1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)最新文献

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A novel 0.7 V two-port 6T SRAM memory cell structure with single-bit-line simultaneous read-and-write access (SBLSRWA) capability using partially-depleted SOI CMOS dynamic-threshold technique 一种新颖的0.7 V双端口6T SRAM存储单元结构,采用部分耗尽SOI CMOS动态阈值技术,具有单比特线同时读写访问(SBLSRWA)能力
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-27 DOI: 10.1109/SOI.1999.819860
S. Liu, J. Kuo
{"title":"A novel 0.7 V two-port 6T SRAM memory cell structure with single-bit-line simultaneous read-and-write access (SBLSRWA) capability using partially-depleted SOI CMOS dynamic-threshold technique","authors":"S. Liu, J. Kuo","doi":"10.1109/SOI.1999.819860","DOIUrl":"https://doi.org/10.1109/SOI.1999.819860","url":null,"abstract":"Summary form only given. This paper reports a novel low-voltage two-port 6T SRAM memory cell structure with single-bit-line simultaneous read-and-write access capability using a partially-depleted SOI CMOS dynamic-threshold technique. With an innovative approach connecting the body terminal of an NMOS device in the latch and the write access pass transistor to the write word line, this 6T memory cell can be used to provide SBLSRWA capability for 0.7 V two-port SOI CMOS VLSI SRAM, as verified by MEDICI results.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126923723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An SOI nano flash memory device 一种SOI纳米闪存器件
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819872
Xiaohui Tang, X. Baie, V. Bayot, F. van de Wiele, J. Colinge
{"title":"An SOI nano flash memory device","authors":"Xiaohui Tang, X. Baie, V. Bayot, F. van de Wiele, J. Colinge","doi":"10.1109/SOI.1999.819872","DOIUrl":"https://doi.org/10.1109/SOI.1999.819872","url":null,"abstract":"Several nano flash memory devices have been reported in the literature (Nakajima et al. 1996; Guo et al. 1996; Welser et al. 1997). These devices are basically miniature EEPROM cells in which electrons are injected in a floating storage node by tunnel effect through an oxide layer. The variation of the potential of the floating node due to electron injection modifies the threshold voltage of a thin and narrow SOI MOSFET, which makes it possible to store information in the device. This paper describes the fabrication of an SOI nano flash memory device using Unibond/sup (R)/ wafers and e-beam lithography. The device can be programmed and erased using 5 V gate voltage pulses. The area of the active storage region is 150 nm/spl times/150 nm.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115499180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Defect analysis of patterned SOI material 图案化SOI材料缺陷分析
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819882
S. Bagchi, Y. Yu, M. Mendicino, J. Conner, A. Anderson, L. Prabhu, M. Tiner, M. Alles
{"title":"Defect analysis of patterned SOI material","authors":"S. Bagchi, Y. Yu, M. Mendicino, J. Conner, A. Anderson, L. Prabhu, M. Tiner, M. Alles","doi":"10.1109/SOI.1999.819882","DOIUrl":"https://doi.org/10.1109/SOI.1999.819882","url":null,"abstract":"SOI technology has several advantages over bulk Si, including potentially lower leakage, higher speed, freedom from latch-up, and lowered parasitic capacitance. However, issues such as floating body effects, poorer thermal conductivity, lack of device libraries, etc., can complicate operation, processing, and design of certain devices fabricated on SOI wafers. In such a situation, it may be desirable to have those parts of the circuits that can take advantage of SOI fabricated separately from the other circuits on bulk Si. The traditional approach is a multichip module (MCM), with sub-units fabricated on the appropriate substrate. This can add considerably to the cost and complexity of the final product. An elegant alternative approach is a patterned SOI wafer. Such a wafer has bulk Si areas interspersed with SOI areas, or \"pads\", of desired dimensions. Several technologies have been proposed for fabrication of such wafers (Van Bentum and Vogt, 1998). Perhaps the most promising of them is patterned SIMOX. SIMOX has emerged as a mature processing technology for the production of SOI wafers. Prior to design of device layouts, it is important to take into consideration the type, density, and location of crystalline defects which might be present in the region of transition from bulk Si to the SOI pads. In this paper, we report the results of our investigation of crystalline defects in patterned SIMOX wafers.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123116343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Evidence of energetically-localized trap-states at SOI-BOX interface in high-dose SIMOX wafers 高剂量SIMOX晶圆中SOI-BOX界面能量局域阱态的证据
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819852
T. Ushiki, K. Kotani, T. Funaki, K. Kawai, T. Ohmi
{"title":"Evidence of energetically-localized trap-states at SOI-BOX interface in high-dose SIMOX wafers","authors":"T. Ushiki, K. Kotani, T. Funaki, K. Kawai, T. Ohmi","doi":"10.1109/SOI.1999.819852","DOIUrl":"https://doi.org/10.1109/SOI.1999.819852","url":null,"abstract":"As the trend in SOI technology continues to be towards thin-film devices, it is important to take a closer look at the electrically active defects at SOI-BOX interface, which could strongly affect the performance and reliability of SOI devices (Cristoloveanu, 1995). Although several studies on the interface trap densities at the SOI-BOX interface of SIMOX wafers have been reported (Nakashima et al, 1998; Yang et al., 1992), comprehensive analysis of these electrically active defects has not yet been fully studied, despite its scientific interest and technological importance. The purpose of this paper is to show for the first time that extraordinary kink effects have been experimentally observed in back-gate transconductance (g/sub m2/) characteristics of fully-depleted (FD) SOI MOS transistors on high-dose SIMOX wafers, and a physical explanation has been found.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"87 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117170119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Thermal modeling of thin-film SOI transistors 薄膜SOI晶体管的热建模
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819842
M. Asheghi, P. Sverdrup, K. Goodson
{"title":"Thermal modeling of thin-film SOI transistors","authors":"M. Asheghi, P. Sverdrup, K. Goodson","doi":"10.1109/SOI.1999.819842","DOIUrl":"https://doi.org/10.1109/SOI.1999.819842","url":null,"abstract":"Summary form only given. Predictions and analysis of the temperature field in a SOI device can be performed at several levels of complexity. Numerical simulations (e.g. Berger and Chai, 1991) and analytical methods (e.g. Goodson and Flik, 1992) have been used extensively to estimate the temperature field in a SOI device with different levels of accuracy. Numerical simulations of the temperature field in a SOI device can precisely determine the hot spots in a transistor, if proper thermal properties and accurate modeling of the heat generation in the device are considered. The analytical methods can provide physical insights into the effect of SOI device dimensions and thermal properties on the device temperature rise. This work aims to demonstrate the impact of the size effect on the thermal conductivity of thin silicon layers and subsequently on the SOI device thermal resistance.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130579878","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Performance trade-offs of argon implanted SOI MOSFETs with In and Sb retrograde channel doping In和Sb逆行通道掺杂下氩注入SOI mosfet的性能权衡
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819867
X.-L. Xu, R. Widenhofer, Y. Yu, O. Zia, S. Pozder, D. Hall, M. Rashed, D. Chang, S. Jallepalli, D. Connelly, T. Van Gompel, M. Olivares, M. Mendicino, J. Candelaria, S. Veeraraghavan, D. Dow
{"title":"Performance trade-offs of argon implanted SOI MOSFETs with In and Sb retrograde channel doping","authors":"X.-L. Xu, R. Widenhofer, Y. Yu, O. Zia, S. Pozder, D. Hall, M. Rashed, D. Chang, S. Jallepalli, D. Connelly, T. Van Gompel, M. Olivares, M. Mendicino, J. Candelaria, S. Veeraraghavan, D. Dow","doi":"10.1109/SOI.1999.819867","DOIUrl":"https://doi.org/10.1109/SOI.1999.819867","url":null,"abstract":"We report high performance device characteristics of 0.18 /spl mu/m SOI CMOS technology with indium (In) and antimony (Sb) retrograde channel doping and argon (Ar) implant. Experimental results demonstrate significant suppression of floating body (FB) effects, reduced off-state current, improved I/sub on/-I/sub off/ characteristics, and reduced drain induced barrier lowering (DIBL) values for the Ar implanted SOI devices. At the same time, the presence of Ar leads to increased subthreshold swing (SS), degraded GIDL characteristics, and increased electrical gate oxide thickness. Experimental results also show that the Ar implant for suppression of FB effects in PD SOI NMOS devices is less significant as the device gate channel length reduces to 0.15 /spl mu/m and below.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123706817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A 1.8 V 2.5 GHz PLL using 0.18 /spl mu/m SOI/CMOS technology 采用0.18 /spl mu/m SOI/CMOS技术的1.8 V 2.5 GHz锁相环
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819834
K. Yoshimura, K. Ueda, T. Nakura, K. Kubo, K. Mashiko, S. Maeda, S. Maegawa, Y. Yamaguchi, Y. Matsuda
{"title":"A 1.8 V 2.5 GHz PLL using 0.18 /spl mu/m SOI/CMOS technology","authors":"K. Yoshimura, K. Ueda, T. Nakura, K. Kubo, K. Mashiko, S. Maeda, S. Maegawa, Y. Yamaguchi, Y. Matsuda","doi":"10.1109/SOI.1999.819834","DOIUrl":"https://doi.org/10.1109/SOI.1999.819834","url":null,"abstract":"Summary form only given. This paper shows a 2.5 GHz PLL circuit for high-speed communication devices using a 0.18 /spl mu/m SOI/CMOS technology. The technology uses a shallow trench structure to effectively isolate active devices on a thin film SOI substrate. We employed floating-body SOI/CMOS in this chip. We applied a ring oscillator for the voltage controlled-oscillator (VCO). The well-known issues of SOI do not affect the circuit stability and noise performance of our PLL circuit for several reasons. Firstly, as the frequency range required for the VCO is comparatively narrow, the floating-body configuration would have little effect on circuit operation (Ueda et al., 1996). Secondly, thermal equilibrium on the ring oscillator can be achieved within a few microseconds (Tenbroek et al., 1998). Then the self-heating issue would be insignificant for the lock-in process of the PLL. Besides this, the buried oxide of SOI and shallow trench isolation reduces the crosstalk noise from the large digital logic block which is the most potentially serious problem for system-level integration of sensitive circuits and large logic blocks.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128666192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fractional implantation area effects on patterned ion-cut silicon layer transfer 分数注入面积对图案离子切割硅层转移的影响
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819886
C. Yun, N. Cheung
{"title":"Fractional implantation area effects on patterned ion-cut silicon layer transfer","authors":"C. Yun, N. Cheung","doi":"10.1109/SOI.1999.819886","DOIUrl":"https://doi.org/10.1109/SOI.1999.819886","url":null,"abstract":"By masking the gate dielectric area of MOS devices during hydrogen implantation, patterned ion-cut can transfer processed IC device layers to other substrates (Lee et al. 1996; Roberds et al. 1998; Yun et al. 1998). Previous results showed that a 16 /spl mu/m/spl times/16 /spl mu/m nonimplanted region can be cleaved with a 4 /spl mu/m implanted area surrounding it. However, surface morphology of the cleaved Si(100) samples was rough, with a total thickness variation (TTV) of /spl sim/0.4 /spl mu/m for a 1.3 /spl mu/m-thick silicon layer transfer. In order to improve the roughness, we have investigated the fractional implantation area (FIA) effects on the transferred layer surface morphology.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132414544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A body-contact SOI MOSFET model for circuit simulation 用于电路仿真的体接触SOI MOSFET模型
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819853
P. Su, S. Fung, F. Assaderaghi, C. Hu
{"title":"A body-contact SOI MOSFET model for circuit simulation","authors":"P. Su, S. Fung, F. Assaderaghi, C. Hu","doi":"10.1109/SOI.1999.819853","DOIUrl":"https://doi.org/10.1109/SOI.1999.819853","url":null,"abstract":"Making contact to the body of a partially depleted (PD) SOI transistor offers another degree of design freedom. For example, DTMOS (Assaderaghi et al., 1994) has demonstrated that the body-contact can be used to enhance the power/delay performance. It has also been shown that the body-contact plays an important role in eliminating the floating-body instability (Chuang, 1998) for sensitive circuits. A complete SPICE model that explicitly addresses the nonidealities of the body-contact is surely needed for SOI circuit design. Here, we present a compact body-contact SOI MOSFET model that has been implemented in BSIMPD2.0 for circuit simulation.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125399739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Temperature dependent hysteretic propagation delay in FB SOI inverter chain fbsoi逆变器链中温度相关的滞回传播延迟
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345) Pub Date : 1999-10-04 DOI: 10.1109/SOI.1999.819863
D. Chang, Byonug Min, S. Veeraraghavan, M. Mendicino, T. Cooper, S. Egley, K. Cox
{"title":"Temperature dependent hysteretic propagation delay in FB SOI inverter chain","authors":"D. Chang, Byonug Min, S. Veeraraghavan, M. Mendicino, T. Cooper, S. Egley, K. Cox","doi":"10.1109/SOI.1999.819863","DOIUrl":"https://doi.org/10.1109/SOI.1999.819863","url":null,"abstract":"The CMOS gate delay on SOI depends on the switching history of floating-body transistors, which introduces uncertainty in predicting the performance of SOI-based circuits (Suh and Fossum, 1994; Shahidi et al., 1999). The main cause of the hysteretic delay is due to the transient variation of the body voltage during switching and the corresponding threshold voltage change. Since the capacitance coupling and generation/recombination currents determining the transient body-voltage are strong functions of temperature, the gate delay is also expected to show a significant temperature dependence. In the measurement of a 610-stage floating-body SOI CMOS open-ended inverter chain, we have observed that the hysteretic gate delay variation is worse at higher temperature for devices which showed pulse compression at room temperature. In this work, we have performed simulations to predict fast/slow gate delays for different SOI device structures versus temperature, and compared these results to measurements, thus illustrating the importance of accounting for temperature in history effects.","PeriodicalId":117832,"journal":{"name":"1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133978592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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