IEEE transactions on ultrasonics, ferroelectrics, and frequency control最新文献

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Publication Information IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 出版信息
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-19 DOI: 10.1109/TUFFC.2024.3437951
{"title":"IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Publication Information","authors":"","doi":"10.1109/TUFFC.2024.3437951","DOIUrl":"https://doi.org/10.1109/TUFFC.2024.3437951","url":null,"abstract":"","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 8","pages":"C2-C2"},"PeriodicalIF":3.0,"publicationDate":"2024-08-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10639278","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142013306","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Three-Dimensional Super-Resolution Passive Cavitation Mapping in Laser Lithotripsy 激光碎石中的三维超分辨率被动空化绘图。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-16 DOI: 10.1109/TUFFC.2024.3443781
Daiwei Li;Nanchao Wang;Mucong Li;Arpit Mishra;Yuqi Tang;Tri Vu;Gaoming Xiang;Junqin Chen;Michael Lipkin;Pei Zhong;Junjie Yao
{"title":"Three-Dimensional Super-Resolution Passive Cavitation Mapping in Laser Lithotripsy","authors":"Daiwei Li;Nanchao Wang;Mucong Li;Arpit Mishra;Yuqi Tang;Tri Vu;Gaoming Xiang;Junqin Chen;Michael Lipkin;Pei Zhong;Junjie Yao","doi":"10.1109/TUFFC.2024.3443781","DOIUrl":"10.1109/TUFFC.2024.3443781","url":null,"abstract":"Kidney stone disease is a major public health issue. By breaking stones with repeated laser irradiation, laser lithotripsy (LL) has become the main treatment for kidney stone disease. Laser-induced cavitation is closely associated with stone damage in LL. Monitoring the cavitation activities during LL is thus crucial to optimizing the stone damage and maximizing LL efficiency. In this study, we have developed 3-D super-resolution passive cavitation mapping (3D-SRPCM), in which the cavitation bubble positions can be localized with an accuracy of \u0000<inline-formula> <tex-math>$40~mu $ </tex-math></inline-formula>\u0000 m, which is 1/10th of the acoustic diffraction limit. Moreover, the 3D-SRPCM reconstruction speed has been improved by 300 times by adopting a GPU-based sparse-matrix beamforming approach. Using 3D-SRPCM, we studied LL-induced cavitation activities on BegoStones, both in free space of water and confined space of a kidney phantom. The dose-dependent analysis provided by 3D-SRPCM revealed that accumulated impact pressure on the stone surface has the highest correlation with the stone damage. By providing high-resolution cavitation mapping during LL treatment, we expect that 3D-SRPCM may become a powerful tool to improve the clinical LL efficiency and patient outcome.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 12: Breaking the Resolution Barrier in Ultrasound","pages":"1690-1700"},"PeriodicalIF":3.0,"publicationDate":"2024-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141992289","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Switchable SAW Resonators and Ladder Filters Composed of Interdigitated Combs 由交织梳组成的可切换声表面波谐振器和梯形滤波器
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-12 DOI: 10.1109/TUFFC.2024.3441531
R. Alcorta Galván;C. Croënne;B. Dubus;B. Loiseaux;E. Eustache;M. Bertrand;A.-C. Hladky-Hennion
{"title":"Switchable SAW Resonators and Ladder Filters Composed of Interdigitated Combs","authors":"R. Alcorta Galván;C. Croënne;B. Dubus;B. Loiseaux;E. Eustache;M. Bertrand;A.-C. Hladky-Hennion","doi":"10.1109/TUFFC.2024.3441531","DOIUrl":"10.1109/TUFFC.2024.3441531","url":null,"abstract":"This work presents the development of switchable surface acoustic wave (SAW) resonators fabricated on a LiNbO3 substrate, which uses the electrical Bragg bandgap concept to control the resonance frequency. The modification of the electrical condition of electrode arrays shifts their bandgap center frequency, which in turn changes the effective cavity length and resonance frequency of the resonator. This method uses the electrodes already present in SAW devices, thus reducing the complexity of potentially tunable SAW components. In this article, the electrodes that make up the cavity mirrors are connected into interdigitated comb pairs (IDCPs), reducing the necessary number of switches for operation. Finite-element method (FEM) simulations are used to analyze resonator operation and design difficulties are discussed. Frozen (with no possibility of switching) and switchable versions of a chosen resonator structure are fabricated to experimentally showcase resonator operation. It is found that it is possible to design switchable SAW resonators, which require a single switch and present a relative frequency jump of around 2.3%. Finally, frozen single-cell and four-cell ladder filters are fabricated as a proof of concept of a switchable SAW filter.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 10","pages":"1302-1313"},"PeriodicalIF":3.0,"publicationDate":"2024-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141971033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spatial Ambiguity Correction in Coherence-Based Average Sound Speed Estimation 基于相干的平均声速估算中的空间模糊校正。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-08 DOI: 10.1109/TUFFC.2024.3440832
Rifat Ahmed;Gregg E. Trahey
{"title":"Spatial Ambiguity Correction in Coherence-Based Average Sound Speed Estimation","authors":"Rifat Ahmed;Gregg E. Trahey","doi":"10.1109/TUFFC.2024.3440832","DOIUrl":"10.1109/TUFFC.2024.3440832","url":null,"abstract":"Sound speed estimation can potentially correct the focusing errors in medical ultrasound. Maximizing the echo spatial coherence as a function of beamforming sound speed is a known technique to estimate the average sound speed. However, beamformation with changing sound speed causes a spatial shift of the echo signals resulting in noise and registration errors in the average sound speed estimates. We show that the spatial shift can be predicted and corrected, leading to superior sound speed estimates. Methods are presented for axial and 2-D location correction. Methods were evaluated using simulations and experimental phantom data. The location correction strategies improved the variance of sound speed estimates and reduced artifacts in the presence of strong backscatter variations. Limitations of the proposed methods and potential improvement strategies were evaluated.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 10","pages":"1244-1254"},"PeriodicalIF":3.0,"publicationDate":"2024-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141906469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Multivariate Statistical Approach to Wrinkling Detection in Composites 复合材料皱纹检测的多元统计方法。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-01 DOI: 10.1109/TUFFC.2024.3436658
Matthew G. Chandler;Anthony J. Croxford;Paul D. Wilcox
{"title":"A Multivariate Statistical Approach to Wrinkling Detection in Composites","authors":"Matthew G. Chandler;Anthony J. Croxford;Paul D. Wilcox","doi":"10.1109/TUFFC.2024.3436658","DOIUrl":"10.1109/TUFFC.2024.3436658","url":null,"abstract":"Nondestructive inspection using ultrasound in materials such as carbon-fiber reinforced polymers (CFRPs) is challenging as the ultrasonic wave will scatter from each ply in the structure of the component. This may be improved using image processing algorithms such as the total focusing method (TFM); however, the high level of backscattering within the sample is very likely to obscure a signal arising from a flaw. Detection of wrinkling, or out-of-plane fiber waviness, is especially difficult to automate as no additional scattering is produced (as might be the case with delaminations). Instead, wrinkling changes how a signal is scattered due to the physical displacement of ply layers from their expected location. In this article, we propose a method of detecting wrinkling by examining the regional variations in image intensity, which are expected to be highly correlated between similar ply layers in the structure. By characterizing the 2-D spatial autocorrelation of an area surrounding a given location in the image of pristine components, the distribution of acceptable values is estimated. Wrinkling is observed to correspond with a significant deviation from this distribution, which is readily detected. A comparison is made with an alternative image processing approach identified from the literature, finding that the proposed method has equivalent performance for large wrinkling amplitudes and better performance for low wrinkling amplitudes.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 9","pages":"1141-1151"},"PeriodicalIF":3.0,"publicationDate":"2024-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141874689","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A High Sensitivity CMUT-Based Passive Cavitation Detector for Monitoring Microbubble Dynamics During Focused Ultrasound Interventions 基于 CMUT 的高灵敏度被动空化探测器,用于监测聚焦超声介入过程中的微泡动态。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-08-01 DOI: 10.1109/TUFFC.2024.3436918
Reza Pakdaman Zangabad;Hohyun Lee;Xitie Zhang;M. Sait Kilinc;Costas D. Arvanitis;F. Levent Degertekin
{"title":"A High Sensitivity CMUT-Based Passive Cavitation Detector for Monitoring Microbubble Dynamics During Focused Ultrasound Interventions","authors":"Reza Pakdaman Zangabad;Hohyun Lee;Xitie Zhang;M. Sait Kilinc;Costas D. Arvanitis;F. Levent Degertekin","doi":"10.1109/TUFFC.2024.3436918","DOIUrl":"10.1109/TUFFC.2024.3436918","url":null,"abstract":"Tracking and controlling microbubble (MB) dynamics in the human brain through acoustic emission (AE) monitoring during transcranial focused ultrasound (tFUS) therapy are critical for attaining safe and effective treatments. The low-amplitude MB emissions have harmonic and ultra-harmonic components, necessitating a broad bandwidth and low-noise system for monitoring transcranial MB activity. Capacitive micromachined ultrasonic transducers (CMUTs) offer high sensitivity and low noise over a broad bandwidth, especially when they are tightly integrated with electronics, making them a good candidate technology for monitoring the MB activity through human skull. In this study, we designed a 16-channel analog front-end (AFE) electronics with a low-noise transimpedance amplifier (TIA), a band-gap reference circuit, and an output buffer stage. To assess AFE performance and ability to detect MB AE, we combined it with a commercial CMUT array. The integrated system has \u0000<inline-formula> <tex-math>${12}.{3}$ </tex-math></inline-formula>\u0000–\u0000<inline-formula> <tex-math>${61}.{25} ~text {mV}/text {Pa}$ </tex-math></inline-formula>\u0000 receive sensitivity with \u0000<inline-formula> <tex-math>${0}.{085}$ </tex-math></inline-formula>\u0000–\u0000<inline-formula> <tex-math>${0}.{23}~text {mPa}/text {(}text {Hz}text {)}^{1/2}$ </tex-math></inline-formula>\u0000 minimum detectable pressure (MDP) up to 3 MHz for a single element CMUT with 3.78 \u0000<inline-formula> <tex-math>$text {mm}^{{2}}$ </tex-math></inline-formula>\u0000 area. Experiments with free MBs in a microfluidic channel demonstrate that our system is able to capture key spectral components of MBs’ harmonics when sonicated at clinically relevant frequencies (0.5 MHz) and pressures (250 kPa). Together our results demonstrate that the proposed CMUT system can support the development of novel passive cavitation detectors (PCD) to track MB activity for attaining safe and effective focused ultrasound (FUS) treatments.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 9","pages":"1087-1096"},"PeriodicalIF":3.0,"publicationDate":"2024-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141874688","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Automatic Detection of Anomalies in Post-Processed Data Applied to UTC Time Transfer Links 自动检测适用于 UTC 时间传输链路的后处理数据中的异常情况。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-07-29 DOI: 10.1109/TUFFC.2024.3434378
Antoine Baudiquez;Gianna Panfilo
{"title":"Automatic Detection of Anomalies in Post-Processed Data Applied to UTC Time Transfer Links","authors":"Antoine Baudiquez;Gianna Panfilo","doi":"10.1109/TUFFC.2024.3434378","DOIUrl":"10.1109/TUFFC.2024.3434378","url":null,"abstract":"In this article, we present a method for identifying anomalies, particularly time steps, which can affect data. Recognition of these anomalies is essential for understanding the intrinsic nature of problems that may occasionally affect the data, and for guaranteeing system reliability and accuracy. The tool presented, based on the Kalman filter, is optimized to work with post-processed data which means that the dataset is available at the time the algorithm is run. The main aim is to retain as much data as possible, while detecting anomalies, and avoid deleting valuable data. The originality of this tool with respect to the already existing Kalman-filter-based tools for detecting anomalies is substantial, because its objective is not only to enable the system to run but also to avoid unnecessary deletion of valuable data. This tool is designed to accurately determine the date of occurrence and magnitude of these anomalies, focusing on time steps. The tool presented will be applied, by way of example, to the time links used in Coordinated Universal Time (UTC) as calculated by Bureau International des Poids et Measures (BIPM), Paris, France. In addition, the algorithm developed will enable the BIPM’s Time Department to be rapidly alerted to unexpected behavior that may compromise UTC performance. To guarantee the reliability and accuracy of UTC, rigorous data validation and rapid problem identification are essential.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 9","pages":"1162-1169"},"PeriodicalIF":3.0,"publicationDate":"2024-07-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141792315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-Accuracy Airborne Rangefinder via Deep Learning Based on Piezoelectric Micromachined Ultrasonic Cantilevers 基于压电微机械超声波悬臂的深度学习高精度机载测距仪。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-07-25 DOI: 10.1109/TUFFC.2024.3433407
Amirhossein Moshrefi;Abid Ali;Suaid Tariq Balghari;Frederic Nabki
{"title":"High-Accuracy Airborne Rangefinder via Deep Learning Based on Piezoelectric Micromachined Ultrasonic Cantilevers","authors":"Amirhossein Moshrefi;Abid Ali;Suaid Tariq Balghari;Frederic Nabki","doi":"10.1109/TUFFC.2024.3433407","DOIUrl":"10.1109/TUFFC.2024.3433407","url":null,"abstract":"This article presents a high-accuracy air-coupled acoustic rangefinder based on piezoelectric microcantilever beam array using continuous waves. Cantilevers are used to create a functional ultrasonic rangefinder with a range of 0–1 m. This is achieved through a design of custom arrays. This research investigates various classification techniques to identify airborne ranges using ultrasonic signals. The initial approach involves implementing individual models such as support vector machine (SVM), Gaussian Naive Bayes (GNB), logistic regression (LR), k-nearest neighbors (KNNs), and decision tree (DT). To potentially achieve better performance, the study introduces a deep learning (DL) architecture based on convolutional neural networks (CNNs) to categorize different ranges. The CNN model combines the strengths of multiple classification models, aiming for more accurate range detection. To ensure the model generalizes well to unseen data, a technique called k-fold cross-validation (CV), which provides the reliability assessment, is used. The proposed framework demonstrates a significant improvement in accuracy (100%), and area under the curve (AUC) (1.0) over other approaches.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 9","pages":"1074-1086"},"PeriodicalIF":3.0,"publicationDate":"2024-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141758456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
3-D Transcranial Ultrasound Localization Microscopy Reveals Major Arteries in the Sheep Brain 三维经颅超声定位显微镜显示绵羊大脑中的主要动脉。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-07-25 DOI: 10.1109/TUFFC.2024.3432998
A. Coudert;Louise Denis;A. Chavignon;S. Bodard;M. Naveau;P. P. Sistiaga;R. Saulnier;C. Orset;D. Vivien;C. Chappard;Olivier Couture
{"title":"3-D Transcranial Ultrasound Localization Microscopy Reveals Major Arteries in the Sheep Brain","authors":"A. Coudert;Louise Denis;A. Chavignon;S. Bodard;M. Naveau;P. P. Sistiaga;R. Saulnier;C. Orset;D. Vivien;C. Chappard;Olivier Couture","doi":"10.1109/TUFFC.2024.3432998","DOIUrl":"10.1109/TUFFC.2024.3432998","url":null,"abstract":"Cerebral circulation ensures the proper functioning of the entire human body, and its interruption, i.e., stroke, leads to irreversible damage. However, tools for observing cerebral circulation are still lacking. Although MRI and computed tomography (CT) scans serve as conventional methods, their accessibility remains a challenge, prompting exploration into alternative, portable, and nonionizing imaging solutions like ultrasound with reduced costs. While ultrasound localization microscopy (ULM) displays potential in high-resolution vessel imaging, its 2-D constraints limit its emergency utility. This study delves into the feasibility of 3-D ULM with multiplexed probe for transcranial vessel imaging in sheep brains, emulating human skull characteristics. Three sheep underwent 3-D ULM imaging, compared with angiographic MRI, while skull characterization was conducted in vivo using ultrashort bone MRI sequences and ex vivo via micro-CT. The study showcased 3-D ULM’s ability to highlight vessels, down to the circle of Willis, yet within a confined 3-D field of view. Future enhancements in signal, aberration correction, and human trials hold promise for a portable, volumetric, transcranial ultrasound angiography system.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 12: Breaking the Resolution Barrier in Ultrasound","pages":"1666-1676"},"PeriodicalIF":3.0,"publicationDate":"2024-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10609837","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141758455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Piezoelectric Microacoustic Metamaterial Filters 压电微声超材料滤波器。
IF 3 2区 工程技术
IEEE transactions on ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-07-24 DOI: 10.1109/TUFFC.2024.3432849
Onurcan Kaya;Xuanyi Zhao;Cristian Cassella
{"title":"Piezoelectric Microacoustic Metamaterial Filters","authors":"Onurcan Kaya;Xuanyi Zhao;Cristian Cassella","doi":"10.1109/TUFFC.2024.3432849","DOIUrl":"10.1109/TUFFC.2024.3432849","url":null,"abstract":"We present the first microacoustic metamaterial filters (MMFs). The bandpass of the reported MMFs is not generated by coupling, electrically or mechanically, various acoustic resonances; instead, it originates from the passbands and stopbands of a chain of three acoustic metamaterial (AM) structures. These structures form an AM transmission line (AMTL) and two AM reflectors (AMRs), respectively. Two single metal strips serve as input and output transducers with a wideband frequency response. Since MMFs do not rely on resonators, they do not require high-resolution trimming or mass-loading steps to accurately tune the resonance frequency difference between various microacoustic resonant devices. These steps often involve finely controlling the thickness of a device layer, with resolutions that can be as low as a few Angstroms when building GHz filters. The acoustic bandwidth of MMFs is mostly determined by geometrical and mechanical parameters of their AM structures. MMFs necessitate external circuit components for impedance matching, in contrast to the existing microacoustic filters that often employ circuit components only to eliminate ripples within their passband. We have designed and constructed the first MMFs from a 400-nm-thick scandium-doped aluminum nitride (AlScN) film using a 30% scandium-doping concentration. These devices operate in the radio frequency (RF) range. We validated these devices’ performance through finite-element modeling (FEM) simulations and through measurements of a set of fabricated devices. When matched with ideal circuit components, the built MMFs exhibit filter responses with a center frequency in the ultrahigh-frequency range, a fractional bandwidth (FBW) of ~2.54%, a loss of ~4.9 dB, an in-band group delay between \u0000<inline-formula> <tex-math>$70~pm ~25$ </tex-math></inline-formula>\u0000 ns, and a temperature coefficient of frequency (TCF) of ~22.2 ppm/° C.","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"71 9","pages":"1063-1073"},"PeriodicalIF":3.0,"publicationDate":"2024-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141758457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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