2006 19th International Vacuum Nanoelectronics Conference最新文献

{"title":"GaBi Liquid Metal Alloy Ion Source for the Production of Ions of Interest in Microelectronics Research","authors":"L. Bischoff, W. Pilz, T. Ganetsos, R. Forbes, C. Akhmadaliev","doi":"10.1109/IVNC.2006.335338","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335338","url":null,"abstract":"In this work a Ga38Bi62 alloy liquid metal ion source has been studied, which allows to implant in the case of a silicon substrate shallow donor ions (Bi) as well as acceptors (Ga) in the sub micron range without changing the source. A detailed analysis of the mass spectra as a function of emission current, obtained from this source, was used to investigate the mechanism for the production of single and double-charged ions. Moreover, the intensity of cluster ions extracted by the source, as a function of emission current is represented. Theoretical modeling supports the experimental results","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133140373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Plasmachemical Processing of Field Emission Cathodes Made of Carbon Fibers Bundles","authors":"M. Leshukov, E. P. Sheshin","doi":"10.1109/IVNC.2006.335494","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335494","url":null,"abstract":"A new method of processing field emission cathodes made of carbon fiber bundle is presented. It is the etching of carbon fibers bundle cathode by corona discharge on air. The influence of the plasmachemical processing on the emission characteristics of the field emission cathodes, was examined. Results show that for cathodes processed by corona discharge, carbon fiber bundle is subject less to the abrupt reorganization of its structure (redistribution of fibers in a bundle). Also, the value of local fluctuation of anode voltage had been significantly decreased. The field emission parameters of cathodes, namely: the emitting surface area and the form-factor of the cathode, have been obtained from analysis of the current-voltage characteristics. The form-factor of the cathode after the processing by corona discharge has been decreased while the emitting surface area of the cathode after the etching process has been increased. The plasmachemical processing by corona discharge promoted for more uniform distribution of field emission electrons on the surface of the cathode","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114471011","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Growth of Tungsten Nanotip and Its Field Emission Characteristics","authors":"C. Kimura, M. Yukawa, H. Aoki, Y. Morihisa, T. Kobayashi, R. Fushimi, S. Hayashi, Jung-Goo Lee, H. Mori, T. Sugino","doi":"10.1109/IVNC.2006.335489","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335489","url":null,"abstract":"Summary form only given. A considerable attention has been paid to development of a nanotip for the electron source and the cantilever of scanning microscopes. A point electron source is strongly desired to improve performance of high-resolution electron beam instruments. A single carbon nanotube (CNT) is expected as one of the most promising materials to achieve a small apex radius of the device. There has been a report on field emission characteristics of the single CNT. This paper describes a novel finding that a single crystalline tungsten nanotip with an apex radius as small as 4.2 nm is grown on the top of the conventional polycrystalline tungsten tip prepared by electrochemical etching. An electron emission current of 1 nA is obtained at an electric field as low as xxx V/mum and an electron emission current as high as 0.1 mA is achieved from a single tungsten nanotip emitter. Tungsten nanotip emitter was fabricated as follows. A conventional tungsten tip with an apex radius of 100 nm was formed by electrochemical etching and was coated with BN film. The BN film was grown by plasma-assisted chemical vapor deposition. Borontrichloride and nitrogen were used as source gases. The growth temperature was fixed at 650degC. The tungsten tip with BN film was set in the high vacuum chamber. DC bias was supplied between the anode electrode and the tungsten tip sample. As a result, it was found that a tungsten nanotip was grown on the conventional tungsten tip though the formation mechanism was not understood yet. It was observed by transmission electron microscope that a single crystalline tungsten nanotip with (110) crystallographic orientation was grown. Field emission characteristics were measured in the chamber evacuated to 1times10-9 torr. The turn-on electric field at an emission current of 1 nA was estimated to be 8.8times10-2 V/mum for the conventional tungsten emitter On the other hand the turn-on electric field was estimated to be as low as 2.6times10-2 V/mum for the tungsten nanotip field emitter. An electron emission current as high as 0.1 mA was achieved. These field emission characteristics of the single tungsten nanotip are comparable with those of the single CNT","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117176152","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Preparation and Field Emission Properties of Mesoporous Silica Nanotube-ecomposites Materials","authors":"Cao Yong, Lei Wei, Zhang Xiaobing, Wang Baoping","doi":"10.1109/IVNC.2006.335206","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335206","url":null,"abstract":"Carbon nanotube/mesoporous silica composites with controlled diameter and bundle size have been synthesized by using highly selective catalytic method. The composites were characterized by SEM and TEM. Results suggest that the bundle size, rather than the nanotube diameter or differences in work function, is more important in determining the field emission properties of SWNT/mesoporous silica composites. The possibility of tailoring the electrical properties of SWNT emitters by adjusting the synthesis parameters has been demonstrated. In addition, the present results show that the as-produced SWNT/mesoporous silica composites have similar or better field emission properties than the purified nanotube samples, even though the concentration of nanotubes on the emitting surface of the as-produced was much lower than that in the pure SWNT sample. The good field emission efficiency of the as-produced material combined with the convenience of eliminating any purification process make this material an attractive field emitter. Thus we can anticipate that the method presented in this work offers a solution to forming the bi-component structure of nanomaterials","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117228645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Comparison of Semi-Classical and Atomic Models for Field Emission","authors":"C. Edgcombe","doi":"10.1109/IVNC.2006.335306","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335306","url":null,"abstract":"Several semi-classical and atomic models of field emission developed from the extension of Fowler-Nordheim theory within the past several years are compared","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123671206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Composition of Precipitates in High Boron Chromium Steel","authors":"A. Golpayegani, H. Andrén","doi":"10.1109/IVNC.2006.335387","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335387","url":null,"abstract":"Atom probe field ion microscopy has been used to characterize martensitic 9-12% chromium steel with high boron content and determine the composition of the very fine precipitates since this can only be revealed by the high spatial resolution of this method. Energy-filtered transmission electron microscopy has been used as a complement for characterization of this steel","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124100267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Welding of Single Tungsten Oxide Nanotips on Microtips and Their Application as a Field Electron Emitter","authors":"S. An, J. She, S. Deng, J. Chen, N. Xu","doi":"10.1109/IVNC.2006.335288","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335288","url":null,"abstract":"In this paper, single tungsten oxide (WOx) nanotip has been welded on tungsten microtip by pulsed laser. Also, field emission characteristic and low resistance electrical contact were obtained using scanning electron microscopy (SEM)","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125778124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Field Emission From the Carbon Nanotube Cathode Fabricated by Powder Metallurgical Method","authors":"Xiaowei Yin, C. Lou, Xiaobing Zhang, W. Lei, K. Hou","doi":"10.1109/IVNC.2006.335213","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335213","url":null,"abstract":"Traditional powder metallurgical method is used to fabricate the cold field emission cathodes. Copper powder and nano-copper oxide powder are mixed with carbon nanotubes, respectively, then pressed and sintered to form two kinds of bulk cathodes. The measurement results show that cathodes fabricated by this method have typical I-V curve and F-N curve","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124759947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Controlling growth of aligned carbon nanotube bundles arrays with microwave plasma CVD","authors":"J.B. Liu, S. Deng, N. Xu, Jun Chen, Y. Ke","doi":"10.1109/IVNC.2006.335292","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335292","url":null,"abstract":"A method was employed to improve the growth condition of carbon nanotube (CNT) in microwave plasma CVD system. Plasma etching on silicon substrates was avoided effectively. CNT bundles arrays were synthesized and the CNTs were vertical to the substrate","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124857410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Advances in Specimen Preparation for Atom Probe Tomography","authors":"D. Larson, K. Thompson, D. Lawrence, S. Kostrna, T. Prosa, R. Ulfig, T. Kelly","doi":"10.1109/IVNC.2006.335333","DOIUrl":"https://doi.org/10.1109/IVNC.2006.335333","url":null,"abstract":"This paper presents several advances made in the areas of 1) automated electropolishing of metals, 2) specimen preparation for grain boundary analysis, 3) site-specific specimen preparation for semiconductor devices, and 4) low-energy focused ion beam (FIB) milling to reduce the extent of ion-induced damage during the generic FIB preparation process","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129742509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}