaterina M. Ponomarchuk;Gilles P. L. Thomas;Minho Song;Yak-Nam Wang;Stephanie Totten;George R. Schade;Vera A. Khokhlova;Tatiana D. Khokhlova","doi":"10.1109/TUFFC.2025.3559458","DOIUrl":"10.1109/TUFFC.2025.3559458","url":null,"abstract":"Boiling histotripsy (BH) is a pulsed high-intensity focused ultrasound (HIFU)-based method of extracorporeal nonthermal tissue disintegration under real-time ultrasound (US) guidance. Respiratory motion in abdominal targets can affect BH precision and completeness. This study compares two motion mitigation strategies based on pulse/echo US motion tracking: robotic arm-based unidirectional motion compensation by HIFU transducer manipulation and BH pulse gating during expiratory pause. BH ablations were generated in the liver and kidney of anesthetized pigs with 2–10-ms pulses using a 256-element 1.5-MHz HIFU array. A coaxial US imaging probe was used for targeting, tracking skin surface, and monitoring real-time bubble activity. The axial [anterior-posterior (AP)] displacement of the skin surface was found to be synchronous with liver and kidney motion in both cranio-caudal (CC) and AP directions. BH lesions were produced either with no motion mitigation, or with pulse gating, or with 1-D motion compensation. Dimensions of completely fractionated and affected tissue areas were measured histologically. In liver, gating and motion compensation improved fractionation completeness within targeted volumes and reduced off-target tissue damage in AP direction versus no motion mitigation; only gating reduced off-target damage in CC direction. In kidney, gating improved BH completeness in both directions versus no mitigation, but did not affect off-target damage due to lower displacement amplitudes in the kidney comparable with gating tolerance limits. In both liver and kidney, gating increased treatment time by 24%. These results suggest that BH pulse gating using US-based AP skin surface tracking is an adequate approach for treating organs with pronounced 3-D respiratory motion.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"837-846"},"PeriodicalIF":3.0,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143963274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Adaptive Color Doppler for Axial Velocity Imaging of Microvessel Networks 微血管网络轴向速度自适应彩色多普勒成像。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-09 DOI: 10.1109/TUFFC.2025.3559238

Yang Liu;Yongchao Wang;Pakpong Chirarattananon;Jianbo Tang

{"title":"Adaptive Color Doppler for Axial Velocity Imaging of Microvessel Networks","authors":"Yang Liu;Yongchao Wang;Pakpong Chirarattananon;Jianbo Tang","doi":"10.1109/TUFFC.2025.3559238","DOIUrl":"10.1109/TUFFC.2025.3559238","url":null,"abstract":"Directional filtering has been applied to distinguish between the ascending and descending flows in functional ultrasound imaging; however, it can lead to incorrect measurement of the flow speed and direction when using the directional filtering-based improved directional color Doppler ultrasound (iCD_US) velocimetry. Specifically, in cases where the frequency spectrum bandwidth of a unidirectional flow extends into both negative and positive frequency domains, directional filtering may erroneously produce bidirectional velocities. Here, we propose an adaptive color Doppler ultrasound (aCD_US) technique, which addresses this issue by analyzing the envelope of the Doppler spectrum and then adaptively using the whole spectrum integration or directional filtering-based approach to estimate the flow velocity. The proposed aCD_US was validated through numerical simulations and phantom experiments under various flow conditions, demonstrating superior performance in estimating axial velocities of unidirectional, bidirectional, and horizontal flows. Notably, numerical simulations showed that aCD_US achieved over 90% directional accuracy and less than 15% velocity deviation at signal-to-noise ratios (SNRs) larger than −1 dB. In vivo, experiments on mouse cerebral blood flow further highlighted its advantages, with aCD_US surpassing conventional color Doppler velocimetry and iCD_US in reconstructing axial flow velocity maps. The quantitative comparison between aCD_US and vULM shows a strong overall correlation in their axial velocity measurements, with a Pearson correlation coefficient of 0.760 (<inline-formula> <tex-math>${p} =0.000$ </tex-math></inline-formula>). These results demonstrate the advantage of aCD_US in precise microvessel network velocity quantification and its potential to advance microvascular imaging accuracy in both research and clinical applications.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"709-720"},"PeriodicalIF":3.0,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143994327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Contrast-Enhanced Null Subtraction Imaging Method Using Dynamic DC Bias in Ultrafast Ultrasound Imaging 一种利用动态直流偏置进行超快超声成像的对比度增强零差成像方法。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-04 DOI: 10.1109/TUFFC.2025.3558017

Xin Yan;Xiaodong Yang;Lingling Jing;Wei Guo;Yingqi Wang;Xinwei Su;Yuanyuan Wang

{"title":"A Contrast-Enhanced Null Subtraction Imaging Method Using Dynamic DC Bias in Ultrafast Ultrasound Imaging","authors":"Xin Yan;Xiaodong Yang;Lingling Jing;Wei Guo;Yingqi Wang;Xinwei Su;Yuanyuan Wang","doi":"10.1109/TUFFC.2025.3558017","DOIUrl":"10.1109/TUFFC.2025.3558017","url":null,"abstract":"Enhancing the resolution and contrast of ultrafast ultrasound imaging is imperative for the accuracy of clinical diagnostics. Null subtraction imaging (NSI) is a nonlinear beamforming technique capable of significantly enhancing lateral resolution. However, it suffers from issues of low-quality speckle pattern and poor contrast performance. To address this issue, we propose a novel contrast-enhanced NSI method that utilizes dynamic dc bias. Innovatively, we construct the dynamic dc bias using a generalized coherence factor (GCF) and a sigmoid transformation function that adapts the dc value based on the signal characteristics of different imaging regions. Furthermore, a normalization scheme is proposed to optimize the beamforming output, ensuring uniform pixel intensity throughout the final image. Simulation, phantom, and in vivo data are utilized for ultrasound beamforming to evaluate the performance of the proposed method. Quantitative results show that the proposed method significantly enhances the contrast ratio (CR) by 197%, the contrast-to-noise ratio (CNR) by 341%, the speckle signal-to-noise ratio (sSNR) by 302%, and the generalized CNR (gCNR) by 106% compared to the original NSI (in phantom). Point target imaging results indicate that the proposed method achieves a main lobe width slightly wider than the original NSI method, but much narrower than those of delay and sum (DAS) and GCF. These findings confirm that the proposed method significantly enhances imaging contrast while preserving high resolution, which is of great significance for the further clinical application of ultrafast ultrasound imaging.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"755-771"},"PeriodicalIF":3.0,"publicationDate":"2025-04-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143784458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Computational Ultrasound Carotid Artery Imaging With a Few Transceivers: An Emulation Study 计算超声颈动脉成像与几个收发器：仿真研究。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-04 DOI: 10.1109/TUFFC.2025.3557374

Yuyang Hu;Didem Dogan;Michael Brown;Geert Leus;Antonius F. W. van der Steen;Pieter Kruizinga;Johannes G. Bosch

{"title":"Computational Ultrasound Carotid Artery Imaging With a Few Transceivers: An Emulation Study","authors":"Yuyang Hu;Didem Dogan;Michael Brown;Geert Leus;Antonius F. W. van der Steen;Pieter Kruizinga;Johannes G. Bosch","doi":"10.1109/TUFFC.2025.3557374","DOIUrl":"10.1109/TUFFC.2025.3557374","url":null,"abstract":"Ultrasonography could allow operator-independent examination and continuous monitoring of the carotid artery (CA) but normally requires complex and expensive transducers, especially for 3-D. By employing computational ultrasound imaging (cUSi), using an aberration mask and model-based reconstruction, a monitoring device could be constructed with a more affordable simple transducer design comprising only a few elements. We aim to apply the cUSi concept to create a CA monitoring system. The system’s possible configurations for the 2-D imaging case were explored using a linear array setup emulating a cUSi device in silico, followed by in vitro testing and in vivo CA imaging. Our study shows enhanced reconstruction performance with the use of an aberrating mask, improved lateral resolution through proper choice of the mask delay variation, and more accurate reconstructions using least-squares with QR (LSQR) decomposition compared to matched filtering (MF). Together, these advancements enable B-mode reconstruction and power Doppler imaging (PDI) of the CA with sufficient quality for monitoring using a configuration of 12 transceivers coupled with a random aberration mask with a maximum delay variation of four wave periods (WPs).","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"721-731"},"PeriodicalIF":3.0,"publicationDate":"2025-04-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143784461","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Chirp-Coded Subharmonic Imaging With Volterra Filtering: Histotripsy Bubble Cloud Assessment In Vitro and Ex Vivo 沃尔泰拉滤波的啁啾编码次谐波成像：体外和离体组织泡沫云评估。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-03 DOI: 10.1109/TUFFC.2025.3556030

Vishwas V. Trivedi;Katia Flores Basterrechea;Kenneth B. Bader;Himanshu Shekhar

{"title":"Chirp-Coded Subharmonic Imaging With Volterra Filtering: Histotripsy Bubble Cloud Assessment In Vitro and Ex Vivo","authors":"Vishwas V. Trivedi;Katia Flores Basterrechea;Kenneth B. Bader;Himanshu Shekhar","doi":"10.1109/TUFFC.2025.3556030","DOIUrl":"10.1109/TUFFC.2025.3556030","url":null,"abstract":"Histotripsy is a noninvasive focused ultrasound therapy that liquifies tissue via bubble activity. Conventional ultrasound imaging is used in current clinical practice to monitor histotripsy. Developing surrogate imaging metrics for successful treatment outcomes remains an unmet clinical need. The goal of this work was twofold. First, we investigated whether histotripsy bubble clouds detected with nonlinear imaging (chirp-coded subharmonic imaging with and without Volterra filtering) could be used to assess the ablation zone in vitro. Second, we evaluated the feasibility of improving bubble cloud contrast with this approach in ex vivo porcine kidney. Histotripsy bubble clouds were generated in red blood cell-doped agarose phantoms and imaged with a curvilinear ultrasound probe. The ablation zone was assessed based on images collected with a digital camera. The relationship between the bubble cloud area and the ablation area was assessed using receiver operating characteristic (ROC) analysis, F1 score, accuracy, and Matthews correlation coefficient. Histotripsy bubble clouds were also generated in ex vivo porcine tissue and the ability to improve bubble cloud contrast to tissue was evaluated. Implementing chirp-coded subharmonic imaging with the third-order Volterra filter enhanced contrast-to-tissue ratio (CTR) by up to <inline-formula> <tex-math>$40.06~pm ~0.70$ </tex-math></inline-formula> dB relative to standard imaging in vitro. Furthermore, subharmonic imaging combined with Volterra filtering estimated bubble cloud areas that best matched the ablation zone area based on the analysis metrics. Furthermore, ex vivo studies showed CTR improvement of up to <inline-formula> <tex-math>$26.95~pm ~6.49$ </tex-math></inline-formula> dB. Taken together, these findings advance image guidance and monitoring approaches for histotripsy.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 5","pages":"591-600"},"PeriodicalIF":3.0,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143779804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Directional Coherence Factor for Volumetric Ultrasound Imaging With Matrix Arrays 矩阵阵列体积超声成像的定向相干系数。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-04-03 DOI: 10.1109/TUFFC.2025.3557519

Xiaochuan Wu;Wei-Ning Lee

{"title":"Directional Coherence Factor for Volumetric Ultrasound Imaging With Matrix Arrays","authors":"Xiaochuan Wu;Wei-Ning Lee","doi":"10.1109/TUFFC.2025.3557519","DOIUrl":"10.1109/TUFFC.2025.3557519","url":null,"abstract":"Matrix arrays with small apertures limit spatial and contrast resolutions of volumetric ultrasound imaging. Coherence-based beamformers are prevalent for sidelobe suppression and resolution improvement. While the spatial coherence of a matrix array is fundamentally a 2-D function, conventional coherence factor (CF) methods neglect the directional variation of an <inline-formula> <tex-math>${M} times {N}$ </tex-math></inline-formula> matrix array when calculating volumetric coherence. We hereby propose a projection-based directional CF (DCF) to exploit the 2-D nature of volumetric coherence function. Instead of computing the coherent and incoherent summations across the entire 2-D aperture, DCF projects aperture data onto azimuthal, elevational, diagonal, and anti-diagonal directions and subsequently calculates the CFs for each direction separately. The orthogonal coherence pairs, i.e., azimuth and elevation, and diagonal and anti-diagonal, are multiplied to obtain DCFRC and DCFDiag, respectively. The Jaccard similarity of DCFRC and DCFDiag is used to derive the final DCF to weigh the reconstructed images. We evaluated the performance of DCF beamforming in point-target simulations, multipurpose phantom experiments, and in vivo muscle imaging and compared it to delay-and-sum (DAS) and CF beamformers. Our DCF achieved sidelobe reduction throughout the entire volume compared to conventional CF. Moreover, diagonal weighting significantly improved, on average, the azimuthal resolution by 41.3% versus DAS and 7.35% versus CF as well as the elevational resolution by 40.4% versus DAS and 38.7% versus CF. Our proposed DCF offers a practical solution for resolution and contrast enhancement of volumetric imaging in 2-D matrix array configurations.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 6","pages":"817-827"},"PeriodicalIF":3.0,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143779808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Study of Frequency Trimming Ability and Performance Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonators by Joule Heating via Localized Annealing 局域退火焦耳加热薄膜压电MEMS谐振器的频率微调能力及性能增强研究。

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-03-31 DOI: 10.1109/TUFFC.2025.3556305

Ugur Guneroglu;Adnan Zaman;Abdulrahman Alsolami;Ivan F. Rivera;Jing Wang

{"title":"Study of Frequency Trimming Ability and Performance Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonators by Joule Heating via Localized Annealing","authors":"Ugur Guneroglu;Adnan Zaman;Abdulrahman Alsolami;Ivan F. Rivera;Jing Wang","doi":"10.1109/TUFFC.2025.3556305","DOIUrl":"10.1109/TUFFC.2025.3556305","url":null,"abstract":"This article deliberately explores the frequency trimming and performance enhancement of piezoelectric MEMS resonators through localized annealing induced by Joule heating. Targeting the effective postfabrication treatment of thin-film piezoelectric-on-silicon (TPoS) resonators, we employ a novel annealing approach that modifies the silicon resonator body-bottom electrode interface to enable meticulous resonance frequency trimming and enhanced overall performance. By applying a controlled dc current directly through the resonator’s body, precise resonance frequency shifts on the order of 0.1%–0.4% and significant increase in quality factor, from 981 to 2155, from 8214 to 9362, have been realized for rectangular-plate and disk-shaped resonators, respectively. Furthermore, this localized annealing process reduces the motional impedance from 3.43 to 1.65 k<inline-formula> <tex-math>$Omega $ </tex-math></inline-formula> for a rectangular-plate resonator and from 1.79 to 1.58 k<inline-formula> <tex-math>$Omega $ </tex-math></inline-formula> for a disk-shaped resonator, thus demonstrating its viability as a postfabrication treatment technique for a wide variety of MEMS devices. These results highlight the great potential of Joule heating-induced localized annealing in advancing RF systems that demand high precision, reliable filtering, and stable timing functions. This work provides new insights into the thermal annealing effects on MEMS resonators and lays a foundation for future innovations in related microsystem technologies.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"72 5","pages":"686-696"},"PeriodicalIF":3.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143763606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Publication Information IEEE超音波学、铁电学与频率控制论文集

IF 3 2区工程技术

IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2025-03-29 DOI: 10.1109/TUFFC.2025.3569143

引用次数: 0