K. Yoshimura, K. Ueda, T. Nakura, K. Kubo, K. Mashiko, S. Maeda, S. Maegawa, Y. Yamaguchi, Y. Matsuda
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引用次数: 0
摘要
只提供摘要形式。本文介绍了一种采用0.18 /spl mu/m SOI/CMOS技术的高速通信器件的2.5 GHz锁相环电路。该技术使用浅沟槽结构有效地隔离薄膜SOI衬底上的有源器件。我们在芯片中采用了浮体SOI/CMOS。我们采用环形振荡器作为压控振荡器(VCO)。众所周知的SOI问题不会影响我们的锁相环电路的稳定性和噪声性能,原因有几个。首先,由于VCO所需的频率范围比较窄,因此浮体结构对电路运行的影响不大(Ueda et al., 1996)。其次,环形振荡器上的热平衡可以在几微秒内实现(Tenbroek et al., 1998)。那么自热问题对于锁相环的锁相过程将是微不足道的。此外,SOI的埋藏氧化物和浅沟槽隔离降低了大型数字逻辑块的串扰噪声,这是敏感电路和大型逻辑块的系统级集成中最潜在的严重问题。
A 1.8 V 2.5 GHz PLL using 0.18 /spl mu/m SOI/CMOS technology
Summary form only given. This paper shows a 2.5 GHz PLL circuit for high-speed communication devices using a 0.18 /spl mu/m SOI/CMOS technology. The technology uses a shallow trench structure to effectively isolate active devices on a thin film SOI substrate. We employed floating-body SOI/CMOS in this chip. We applied a ring oscillator for the voltage controlled-oscillator (VCO). The well-known issues of SOI do not affect the circuit stability and noise performance of our PLL circuit for several reasons. Firstly, as the frequency range required for the VCO is comparatively narrow, the floating-body configuration would have little effect on circuit operation (Ueda et al., 1996). Secondly, thermal equilibrium on the ring oscillator can be achieved within a few microseconds (Tenbroek et al., 1998). Then the self-heating issue would be insignificant for the lock-in process of the PLL. Besides this, the buried oxide of SOI and shallow trench isolation reduces the crosstalk noise from the large digital logic block which is the most potentially serious problem for system-level integration of sensitive circuits and large logic blocks.